Semiconductor device, display apparatus, and electronic device

ABSTRACT

A semiconductor device includes first to tenth transistors and first to fourth capacitors. Gates of the first and the fourth transistors are electrically connected to each other. First terminals of the first, second, fifth, and eighth transistors are electrically connected to a first terminal of the fourth capacitor. A second terminal of the fifth transistor is electrically connected to a gate of the sixth transistor and a first terminal of the second capacitor. A second terminal of the eighth transistor is electrically connected to a gate of the ninth transistor and a first terminal of the third capacitor. Gates of the second, seventh, and tenth transistors are electrically connected to first terminals of the third and fourth transistors and a first terminal of the first capacitor. First terminals of the sixth and seventh transistors are electrically connected to a second terminal of the second capacitor.

BACKGROUND OF THE INVENTION 1. Field of the Invention

One embodiment of the present invention relates to a semiconductordevice, a display apparatus, and an electronic device.

Note that one embodiment of the present invention is not limited to theabove technical field. The technical field of the invention disclosed inthis specification and the like relates to an object, a driving method,or a manufacturing method. Alternatively, one embodiment of the presentinvention relates to a process, a machine, manufacture, or a compositionof matter. Therefore, specific examples of the technical field of oneembodiment of the present invention disclosed in this specificationinclude a semiconductor device, a display apparatus, a liquid crystaldisplay apparatus, a light-emitting apparatus, a power storage device,an imaging device, a memory device, a signal processing device, aprocessor, an electronic device, a system, a driving method thereof, amanufacturing method thereof, and a testing method thereof.

2. Description of the Related Art

Display apparatuses included in, for example, electronic devices forextended reality or cross reality (XR) such as virtual reality (VR) oraugmented reality (AR), mobile phones (e.g., smartphones), tabletinformation terminals, and notebook personal computers (PCs) haveundergone various improvements in recent years. For example, there havebeen developed display apparatuses with features such as higherresolution, higher color reproducibility (higher NTSC ratio), a smallerdriver circuit, and lower power consumption.

Furthermore, for example, a circuit for reducing variations in thecharacteristics of a driving transistor included in a pixel has beenunder development in order to improve the display quality of a displayapparatus. In particular, Patent Document 1 discloses the invention of apixel circuit that includes a circuit for correcting the thresholdvoltage of a driving transistor.

Another example is a technique of using a transistor including an oxidesemiconductor in a semiconductor thin film, as a switching elementincluded in a pixel circuit of a display apparatus.

A silicon-based semiconductor material is widely known as a material fora semiconductor thin film applicable to a transistor. Other than thesilicon-based semiconductor material, an oxide semiconductor hasattracted attention. Examples of oxide semiconductors include not onlysingle-component metal oxides, such as indium oxide and zinc oxide, butalso multi-component metal oxides. Among the multi-component metaloxides, in particular, an In—Ga—Zn oxide (hereinafter also referred toas IGZO) has been actively researched.

A transistor that includes IGZO as an active layer has an extremely lowoff-state current (see Non-Patent Document 1), and an LSI and a displayapparatus that utilize the characteristics have been reported (seeNon-Patent Documents 2 and 3). Patent Document 2 discloses the inventionin which a transistor including IGZO in an active layer is used in apixel circuit of a display apparatus.

REFERENCE Patent Document [Patent Document 1] Japanese Published PatentApplication No. 2017-10000 [Patent Document 2] Japanese Published PatentApplication No. 2010-156963 Non-Patent Document

[Non-Patent Document 1] K. Kato et al., “Japanese Journal of AppliedPhysics”, 2012, volume 51, pp. 021201-1-021201-7.[Non-Patent Document 2] S. Matsuda et al., “2015 Symposium on VLSITechnology Digest of Technical Papers”, 2015, pp. T216-T217.[Non-Patent Document 3] S. Amano et al., “SID Symposium Digest ofTechnical Papers”, 2010, volume 41, issue 1, pp. 626-629.

SUMMARY OF THE INVENTION

In manufacturing of a semiconductor device, the use of the same materialfor channel formation regions of a plurality of transistors included inthe semiconductor device can shorten the manufacturing process of thesemiconductor device in some cases. Specifically, the material can be,for example, a metal oxide such as IGZO described above.

However, a metal oxide containing indium (e.g., an In oxide) and a metaloxide containing zinc (e.g., a Zn oxide) which serve as n-typesemiconductors have been manufactured but these metal oxides which serveas p-type semiconductors are difficult to manufacture in terms ofmobility and reliability. Therefore, a single-polarity circuit composedof transistors including n-type semiconductors (n-channel transistors)is preferably employed in manufacturing of a semiconductor device.

The threshold voltage of an n-channel transistor including a metal oxidein a channel formation region is likely to be lowered by influence ofthe manufacturing steps and the like. In other words, leakage currentthat flows in an off state of the transistor is likely to increase. Forthis reason, in a semiconductor device including a transistor with ahigh leakage current, desired operation is not performed depending oncircumstances in some cases.

An object of one embodiment of the present invention is to provide asemiconductor device that operates stably. Another object of oneembodiment of the present invention is to provide a semiconductor devicewith high reliability. Another object of one embodiment of the presentinvention is to provide a display apparatus including any of the abovesemiconductor devices. Another object of one embodiment of the presentinvention is to provide an electronic device including the above displayapparatus. Another object of one embodiment of the present invention isto provide a novel semiconductor device, a novel display apparatus, or anovel electronic device.

Note that the objects of one embodiment of the present invention are notlimited to the objects listed above. The objects listed above do notpreclude the existence of other objects. Note that the other objects areobjects that are not described in this section and are described below.The objects that are not described in this section are derived from thedescription of the specification, the drawings, and the like and can beextracted as appropriate from the description by those skilled in theart. Note that one embodiment of the present invention is to achieve atleast one of the objects listed above and the other objects. Note thatone embodiment of the present invention does not necessarily achieve allthe objects listed above and the other objects.

(1) One embodiment of the present invention is a semiconductor deviceincluding a first transistor, a second transistor, a third transistor, afourth transistor, a fifth transistor, a sixth transistor, a seventhtransistor, an eighth transistor, a ninth transistor, a tenthtransistor, a first capacitor, a second capacitor, a third capacitor,and a fourth capacitor. A first gate of the first transistor iselectrically connected to a first gate of the fourth transistor. One ofa source and a drain of the first transistor is electrically connectedto one of a source and a drain of the second transistor, one of a sourceand a drain of the fifth transistor, one of a source and a drain of theeighth transistor, and a first terminal of the fourth capacitor. Theother of the source and the drain of the fifth transistor iselectrically connected to a first gate of the sixth transistor and afirst terminal of the second capacitor. The other of the source and thedrain of the eighth transistor is electrically connected to a first gateof the ninth transistor and a first terminal of the third capacitor. Afirst gate of the second transistor is electrically connected to a firstterminal of the first capacitor, one of a source and a drain of thethird transistor, one of a source and a drain of the fourth transistor,a first gate of the seventh transistor, and a first gate of the tenthtransistor. One of a source and a drain of the seventh transistor iselectrically connected to one of a source and a drain of the sixthtransistor and a second terminal of the second capacitor. One of asource and a drain of the tenth transistor is electrically connected toone of a source and a drain of the ninth transistor and a secondterminal of the third capacitor.

(2) One embodiment of the present invention is a semiconductor deviceincluding a first transistor, a second transistor, a third transistor, afourth transistor, a fifth transistor, a sixth transistor, a seventhtransistor, an eighth transistor, a ninth transistor, a tenthtransistor, an eleventh transistor, a first capacitor, a secondcapacitor, and a third capacitor. A first gate of the first transistoris electrically connected to one of a source and a drain of the eleventhtransistor. The other of the source and the drain of the eleventhtransistor is electrically connected to a first gate of the fourthtransistor. One of a source and a drain of the first transistor iselectrically connected to one of a source and a drain of the secondtransistor, one of a source and a drain of the fifth transistor, and oneof a source and a drain of the eighth transistor. The other of thesource and the drain of the fifth transistor is electrically connectedto a first gate of the sixth transistor and a first terminal of thesecond capacitor. The other of the source and the drain of the eighthtransistor is electrically connected to a first gate of the ninthtransistor and a first terminal of the third capacitor. A first gate ofthe second transistor is electrically connected to a first terminal ofthe first capacitor, one of a source and a drain of the thirdtransistor, one of a source and a drain of the fourth transistor, afirst gate of the seventh transistor, and a first gate of the tenthtransistor. One of a source and a drain of the seventh transistor iselectrically connected to one of a source and a drain of the sixthtransistor and a second terminal of the second capacitor. One of asource and a drain of the tenth transistor is electrically connected toone of a source and a drain of the ninth transistor and a secondterminal of the third capacitor.

(3) In the embodiment of the present invention described in (2), a firstgate of the eleventh transistor may be electrically connected to asecond gate of the eleventh transistor.

(4) One embodiment of the present invention is a semiconductor deviceincluding a first transistor, a second transistor, a third transistor, afourth transistor, a fifth transistor, a sixth transistor, a seventhtransistor, an eighth transistor, a ninth transistor, a tenthtransistor, an eleventh transistor, a twelfth transistor, a firstcapacitor, a second capacitor, and a third capacitor. A first gate ofthe first transistor is electrically connected to one of a source and adrain of the eleventh transistor and one of a source and a drain of thetwelfth transistor. The other of the source and the drain of theeleventh transistor is electrically connected to a first gate of theeleventh transistor, a first gate of the fourth transistor, and theother of the source and the drain of the twelfth transistor. One of asource and a drain of the first transistor is electrically connected toone of a source and a drain of the second transistor, one of a sourceand a drain of the fifth transistor, and one of a source and a drain ofthe eighth transistor. The other of the source and the drain of thefifth transistor is electrically connected to a first gate of the sixthtransistor and a first terminal of the second capacitor. The other ofthe source and the drain of the eighth transistor is electricallyconnected to a first gate of the ninth transistor and a first terminalof the third capacitor. A first gate of the second transistor iselectrically connected to a first terminal of the first capacitor, oneof a source and a drain of the third transistor, one of a source and adrain of the fourth transistor, a first gate of the seventh transistor,and a first gate of the tenth transistor. One of a source and a drain ofthe seventh transistor is electrically connected to one of a source anda drain of the sixth transistor and a second terminal of the secondcapacitor. One of a source and a drain of the tenth transistor iselectrically connected to one of a source and a drain of the ninthtransistor and a second terminal of the third capacitor. The other ofthe source and the drain of the sixth transistor is electricallyconnected to a first gate of the twelfth transistor.

(5) In the embodiment of the present invention described in any one of(1) to (4), a first gate of the fifth transistor may be electricallyconnected to a second gate of the fifth transistor, and a first gate ofthe eighth transistor may be electrically connected to a second gate ofthe eighth transistor.

(6) One embodiment of the present invention is a semiconductor deviceincluding a first transistor, a second transistor, a third transistor, afourth transistor, a fifth transistor, a sixth transistor, a seventhtransistor, an eighth transistor, a ninth transistor, a tenthtransistor, a first capacitor, a second capacitor, and a thirdcapacitor. A first gate of the first transistor is electricallyconnected to a first gate of the fourth transistor. One of a source anda drain of the first transistor is electrically connected to one of asource and a drain of the second transistor, one of a source and a drainof the fifth transistor, and one of a source and a drain of the eighthtransistor. The other of the source and the drain of the fifthtransistor is electrically connected to a first gate of the sixthtransistor and a first terminal of the second capacitor. The other ofthe source and the drain of the eighth transistor is electricallyconnected to a first gate of the ninth transistor and a first terminalof the third capacitor. A first gate of the second transistor iselectrically connected to a first terminal of the first capacitor, oneof a source and a drain of the third transistor, one of a source and adrain of the fourth transistor, a first gate of the seventh transistor,a first gate of the tenth transistor, a second gate of the fifthtransistor, and a second gate of the eighth transistor. One of a sourceand a drain of the seventh transistor is electrically connected to oneof a source and a drain of the sixth transistor and a second terminal ofthe second capacitor. One of a source and a drain of the tenthtransistor is electrically connected to one of a source and a drain ofthe ninth transistor and a second terminal of the third capacitor.

(7) One embodiment of the present invention is a semiconductor deviceincluding a first transistor, a second transistor, a third transistor, afourth transistor, a sixth transistor, a seventh transistor, a ninthtransistor, a tenth transistor, a first capacitor, a second capacitor,and a third capacitor. A first gate of the first transistor iselectrically connected to a first gate of the fourth transistor. One ofa source and a drain of the first transistor is electrically connectedto one of a source and a drain of the second transistor, a first gate ofthe sixth transistor, a first terminal of the second capacitor, a firstgate of the ninth transistor, and a first terminal of the thirdcapacitor. A first gate of the second transistor is electricallyconnected to a first terminal of the first capacitor, one of a sourceand a drain of the third transistor, one of a source and a drain of thefourth transistor, a first gate of the seventh transistor, and a firstgate of the tenth transistor. One of a source and a drain of the seventhtransistor is electrically connected to one of a source and a drain ofthe sixth transistor and a second terminal of the second capacitor. Oneof a source and a drain of the tenth transistor is electricallyconnected to one of a source and a drain of the ninth transistor and asecond terminal of the third capacitor.

(8) In the embodiment of the present invention described in any one of(1) to (7), the first gate of the first transistor may be electricallyconnected to a second gate of the first transistor, a first gate of thethird transistor may be electrically connected to a second gate of thethird transistor, the first gate of the sixth transistor may beelectrically connected to a second gate of the sixth transistor, and thefirst gate of the ninth transistor may be electrically connected to asecond gate of the ninth transistor.

(9) In the embodiment of the present invention described in any one of(1) to (8), a second gate of the seventh transistor may be electricallyconnected to the other of the source and the drain of the seventhtransistor, and a second gate of the tenth transistor may beelectrically connected to the other of the source and the drain of thetenth transistor.

(10) In the embodiment of the present invention described in any one of(1) to (9), each of the second transistor and the fourth transistor mayhave a multi-gate structure.

(11) Another embodiment of the present invention is a display apparatusincluding a gate driver circuit including a shift register including thesemiconductor device described in any one of (1) to (10), a sourcedriver circuit, and a pixel array.

(12) Another embodiment of the present invention is an electronic devicewhich includes the display apparatus described in (11) and a housing.

In this specification and the like, a semiconductor device means adevice that utilizes semiconductor characteristics, and refers to acircuit including a semiconductor element (e.g., a transistor, a diode,or a photodiode), a device including the circuit, and the like. Thesemiconductor device also means devices that can function by utilizingsemiconductor characteristics. For example, an integrated circuit, achip including an integrated circuit, and an electronic componentincluding a chip in a package are examples of the semiconductor device.Moreover, a memory device, a display apparatus, a light-emittingapparatus, a lighting device, and an electronic device themselves mightbe semiconductor devices, or might each include a semiconductor device.

In the case where there is a description “X and Y are connected” in thisspecification and the like, the case where X and Y are electricallyconnected, the case where X and Y are functionally connected, and thecase where X and Y are directly connected are regarded as beingdisclosed in this specification and the like. Accordingly, without beinglimited to a predetermined connection relation, for example, aconnection relation shown in drawings or texts, a connection relationother than one shown in drawings or texts is regarded as being disclosedin the drawings or the texts. Each of X and Y denotes an object (e.g., adevice, an element, a circuit, a wiring, an electrode, a terminal, aconductive film, or a layer).

For example, in the case where X and Y are electrically connected, oneor more elements that allow(s) electrical connection between X and Y(e.g., a switch, a transistor, a capacitor element, an inductor, aresistor element, a diode, a display device, a light-emitting device,and a load) can be connected between X and Y. Note that a switch has afunction of being controlled to be turned on or off That is, the switchhas a function of being in a conduction state (on state) or anon-conduction state (off state) to control whether a current flows ornot.

In the case where an element and a power supply line (e.g., a wiringsupplying VDD (high power supply potential), VSS (low power supplypotential), GND (the ground potential), or a desired potential) are bothprovided between X and Y, X and Y are not defined as being electricallyconnected. In the case where only a power supply line is providedbetween X and Y, there is no element between X and Y; therefore, X and Yare directly connected. Accordingly, in the case where only a powersupply line is provided between X and Y, X and Y can be expressed asbeing “electrically connected”. However, in the case where an elementand a power supply line are both provided between X and Y, X and Y arenot defined as being electrically connected although X and the powersupply line are electrically connected (through the element), and Y andthe power supply line are electrically connected. Note that in the casewhere X and a gate of a transistor are electrically connected and Y anda source of the transistor are electrically connected, X and Y are notdefined as being electrically connected. In the case where X and a gateof a transistor are electrically connected and Y and a drain of thetransistor are electrically connected, X and Y are not defined as beingelectrically connected. In the case where X and a drain of a transistorare electrically connected and Y and a source of the transistor areelectrically connected, X and Y are defined as being electricallyconnected. In the case where a capacitor is provided between X and Y, Xand Y are defined as being electrically connected in some cases and notdefined in other cases. For example, in the case where a capacitor isprovided between X and Y in a digital circuit or a logic circuit, X andY are not defined as being electrically connected in some cases. On theother hand, for example, in the case where a capacitor is providedbetween X and Y in an analog circuit, X and Y are defined as beingelectrically connected in some cases.

For example, in the case where X and Y are functionally connected, oneor more circuits that allow(s) functional connection between X and Y(e.g., a logic circuit (an inverter, a NAND circuit, a NOR circuit, orthe like); a signal converter circuit (a digital-to-analog convertercircuit, an analog-to-digital converter circuit, a gamma correctioncircuit, or the like); a potential level converter circuit (a powersupply circuit (a step-up circuit, a step-down circuit, or the like), alevel shifter circuit for changing the potential level of a signal, orthe like); a voltage source; a current source; a switching circuit; anamplifier circuit (a circuit that can increase signal amplitude, theamount of a current, or the like, an operational amplifier, adifferential amplifier circuit, a source follower circuit, a buffercircuit, or the like); a signal generation circuit; a memory circuit; ora control circuit) can be connected between X and Y. For example, evenwhen another circuit is interposed between X and Y, X and Y arefunctionally connected when a signal output from X is transmitted to Y.

Note that an explicit description, X and Y are electrically connected,includes the case where X and Y are electrically connected (i.e., thecase where X and Y are connected with another element or another circuitinterposed therebetween) and the case where X and Y are directlyconnected (i.e., the case where X and Y are connected without anotherelement or another circuit interposed therebetween).

It can be expressed as, for example, “X, Y, a source (sometimes calledone of a first terminal and a second terminal) of a transistor, and adrain (sometimes called the other of the first terminal and the secondterminal) of the transistor are electrically connected to each other,and X, the source of the transistor, the drain of the transistor, and Yare electrically connected to each other in this order”. Alternatively,it can be expressed as “a source of a transistor is electricallyconnected to X; a drain of the transistor is electrically connected toY; and X, the source of the transistor, the drain of the transistor, andY are electrically connected to each other in this order”.Alternatively, it can be expressed as “X is electrically connected to Ythrough a source and a drain of a transistor, and X, the source of thetransistor, the drain of the transistor, and Y are provided in thisconnection order”. When the connection order in a circuit structure isdefined by an expression similar to the above examples, a source and adrain of a transistor can be distinguished from each other to specifythe technical scope. Note that these expressions are examples and theexpression is not limited to these expressions. Here, X and Y eachdenote an object (e.g., a device, an element, a circuit, a wiring, anelectrode, a terminal, a conductive film, or a layer).

Even when independent components are electrically connected to eachother in a circuit diagram, one component has functions of a pluralityof components in some cases. For example, when part of a wiring alsofunctions as an electrode, one conductive film has functions of bothcomponents: a function of the wiring and a function of the electrode.Thus, electrical connection in this specification includes, in itscategory, such a case where one conductive film has functions of aplurality of components.

In this specification and the like, a “resistor element” can be, forexample, a circuit element or a wiring having a resistance higher than0Ω. Therefore, in this specification and the like, a “resistor element”includes a wiring having a resistance, a transistor in which a currentflows between its source and drain, a diode, and a coil. Thus, the term“resistor element” can be sometimes replaced with the terms “resistor”,“load”, or “region having a resistance”; conversely, the terms“resistor”, “load”, or “region having a resistance” can be sometimesreplaced with the term “resistor element”. The resistance can be, forexample, preferably higher than or equal to 1 mΩ and lower than or equalto 10Ω, further preferably higher than or equal to 5 mΩ and lower thanor equal to 5Ω, still further preferably higher than or equal to 10 mΩand lower than or equal to 1Ω. As another example, the resistance may behigher than or equal to 1Ω and lower than or equal to 1×10⁹Ω.

In this specification and the like, a “capacitor element” can be, forexample, a circuit element having an electrostatic capacitance greaterthan 0 F, a region of a wiring having an electrostatic capacitancegreater than 0 F, parasitic capacitance, or gate capacitance of atransistor. The terms “capacitor element”, “parasitic capacitance”, or“gate capacitance” can be sometimes replaced with the term “capacitor”;conversely, the term “capacitor” can be sometimes replaced with theterms “capacitor element”, “parasitic capacitance”, or “gatecapacitance”. The term “a pair of electrodes” of a capacitor can bereplaced with the terms “a pair of conductors”, “a pair of conductiveregions”, or “a pair of regions”. Note that the electrostaticcapacitance can be greater than or equal to 0.05 fF and less than orequal to 10 pF, for example. As another example, the electrostaticcapacitance may be greater than or equal to 1 pF and less than or equalto 10 μF.

In this specification and the like, a transistor includes threeterminals called a gate, a source, and a drain. The gate is a controlterminal for controlling the on/off state of the transistor. The twoterminals functioning as the source and the drain are input/outputterminals of the transistor. Functions of the two input/output terminalsof the transistor depend on the conductivity type (n-channel type orp-channel type) of the transistor and the levels of potentials appliedto the three terminals of the transistor, and one of the two terminalsserves as a source and the other serves as a drain. Therefore, the terms“source” and “drain” can be sometimes used interchangeably in thisspecification and the like. In this specification and the like, theterms “one of a source and a drain” (or a first electrode or a firstterminal) and “the other of the source and the drain” (or a secondelectrode or a second terminal) are used to describe the connectionrelation of a transistor. Depending on the structure, a transistor mayinclude a back gate in addition to the above three terminals. In thatcase, in this specification and the like, one of the gate and the backgate of the transistor may be referred to as a first gate and the otherof the gate and the back gate of the transistor may be referred to as asecond gate. In some cases, the terms “gate” and “back gate” can bereplaced with each other in one transistor. In the case where atransistor includes three or more gates, the gates may be referred to asa first gate, a second gate, and a third gate, for example, in thisspecification and the like.

In this specification and the like, for example, a transistor with amulti-gate structure having two or more gate electrodes can be used asthe transistor. With the multi-gate structure, channel formation regionsare connected in series; accordingly, a plurality of transistors areconnected in series. Thus, with the multi-gate structure, the amount ofan off-state current can be reduced, and the withstand voltage of thetransistor can be increased (the reliability can be improved).Alternatively, with the multi-gate structure, a drain-source currentdoes not change very much even if a drain-source voltage changes whenthe transistor operates in a saturation region, so that a flat slope ofvoltage-current characteristics can be obtained. By utilizing the flatslope of the voltage-current characteristics, an ideal current sourcecircuit or an active load having an extremely high resistance can beobtained. Accordingly, a differential circuit, a current mirror circuit,or the like having excellent properties can be obtained.

A single circuit element shown in a circuit diagram may include aplurality of circuit elements. For example, a single resistor shown in acircuit diagram may be two or more resistors electrically connected toeach other in series. For another example, a single capacitor shown in acircuit diagram may be two or more capacitors electrically connected toeach other in parallel. For another example, a single transistor shownin a circuit diagram may be two or more transistors which areelectrically connected to each other in series and whose gates areelectrically connected to each other. For another example, a singleswitch shown in a circuit diagram may be a switch including two or moretransistors which are electrically connected to each other in series orin parallel and whose gates are electrically connected to each other.

In this specification and the like, a node can be referred to as aterminal, a wiring, an electrode, a conductive layer, a conductor, animpurity region, and the like depending on the circuit configuration andthe device structure. Furthermore, a terminal, a wiring, and the likecan be referred to as a node.

In this specification and the like, “voltage” and “potential” can bereplaced with each other as appropriate. The term “voltage” refers to apotential difference from a reference potential. When the referencepotential is a ground potential, for example, “voltage” can be replacedwith “potential”. Note that the ground potential does not necessarilymean 0 V. Moreover, potentials are relative values, and a potentialsupplied to a wiring, a potential applied to a circuit and the like, apotential output from a circuit and the like, for example, are changedwith a change of the reference potential.

In this specification and the like, the term “high-level potential” or“low-level potential” does not mean a particular potential. For example,in the case where two wirings are both described as “functioning as awiring for supplying a high-level potential”, the levels of thehigh-level potentials that these wirings supply are not necessarilyequal to each other. Similarly, in the case where two wirings are bothdescribed as “functioning as a wiring for supplying a low-levelpotential”, the levels of the low-level potentials that these wiringssupply are not necessarily equal to each other.

A current means an electric charge transfer (electrical conduction); forexample, the expression “electrical conduction of positively chargedparticles is caused” can be rephrased as “electrical conduction ofnegatively charged particles is caused in the opposite direction”.Therefore, unless otherwise specified, a current in this specificationand the like refers to an electric charge transfer (electricalconduction) caused by carrier movement. Examples of a carrier hereinclude an electron, a hole, an anion, a cation, and a complex ion, andthe type of carrier differs between current flow systems (e.g., asemiconductor, a metal, an electrolyte solution, and a vacuum). Thedirection of a current in a wiring refers to the direction in which acarrier with a positive electric charge moves, and the amount of acurrent is expressed as a positive value. In other words, the directionin which a carrier with a negative electric charge moves is opposite tothe direction of a current, and the amount of a current is expressed asa negative value. Thus, in the case where the polarity of a current (orthe direction of a current) is not specified in this specification andthe like, the expression “a current flows from an element A to anelement B” can be replaced with “a current flows from an element B to anelement A”. The expression “a current is input to an element A” can bereplaced with “a current is output from an element A”.

Ordinal numbers such as “first”, “second”, and “third” in thisspecification and the like are used in order to avoid confusion amongcomponents. Thus, the terms do not limit the number of components. Theterms do not limit the order of components, either.

For example, a “first” component in one embodiment in this specificationand the like can be referred to as a “second” component in otherembodiments or claims. For another example, a “first” component in oneembodiment in this specification and the like can be omitted in otherembodiments or claims.

In this specification and the like, terms for describing arrangement,such as “over”, “above”, “under”, and “below”, are sometimes used forconvenience to describe the positional relation between components withreference to drawings. The positional relation between components ischanged as appropriate in accordance with the direction from which eachcomponent is described. Thus, the positional relation is not limited tothat described with a term used in this specification and the like andcan be explained with another term as appropriate depending on thesituation. For example, the expression “an insulator over (on) a topsurface of a conductor” can be replaced with the expression “aninsulator on a bottom surface of a conductor” when the direction of adiagram showing these components is rotated by 180°.

The terms such as “over”, “above”, “under”, and “below” do notnecessarily mean that a component is placed directly on or under anddirectly in contact with another component. For example, the expression“electrode B over insulating layer A” does not necessarily mean that theelectrode B is on and in direct contact with the insulating layer A, andcan mean the case where another component is provided between theinsulating layer A and the electrode B.

In this specification and the like, components arranged in a matrix andtheir positional relation are sometimes described using terms such as“row” and “column”. The positional relation between components ischanged as appropriate in accordance with the direction from which eachcomponent is described. Thus, the positional relation is not limited tothat described with a term used in this specification and the like andcan be explained with another term as appropriate depending on thesituation. For example, the term “row direction” can be replaced withthe term “column direction” when the direction of the diagram is rotatedby 90°.

In this specification and the like, the terms “film” and “layer” can beinterchanged with each other depending on circumstances. For example,the term “conductive layer” can be changed to the term “conductive film”in some cases. Moreover, the term “insulating film” can be changed intothe term “insulating layer” in some cases. Moreover, such terms can bereplaced with a word not including the term “film” or “layer” dependingon the case or circumstances. For example, the term “conductive layer”or “conductive film” can be changed into the term “conductor” in somecases. For example, in some cases, the term “insulating layer” or“insulating film” can be changed into the term “insulator” in somecases.

In this specification and the like, the terms “electrode”, “wiring”, and“terminal” do not have functional limitations. For example, an“electrode” is used as part of a wiring in some cases, and vice versa.Furthermore, the term “electrode” or “wiring” can also mean acombination of a plurality of electrodes or wirings provided in anintegrated manner, for example. For another example, a “terminal” can beused as part of a wiring or an electrode, and a “wiring” and an“electrode” can be used as part of a terminal. Furthermore, the term“terminal” includes the case where at least one of a plurality ofelectrodes, wirings, terminals, and the like are formed in an integratedmanner. Therefore, for example, an “electrode” can be part of a wiringor a terminal, and a “terminal” can be part of a wiring or an electrode.Moreover, the terms “electrode”, “wiring”, or “terminal” is sometimesreplaced with the term “region”, for example.

In this specification and the like, the terms “wiring”, “signal line”,“power supply line”, and the like can be interchanged with each otherdepending on the case or in accordance with circumstances. For example,the term “wiring” can be changed into the term “signal line” in somecases. Also, for example, the term “wiring” can be changed into the term“power supply line” in some cases. Inversely, the term “signal line”,“power supply line”, or the like can be changed into the term “wiring”in some cases. The term “power supply line” or the like can be changedinto the term “signal line” or the like in some cases. Inversely, theterm “signal line” or the like can be changed into the term “powersource line” or the like in some cases. The term “potential” that isapplied to a wiring can be changed into the term “signal” or the likedepending on the case or in accordance with circumstances. Inversely,the term “signal” or the like can be changed into the term “potential”in some cases.

In this specification and the like, an impurity in a semiconductorrefers to, for example, elements other than the main components of asemiconductor layer. For instance, an element with a concentration lowerthan 0.1 atomic % is an impurity. When an impurity is contained, thedensity of defect states in the semiconductor may be increased, thecarrier mobility may be decreased, or the crystallinity may bedecreased. When the semiconductor is an oxide semiconductor, examples ofimpurities that change the characteristics of the semiconductor includeGroup 1 elements, Group 2 elements, Group 13 elements, Group 14elements, Group 15 elements, and transition metals other than the maincomponents of the oxide semiconductor. Specific examples are hydrogen(included also in water), lithium, sodium, silicon, boron, phosphorus,carbon, and nitrogen. Specifically, when the semiconductor is silicon,examples of impurities that change the characteristics of thesemiconductor include Group 1 elements, Group 2 elements, Group 13elements, and Group 15 elements (with the exception of oxygen andhydrogen).

In this specification and the like, a switch is in a conduction state(on state) or in a non-conduction state (off state) to control whether acurrent flows therethrough or not. Alternatively, a switch has afunction of selecting and changing a current path. Thus, a switch mayhave two or more terminals through which a current flows, in addition toa control terminal. For example, an electrical switch or a mechanicalswitch can be used. That is, a switch is not limited to a certainelement and can be any element capable of controlling a current.

Examples of an electrical switch include a transistor (e.g., a bipolartransistor and a MOS transistor), a diode (e.g., a PN diode, a PINdiode, a Schottky diode, a metal-insulator-metal (MIM) diode, ametal-insulator-semiconductor (MIS) diode, and a diode-connectedtransistor), and a logic circuit in which such elements are combined. Inthe case of using a transistor as a switch, the conduction state of thetransistor refers to a state in which a source electrode and a drainelectrode of the transistor are regarded as being electricallyshort-circuited or a state in which a current can flow between thesource electrode and the drain electrode, for example. Thenon-conduction state of the transistor refers to a state in which thesource electrode and the drain electrode of the transistor are regardedas being electrically disconnected. In the case where a transistoroperates just as a switch, there is no particular limitation on thepolarity (conductivity type) of the transistor.

An example of a mechanical switch is a switch using amicroelectromechanical systems (MEMS) technology. Such a switch includesan electrode that can be moved mechanically, and its conduction andnon-conduction is controlled with movement of the electrode.

In this specification and the like, a device formed using a metal maskor a fine metal mask (FMM) may be referred to as a device having a metalmask (MM) structure. In this specification and the like, a device formedwithout using a metal mask or an FMM may be referred to as a devicehaving a metal maskless (MML) structure.

In this specification and the like, a structure in which light-emittinglayers in light-emitting devices of different colors (here, blue (B),green (G), and red (R)) are separately formed or separately patternedmay be referred to as a side-by-side (SBS) structure. In thisspecification and the like, a light-emitting device capable of emittingwhite light may be referred to as a white-light-emitting device. Notethat a combination of such a white-light-emitting device with coloringlayers (e.g., color filters) enables providing a full-color displayapparatus.

Structures of light-emitting devices can be classified roughly into asingle structure and a tandem structure. A light-emitting device with asingle structure includes one light-emitting unit between a pair ofelectrodes, and the light-emitting unit preferably includes one or morelight-emitting layers. To obtain white light emission, two or morelight-emitting layers that emit light of complementary colors areselected. For example, when emission colors of a first light-emittinglayer and a second light-emitting layer are complementary colors, thelight-emitting device can be configured to emit white light as a whole.The same applies to a light-emitting device including three or morelight-emitting layers.

A light-emitting device with a tandem structure includes two or morelight-emitting units between a pair of electrodes, and eachlight-emitting unit preferably includes one or more light-emittinglayers. To obtain white light emission, the structure is made so thatlight from light-emitting layers of the light-emitting units can becombined to be white light. Note that a structure for obtaining whitelight emission is similar to that in the case of a single structure. Inthe light-emitting device with a tandem structure, it is preferable thatan intermediate layer such as a charge-generation layer be providedbetween the plurality of light-emitting units.

When the white-light-emitting device (having a single structure or atandem structure) and a light-emitting device having an SBS structureare compared to each other, the latter can have lower power consumptionthan the former. To reduce power consumption, a light-emitting devicehaving an SBS structure is preferably used. Meanwhile, thewhite-light-emitting device is preferable in terms of lowermanufacturing cost or higher manufacturing yield because themanufacturing process of the white-light-emitting device is simpler thanthat of a light-emitting device having an SBS structure.

In this specification, “parallel” indicates a state where the angleformed between two straight lines is greater than or equal to −10° andless than or equal to 10°. Thus, the case where the angle is greaterthan or equal to −5° and less than or equal to 5° is also included. Theterms “approximately parallel” and “substantially parallel” indicatethat the angle formed between two straight lines is greater than orequal to −30° and less than or equal to 30°. The term “perpendicular”indicates that the angle formed between two straight lines is greaterthan or equal to 80° and less than or equal to 100°. Thus, the casewhere the angle is greater than or equal to 85° and less than or equalto 95° is also included. The terms “approximately perpendicular” and“substantially perpendicular” indicate that the angle formed between twostraight lines is greater than or equal to 60° and less than or equal to120°.

According to one embodiment of the present invention, a semiconductordevice that operates stably can be provided. According to anotherembodiment of the present invention, a semiconductor device with highreliability can be provided. According to another embodiment of thepresent invention, a display apparatus including any of the abovesemiconductor devices can be provided. According to another embodimentof the present invention, an electronic device including the abovedisplay apparatus can be provided. According to another embodiment ofthe present invention, a novel semiconductor device, a novel displayapparatus, or a novel electronic device can be provided.

Note that the effects of one embodiment of the present invention are notlimited to the effects mentioned above. The effects described above donot preclude the existence of other effects. The other effects are theones that are not described above and will be described below. Effectsthat are not described above will be apparent from and can be derivedfrom the description of the specification, the drawings, and the like bythose skilled in the art. One embodiment of the present invention has atleast one of the above effects and the other effects. Accordingly, oneembodiment of the present invention does not have the above effects insome cases.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 2 is a block diagram illustrating a configuration example of adisplay apparatus.

FIGS. 3A and 3B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 4 is a timing chart showing an operation example of a semiconductordevice.

FIG. 5 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIGS. 6A and 6B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIGS. 7A and 7B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 8 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIGS. 9A and 9B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIGS. 10A and 10B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 11 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIGS. 12A and 12B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 13 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIGS. 14A and 14B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIGS. 15A and 15B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 16 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIG. 17 is a layout view illustrating a configuration example of asemiconductor device.

FIG. 18 is a schematic cross-sectional view illustrating a structureexample of a display apparatus.

FIG. 19 is a block diagram illustrating a configuration example of adisplay apparatus.

FIG. 20 is a block diagram illustrating a configuration example of animaging device.

FIGS. 21A and 21B are circuit diagrams each illustrating an example ofan imaging pixel.

FIG. 22 is a block diagram illustrating a configuration example of adisplay apparatus.

FIG. 23 is a block diagram illustrating a configuration example of adisplay apparatus.

FIG. 24 is a schematic cross-sectional view illustrating a structureexample of a display apparatus.

FIGS. 25A to 25D are schematic views each illustrating a structureexample of a light-emitting device.

FIG. 26 is a schematic cross-sectional view illustrating a structureexample of a display apparatus.

FIGS. 27A and 27B are schematic cross-sectional views each illustratinga structure example of a display apparatus.

FIGS. 28A and 28B are schematic cross-sectional views each illustratinga structure example of a display apparatus.

FIGS. 29A and 29B are schematic cross-sectional views each illustratinga structure example of a display apparatus.

FIGS. 30A and 30B are schematic cross-sectional views each illustratinga structure example of a display apparatus.

FIGS. 31A to 31F are cross-sectional views each illustrating an exampleof a manufacturing method of a display apparatus.

FIGS. 32A and 32B are a circuit diagram and a schematic perspectiveview, respectively, illustrating a configuration example of a pixelcircuit included in a display apparatus.

FIGS. 33A to 33D are circuit diagrams each illustrating a configurationexample of a pixel circuit included in a display apparatus.

FIGS. 34A to 34D are circuit diagrams each illustrating a configurationexample of a pixel circuit included in a display apparatus.

FIGS. 35A and 35B are plan views each illustrating a structure exampleof a light-emitting device and a light-receiving device included in adisplay apparatus.

FIGS. 36A to 36D are schematic cross-sectional views illustrating astructure example of a light-emitting device, a light-receiving device,and a connection electrode included in a display apparatus.

FIGS. 37A to 37G are plan views each illustrating an example of a pixel.

FIGS. 38A to 38F are plan views each illustrating an example of a pixel.

FIGS. 39A to 39H are plan views each illustrating an example of a pixel.

FIGS. 40A to 40D are plan views each illustrating an example of a pixel.

FIGS. 41A to 41D are plan views each illustrating an example of a pixel,and FIG. 41E is a cross-sectional view illustrating an example of adisplay apparatus.

FIGS. 42A and 42B illustrate a structure example of a display module.

FIGS. 43A to 43F illustrate structure examples of an electronic device.

FIGS. 44A to 44D illustrate structure examples of electronic devices.

FIGS. 45A to 45C illustrate structure examples of an electronic device.

FIGS. 46A to 46H each illustrate a structure example of an electronicdevice.

DETAILED DESCRIPTION OF THE INVENTION

In this specification and the like, a metal oxide means an oxide ofmetal in a broad sense. Metal oxides are classified into an oxideinsulator, an oxide conductor (including a transparent oxide conductor),an oxide semiconductor (also simply referred to as an OS), and the like.For example, a metal oxide contained in a channel formation region of atransistor is called an oxide semiconductor in some cases. That is, ametal oxide included in a channel formation region of a transistor thathas at least one of an amplifying function, a rectifying function, and aswitching function can be referred to as a metal oxide semiconductor. Inaddition, an OS transistor is a transistor including a metal oxide or anoxide semiconductor.

In this specification and the like, a metal oxide containing nitrogen isalso referred to as a metal oxide in some cases. In addition, a metaloxide containing nitrogen may be referred to as a metal oxynitride.

In this specification and the like, one embodiment of the presentinvention can be constituted with an appropriate combination of astructure shown in one embodiment and any of the structures shown in theother embodiments. In the case where a plurality of structure examplesare described in one embodiment, some of the structure examples can becombined as appropriate.

Note that a content (or part thereof) described in one embodiment can beapplied to, combined with, or replaced with another content (or partthereof) described in the same embodiment and/or a content (or partthereof) described in another embodiment or other embodiments.

Note that in each embodiment, a content described in the embodiment is acontent described with reference to a variety of diagrams or a contentdescribed with text in the specification.

Note that by combining a diagram (or part thereof) described in oneembodiment with another part of the diagram, a different diagram (orpart thereof) described in the embodiment, and/or a diagram (or partthereof) described in another embodiment or other embodiments, much morediagrams can be formed.

The embodiments in this specification are described with reference tothe drawings. Note that the embodiments can be implemented in manydifferent modes, and it will be readily appreciated by those skilled inthe art that modes and details can be changed in various ways withoutdeparting from the spirit and scope of the present invention. Therefore,the present invention should not be construed as being limited to thedescription of the embodiments. Note that in the structures of theinvention described in the embodiments, the same portions or portionshaving similar functions are denoted by the same reference numerals indifferent drawings and the description of such portions is not repeatedin some cases. In perspective views and the like, some of componentsmight not be illustrated for clarity of the drawings.

In this specification and the like, when a plurality of componentsdenoted by the same reference numerals need to be distinguished fromeach other, identification signs such as “_1”, “[n]”, and “[m,n]” aresometimes added to the reference numerals. Components denoted withidentification signs such as “_1”, “[n]”, and “[m,n]” in the drawingsand the like are sometimes denoted without such identification signs inthis specification and the like when the components do not need to bedistinguished from each other.

In the drawings of this specification, the size, the layer thickness, orthe region is exaggerated for clarity in some cases. Therefore, thesize, the layer thickness, or the region is not limited to theillustrated scale. The drawings are schematic views showing idealexamples, and embodiments of the present invention are not limited toshapes, values, or the like shown in the drawings. For example, thefollowing can be included: a variation in a signal, a voltage, or acurrent due to noise or difference in timing.

Embodiment 1

In this embodiment, a semiconductor device of one embodiment of thepresent invention will be described.

FIG. 2 illustrates a configuration example of a display apparatusincluding a semiconductor device of one embodiment of the presentinvention. As an example, a display apparatus DSP includes a drivercircuit GD, a driver circuit SD, and a pixel array PA.

Note that in FIG. 2, the driver circuit GD, the driver circuit SD, thepixel array PA, a wiring GL[1], a wiring GL[m], a wiring SL[1], a wiringSL[n], a pixel circuit PX[1, 1], a pixel circuit PX[m, 1], a pixelcircuit PX[1, n], and a pixel circuit PX[m, n] are selectivelyillustrated.

The pixel array PA includes a plurality of pixel circuits PX, forexample. The pixel circuits PX are arranged in a matrix of m rows and ncolumns in the pixel array PA.

Note that the symbol accompanying the reference characters of the pixelcircuit PX in FIG. 2 represents an address in the pixel circuit. Forexample, the symbol in the reference characters of the pixel circuitPX[1, 1] means that the pixel circuit PX is placed in the first row andthe first column in the pixel array PA. For another example, the symbolin the reference characters of the pixel circuit PX[m, 1] means that thepixel circuit PX is placed in the m-th row and the first column in thepixel array PA. For another example, the symbol in the referencecharacters of the pixel circuit PX[1, n] means that the pixel circuit PXis placed in the first row and the n-th column in the pixel array PA.For another example, the symbol in the reference characters of the pixelcircuit PX[m, n] means that the pixel circuit PX is placed in the m-throw and the n-th column in the pixel array PA.

The pixel circuit PX placed in the i-th row and the j-th column (i is aninteger greater than or equal to 1 and less than or equal to m, and j isan integer greater than or equal to 1 and less than or equal to n) inthe pixel array PA is referred to as a pixel circuit PX[i, j] (notillustrated). The pixel circuit PX[i, j] is electrically connected to awiring GL[i], for example. The pixel circuit PX[i, j] is electricallyconnected to a wiring SL[j], for example.

The driver circuit GD is electrically connected to the wirings GL[1] toGL[m], for example. The driver circuit SD is electrically connected tothe wirings SL[1] to SL[n], for example.

The wirings GL[1] to GL[m] are extended in the row direction in thepixel array PA, for example. Furthermore, the symbol [x] accompanyingthe reference characters of the wiring GL represents the number of therow in which the wiring is provided. For example, the reference of thewiring GL[1] represents a wiring provided in the first row in the pixelarray PA. For another example, the reference of the wiring GL[m]represents a wiring provided in the m-th row in the pixel array PA.

The wirings SL[1] to SL[n] are extended in the column direction in thepixel array PA, for example. Furthermore, the symbol [y] accompanyingthe reference characters of the wiring GL represents the number of thecolumn in which the wiring is provided. For example, the reference ofthe wiring GL[1] represents a wiring provided in the first column in thepixel array PA. For another example, the reference of the wiring GL[n]represents a wiring provided in the n-th column in the pixel array PA.

For example, one or more selected from a liquid crystal display device,a light-emitting device including an organic EL material, and alight-emitting device including a light-emitting diode (e.g., a microLED) can be used in the pixel circuit PX. Note that in the descriptionin this embodiment, the pixel circuit PX in the pixel array PA includesa light-emitting device including an organic EL material. The luminanceof light emitted from a light-emitting device capable of high luminancelight emission can be, for example, higher than or equal to 500 cd/m²,preferably higher than or equal to 1000 cd/m² and lower than or equal to10000 cd/m², further preferably higher than or equal to 2000 cd/m² andlower than or equal to 5000 cd/m². Note that a pixel circuit applicableto the pixel circuit PX and the like will be described in detail inEmbodiment 4.

The driver circuit GD has a function of selecting the pixel circuit PXto which image data is to be transmitted in the pixel array PA of thedisplay apparatus DSP, for example. Accordingly, the driver circuit GDcan be referred to as a gate driver circuit or the like.

The wiring GL, which electrically connects the driver circuit GD and thepixel circuit PX, functions as a wiring transmitting a selection signal.Note that the wiring GL may function as, for example, a wiring supplyinga constant potential, not a wiring transmitting a selection signal.

The driver circuit SD has a function of transmitting image data to thepixel circuit PX in the pixel array PA of the display apparatus DSP, forexample. Accordingly, the driver circuit SD can be referred to as asource driver circuit or the like.

The wiring SL, which electrically connects the driver circuit SD and thepixel circuit PX, functions as a wiring transmitting image data as asignal. Note that the wiring SL may function as, for example, a wiringsupplying a constant potential, not a wiring transmitting image data.

Note that in the display apparatus DSP illustrated in FIG. 2, a wiringother than the wirings GL[1] to GL[m] and the wirings SL[1] to SL[n] maybe provided. For example, a wiring supplying a constant potential to thepixel circuit PX may be provided in the display apparatus DSP.

Next, a configuration example of the driver circuit GD is described.

FIG. 3A illustrates a configuration example of the driver circuit GD ofone embodiment of the present invention which is applicable to thedisplay apparatus DSP in FIG. 2. The driver circuit GD illustrated inFIG. 3A includes a circuit 100[1] to a circuit 100[m], for example.

Each of the circuits 100[1] to 100[m] includes, for example, a terminalIT, a terminal OT, a terminal CLK1, a terminal CLK2, and a terminal GT.

In each of the circuits 100[1] to 100[m], for example, the terminal CLK1is electrically connected to a wiring CL1, the terminal CLK2 iselectrically connected to a wiring CL2, and a terminal PWC iselectrically connected to a wiring PL.

Each of the wirings CL1, CL2, and PL has, for example, a function ofsupplying a variable potential (referred to as a pulse voltage in somecases in this specification), such as a clock signal. Note that one ormore of the wirings CL1, CL2, and PL may supply a constant potential,not the variable potential.

The terminal OT of the circuit 100[k] (k is an integer greater than orequal to 1 and less than or equal to m−1) is electrically connected tothe terminal IT of the circuit 100[k+1], for example.

The terminal GT of the circuit 100[i] is electrically connected to thewiring GL[i], for example.

Each of the circuits 100[1] to 100[m] has functions of, for example,holding data input to the terminal IT and outputting the held data toone or both of the terminal OT and the terminal GT.

For example, the circuit 100[i] has a function of outputting data heldin the circuit 100[i] to the terminal OT when the variable potential isinput to the terminal CLK1. For another example, the circuit 100[i] hasa function of outputting data held in the circuit 100[i] to the terminalGT when a variable potential is input to the terminal PWC. For anotherexample, the circuit 100[i] has a function of resetting data held in thecircuit 100[i] when a variable potential is input to the terminal CLK2.The circuit 100[i] is preferably configured to hold new data that isinput to the terminal IT of the circuit 100[i] after the data held inthe circuit 100[i] is reset.

As described above, in the circuits 100[1] to 100[m], data is input tothe terminal IT of the circuit 100[1] and then a variable potential isinput to the terminal CLK1 and the terminal CLK2 at an appropriatetiming, whereby the data can be transmitted to the circuit 100[2] andthe subsequent circuits 100[m]. Furthermore, data is input to theterminal IT of the circuit 100[1] and then a variable potential is inputto the terminal PWC at an appropriate timing, whereby data held in thecircuits 100[1] to 100[m] can be output from the terminals GT of thecircuits 100[1] to 100[m]. Accordingly, the configuration of thecircuits 100[1] to 100[m] can be referred to as a shift register in thisspecification and the like.

The above-described data can be, for example, a selection signal forselecting the pixel circuit PX to which image data is to be written inthe pixel array PA. Note that in FIG. 3A, the selection signal isillustrated as a signal SS.

Note that although the circuit 100[m] in the driver circuit GD in FIG.3A includes the terminal OT, the circuit 100[m] is not necessarilyprovided with the terminal OT because the circuits 100[1] to 100[m] forma shift register.

The configuration of the driver circuit GD applicable to the displayapparatus DSP in FIG. 2 is not limited to the configuration in FIG. 3A.For example, the driver circuit GD illustrated in FIG. 3B may beemployed as the driver circuit GD applicable to the display apparatusDSP in FIG. 2.

The driver circuit GD in FIG. 3B is different from the driver circuit GDin FIG. 3A in including circuits BF[1] to BF[m].

In the driver circuit GD in FIG. 3B, input terminals of the circuitsBF[1] to BF[m] are electrically connected to the respective terminals GTof the circuits 100[1] to 100[m], and output terminals of the circuitsBF[1] to BF[m] are electrically connected to the wirings GL[1] to GL[m],respectively.

Each of the circuits BF[1] to BF[m] can include an amplifier circuitsuch as a buffer circuit, an inverter circuit, or a latch circuit, forexample. Specifically, each of the circuits BF[1] to BF[m] can have afunction of referring to and amplifying a potential of the terminal GTand outputting the amplified potential to the wiring GL.

Note that a wiring other than the wiring CL1, the wiring CL2, and thewiring PL may be provided in the driver circuits GD illustrated in FIGS.3A and 3B. For example, a wiring for supplying a constant potential todrive the circuits 100[1] to 100[m] may be provided.

Configuration Example 1

Next, a specific circuit configuration example of the circuits 100[1] to100[m] in each of the driver circuits GD in FIGS. 3A and 3B will bedescribed.

FIG. 1A illustrates a configuration example of a circuit, which is asemiconductor device of one embodiment of the present invention,applicable to the circuits 100[1] to 100[m] in each of the drivercircuits GD in FIGS. 3A and 3B. A circuit 100A1 includes transistors MN1to MN10, a capacitor C1, a capacitor C2, and a capacitor C3, forexample. The circuit 100A1 further includes the terminal IT, theterminal PWC, the terminal CLK1, the terminal CLK2, the terminal GT, andthe terminal OT, for example.

For example, the transistors MN1 to MN10 are preferably OS transistors.In particular, as a metal oxide included in a channel formation regionof the OS transistor, an In-M-Zn oxide containing indium, the element M,and zinc (the element M is one or more selected from aluminum, gallium,yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron,nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium,hafnium, tantalum, tungsten, and magnesium) or the like is preferablyused. A transistor including silicon in a channel formation region(hereinafter referred to as a Si transistor) may be employed as thetransistors. As the silicon, single crystal silicon, amorphous silicon(referred to as hydrogenated amorphous silicon in some cases),microcrystalline silicon, or polycrystalline silicon can be used, forexample. As transistors other than the OS transistor and the Sitransistor, for example, a transistor including germanium (Ge) or thelike in a channel formation region, a transistor including a compoundsemiconductor, such as zinc selenide (ZnSe), cadmium sulfide (CdS),gallium arsenide (GaAs), indium phosphide (InP), gallium nitride (GaN),or silicon germanium (SiGe), in a channel formation region, a transistorincluding carbon nanotube in a channel formation region, or a transistorincluding an organic semiconductor in a channel formation region can beused.

The transistors MN1 to MN10 illustrated in FIG. 1A are each an n-channeltransistor having a multi-gate structure including gates over and undera channel, and the transistors MN1 to MN10 each include a first gate anda second gate. Note that in this specification and the like, forconvenience, the first gate is referred to as a gate (referred to as afront gate in some cases) and the second gate is referred to as a backgate so that they are distinguished from each other in some cases. Inthis specification and the like, the first gate and the second gate canbe interchanged; thus, the term “gate” can be replaced with the term“back gate”. Similarly, the term “back gate” can be replaced with theterm “gate”. As a specific example, a connection structure in which “agate is electrically connected to a first wiring and a back gate iselectrically connected to a second wiring” can be replaced with aconnection structure in which “a back gate is electrically connected toa first wiring and a gate is electrically connected to a second wiring”.

The connection of the second gate of the transistor in the semiconductordevice of one embodiment of the present invention may be changed as longas an object of one embodiment of the present invention is achieved.FIG. 1A illustrates the second gate and a connection destination of thesecond gate in each of the transistors MN1 to MN10; however, forexample, in the same transistor, in the case where a wiring, a terminal,or a circuit element is electrically connected to both the first gateand the second gate, the structure may be changed to a structure inwhich the wiring, the terminal, or the circuit element is electricallyconnected to one of the first gate and the second gate.

The semiconductor device of one embodiment of the present invention doesnot depend on the structure of a transistor included in thesemiconductor device. For example, each of the transistors MN1 to MN10in FIG. 1A may have a structure not including a back gate, that is, asingle-gate structure. It is also possible that some transistors includeback gates and the other transistors do not include back gates.

Note that the same applies to a transistor described in other parts ofthe specification and a transistor illustrated in other drawings, notonly to the transistors in FIG. 1A.

A first terminal of the transistor MN1 is electrically connected to awiring VDE1, a second terminal of the transistor MN1 is electricallyconnected to a first terminal of the transistor MN2, a first terminal ofthe transistor MN5, and a first terminal of the transistor MN8, and afirst gate of the transistor MN1 is electrically connected to a secondgate of the transistor MN1, a first gate of the transistor MN4, and theterminal IT.

A first terminal of the transistor MN3 is electrically connected to awiring VDE2, a second terminal of the transistor MN3 is electricallyconnected to a first gate of the transistor MN2, a first terminal of thecapacitor C1, a first terminal of the transistor MN4, a first gate ofthe transistor MN7, and a first gate of the transistor MN10, and a firstgate of the transistor MN3 is electrically connected to a second gate ofthe transistor MN3 and the terminal CLK2.

A second terminal of the transistor MN5 is electrically connected to afirst gate of the transistor MN6, a second gate of the transistor MN6,and a first terminal of the capacitor C2, and a first gate of thetransistor MN5 is electrically connected to a second gate of thetransistor MN5 and a wiring VDE3. A first terminal of the transistor MN6is electrically connected to the terminal CLK1, a second terminal of thetransistor MN6 is electrically connected to a second terminal of thecapacitor C2, a first terminal of the transistor MN7, and the terminalOT.

A second terminal of the transistor MN8 is electrically connected to afirst gate of the transistor MN9, a second gate of the transistor MN9,and a first terminal of the capacitor C3, and a first gate of thetransistor MN8 is electrically connected to a second gate of thetransistor MN8 and a wiring VDE4. A first terminal of the transistor MN9is electrically connected to the terminal PWC, a second terminal of thetransistor MN9 is electrically connected to a second terminal of thecapacitor C3, a first terminal of the transistor MN10, and the terminalGT.

A second terminal of the transistor MN2 is electrically connected to awiring VSE1, and a second gate of the transistor MN2 is electricallyconnected to a wiring BG1. A second terminal of the capacitor C1 iselectrically connected to a wiring VSE2. A second terminal of thetransistor MN4 is electrically connected to a wiring VSE3, and a secondgate of the transistor MN4 is electrically connected to a wiring BG2. Asecond terminal of the transistor MN7 is electrically connected to asecond gate of the transistor MN7 and a wiring VSE4. A second terminalof the transistor MN10 is electrically connected to a second gate of thetransistor MN10 and a wiring VSE5.

In FIG. 1A, an electrical connection point between the second terminalof the transistor MN1, the first terminal of the transistor MN2, thefirst terminal of the transistor MN5, and the first terminal of thetransistor MN8 is illustrated as a node N1. Also in FIG. 1A, anelectrical connection point between the second terminal of thetransistor MN3, the first gate of the transistor MN2, the first terminalof the capacitor C1, the first terminal of the transistor MN4, the firstgate of the transistor MN7, and the second gate of the transistor MN10is illustrated as a node N2.

Each of the wirings VDE1 to VDE4 functions as a wiring supplying aconstant potential, for example. The constant voltage can be ahigh-level potential, for example. Note that the wirings VDE1 to VDE4may supply the same constant potential or different constant potentials.Alternatively, two or more of the wirings VDE1 to VDE4 may supply thesame constant potential, and the other wiring(s) may supply a potentialdifferent from the constant potential. Furthermore, the two or more ofthe wirings VDE1 to VDE4 which supply the same constant potential may bea single wiring. For example, in the case where the wiring VDE1 andwiring VDE2 supply the same constant potential, the wiring VDE1 and thewiring VDE2 may be a single wiring.

One or more of the wirings VDE1 to VDE4 may supply a variable potential,not a constant potential.

Each of the wirings VSE1 to VSE5 functions as a wiring supplying aconstant potential, for example. The constant voltage can be, forexample, a low-level potential, the ground potential, or a negativepotential. Note that the wirings VSE1 to VSE5 may supply the sameconstant potential or different constant potentials. Alternatively, twoor more of the wirings VSE1 to VSE5 may supply the same constantpotential, and the other wiring(s) may supply a potential different fromthe constant potential. Furthermore, the two or more of the wirings VSE1to VSE5 which supply the same constant potential may be a single wiring.For example, in the case where the wiring VSE1 and wiring VSE2 supplythe same constant potential, the wiring VSE1 and the wiring VSE2 may bea single wiring.

One or more of the wirings VSE1 to VSE5 may supply a variable potential,not a constant potential.

Each of the wirings BG1 and BG2 functions as a wiring supplying aconstant potential, for example. The constant voltage can be, forexample, a low-level potential, the ground potential, or a negativepotential. Note that the wirings BG1 and BG2 may supply the sameconstant potential or different constant potentials. In the case wherethe wirings BG1 and BG2 supply the same constant potential, the wiringBG1 and the wiring BG2 may be a single wiring.

One or both of the wirings BG1 and BG2 may supply a variable potential,not a constant potential.

Operation Example 1

Here, an operation example of the circuit 100A1 illustrated in FIG. 1Awill be described.

FIG. 4 is a timing chart showing an operation example of the circuit100A1. The timing chart in FIG. 4 shows, as an example, changes inpotentials of the terminal IT, the terminal PWC, the terminal CLK1, theterminal CLK2, the node N1, the node N2, the terminal GT, and theterminal OT. In FIG. 4, high- and low-level potentials are expressed asV_(High) and V_(Low), respectively.

To simply describe the operation of the circuit 100A1, the lengths andthe like of an input period and an output period of a signal shown inthe timing chart in FIG. 4 are different from those in the actualcircuit operation in some cases.

In this operation example, the constant potentials supplied by thewirings VDE1 to VDE4 are the same high-level potential (V_(High)). Theconstant potentials supplied by the wirings VSE1 to VSE5 are the samelow-level potential (V_(Low)). The constant potential supplied by thewiring BG1 is a low-level potential (V_(LL)), and the constant potentialsupplied by the wiring BG2 is the low-level potential (V_(Low)). Notethat V_(LL) is a potential lower than V_(Low). In particular, V_(LL) ispreferably a negative potential.

Note that each of V_(High) and V_(Low) is preferably set such that adifference between V_(High) and V_(Low) is higher than the thresholdvoltage of each of the transistors MN1 to MN10.

[From Time T1 to Time T2]

In a period from Time T1 to Time T2, V_(Low) is supplied to the terminalIT, V_(Low) is supplied to the terminal PWC, V_(Low) is supplied to theterminal CLK1, and V_(Low) is supplied to the terminal CLK2. At the nodeN2, V_(High)−V_(th_MN3) is held as an example. Note that V_(th_MN3) is athreshold voltage of the transistor MN3.

V_(Low) is supplied from the terminal CLK2 to the first gate of thetransistor MN3, V_(High) is supplied from the wiring VDE2 to the firstterminal of the transistor MN3, and the potential of the second terminalof the transistor MN3 (the node N2) is V_(High)−V_(th_MN3). At thistime, the potential of the second terminal of the transistor MN3 islower than that of the first terminal thereof; accordingly, the secondterminal of the transistor MN3 serves as a source. A gate-source voltageof the transistor MN3 is V_(Low)−(V_(High)−V_(th_MN3)). When V_(th_MN3)is a threshold voltage in an appropriate range,V_(Low)−(V_(High)−V_(th_MN3)) is lower than 0 V, whereby the transistorMN3 is turned off.

The potential of the first gate of the transistor MN2 (the node N2) isV_(High)−V_(th_MN3), and the second terminal of the transistor MN2 issupplied with V_(Low) from the wiring VSE1, whereby the transistor MN2is turned on. Thus, electrical continuity is established between thenode N1 and the wiring VSE1, so that the potential of the node N1becomes V_(Low).

The potential of the first gate of the transistor MN1 (the terminal IT)is V_(Low) and the potential of the second terminal of the transistorMN1 (the node N1) is V_(Low), whereby the transistor MN1 is turned off.

Furthermore, V_(High) is supplied from the wiring VDE3 to the first gateof the transistor MN5 and the potential of the first terminal of thetransistor MN5 (the node N1) is V_(Low), whereby the transistor MN5 isturned on. Thus, electrical continuity is established between the wiringVSE1 and the first gate of the transistor MN6, so that the potential ofthe first gate of the transistor MN6 becomes V_(Low).

Furthermore, V_(High) is supplied from the wiring VDE4 to the first gateof the transistor MN8 and the potential of the first terminal of thetransistor MN8 (the node N1) is V_(Low), whereby the transistor MN8 isturned on. Thus, electrical continuity is established between the wiringVSE1 and the first gate of the transistor MN9, so that the potential ofthe first gate of the transistor MN9 becomes V_(Low).

The potential of the first gate of the transistor MN7 (the node N2) isV_(High)−V_(th_MN3), and the second terminal of the transistor MN7 issupplied with V_(Low) from the wiring VSE4, whereby the transistor MN7is turned on. Thus, electrical continuity is established between theterminal OT and the wiring VSE4, so that the potential of the terminalOT becomes V_(Low).

The potential of the first gate of the transistor MN6 is V_(Low) and thepotential of the second terminal of the transistor MN6 (the terminal OT)is V_(Low), whereby the transistor MN6 is turned off.

The potential of the first gate of the transistor MN10 (the node N2) isV_(High)−V_(th_MN3), and the second terminal of the transistor MN10 issupplied with V_(Low) from the wiring VSE5, whereby the transistor MN10is turned on. Thus, electrical continuity is established between theterminal GT and the wiring VSE5, so that the potential of the terminalGT becomes V_(Low).

The potential of the first gate of the transistor MN9 is V_(Low) and thepotential of the second terminal of the transistor MN9 (the terminal GT)is V_(Low), whereby the transistor MN9 is turned off.

The potential of the first gate of the transistor MN4 (the terminal IT)is V_(Low), and the second terminal of the transistor MN4 is suppliedwith V_(Low) from the wiring VSE3, whereby the transistor MN4 is turnedoff.

Here, the case where the transistor MN1, the transistor MN3, thetransistor MN4, the transistor MN6, or the transistor MN9, which is off,is normally on is considered.

Note that “normally on” in this specification and the like means a statewhere a channel exists without application of a voltage to a gate and acurrent flows through a transistor. Alternatively, “normally on” means astate where a channel exists even when the gate-source voltage is 0 V,and a current flows through a transistor. Furthermore, “normally off”means a state where a current does not flow through a transistor when nopotential or the ground potential is applied to a gate. The term“normally off” in an OS transistor means that a current per micrometerof a channel width flowing through a transistor is lower than or equalto 1×10⁻²⁰ A at room temperature, lower than or equal to 1×10⁻¹⁸ A at85° C., or lower than or equal to 1×10⁻¹⁶ A at 125° C. when no potentialor the ground potential is applied to a gate.

When the transistor MN1 is normally on, a current flows from the wiringVDE1 to the node N1. Thus, the potential of the node N1 may be higherthan V_(Low) in some cases. Furthermore, a shoot-through current flowsbetween the wiring VDE1 and the wiring VSE1, and thus the powerconsumption of the circuit 101A1 becomes high in some cases. Note thateven when the transistor MN1 is normally on, the circuit 101A1 sometimesnormally operates in the case where the potential of the node N1 doesnot change largely from V_(Low) (e.g., in the case where a source-draincurrent of the transistor MN2 is larger than a source-drain current ofthe transistor MN1).

Since V_(Low)−(V_(High)−V_(th_MN3)), which is the gate-source voltage ofthe transistor MN3, is lower than the threshold voltage V_(th_MN3), thetransistor MN3 is off even when the transistor MN3 is normally on.

In the case where the transistor MN4 is normally on, current flows fromthe node N2 to the wiring VSE3. Therefore, the potential of the node N2is lower than V_(High)−V_(th_MN3) in some cases. To prevent a decreasein the potential of the node N2, the electrostatic capacitance value ofthe capacitor C1 is preferably set high, for example. Alternatively, thenumber of capacitors electrically connected to the node N2 may beincreased, for example. For example, it is preferable that the potentialof the wiring BG2 electrically connected to the second gate of thetransistor MN4 be set low to make the threshold voltage of thetransistor MN4 high.

Since the potential of the first terminal of the transistor MN6 isV_(Low) and the potential of the second terminal of the transistor MN6(the terminal OT) is V_(Low), the potential of the terminal OT does notchange even when the transistor MN6 is normally on.

Similarly, since the potential of the first terminal of the transistorMN9 is V_(Low) and the potential of the second terminal of thetransistor MN9 (the terminal GT) is V_(Low), the potential of theterminal GT does not change even when the transistor MN9 is normally on.

[From Time T2 to Time T3]

In a period from Time T2 to Time T3, V_(High) is supplied to theterminal CLK2.

In the transistor MN3, V_(High) is supplied from the terminal CLK2 tothe first gate of the transistor MN3, and V_(High) is supplied from thewiring VDE2 to the first terminal of the transistor MN3. At this time,for example, when the potential of the second terminal of the transistorMN3 (the node N2) is lower than V_(High)−V_(th_MN3), the transistor MN3is turned on, whereby electrical continuity is established between thewiring VDE2 and the node N2.

When the transistor MN3 is on, a current flows from the wiring VDE2 tothe node N2; thus, the potential of the node N2 becomes high. Since thethreshold voltage of the transistor MN3 is V_(th_MN3), the transistorMN3 is turned off when the potential of the node N2 (the second terminalof the transistor MN3) increases up to V_(High)−V_(th_MN3).

In the period from Time T2 to Time T3, after V_(High) is supplied to theterminal CLK2, V_(Low) is supplied to the terminal CLK2. Thus, thegate-source voltage of the transistor MN3 becomesV_(Low)−(V_(High)−V_(th_MN3)), and the transistor MN3 is turned off whenV_(th_MN3) is a threshold voltage in an appropriate range.

By the above operation, in the circuit 100A1, V_(High) is supplied tothe terminal CLK2, whereby the potential of the node N2 can be refreshedto be V_(High)−V_(th_MN3).

[From Time T3 to Time T4]

In a period from Time T3 to Time T4, V_(Low) is supplied to the terminalIT, V_(Low) is supplied to the terminal PWC, V_(Low) is supplied to theterminal CLK1, and V_(Low) is supplied to the terminal CLK2. Potentialsinput to the terminal IT, the terminal PWC, the terminal CLK1, and theterminal CLK2 in the period from Time T3 to Time T4 are equal to thosein the period from Time T1 to Time T2; therefore, for an operationexample of the circuit 100A1 in the period from Time T3 to Time T4, thedescription of the operation example in the period from Time T1 to TimeT2 is referred to.

[From Time T4 to Time T5]

In a period from Time T4 to Time T5, V_(High) is supplied to theterminal IT.

V_(High) is supplied from the terminal IT to the first gate of thetransistor MN4, and V_(Low) is supplied from the wiring VSE3 to thesecond terminal of the transistor MN4, whereby the transistor MN4 isturned on. Thus, electrical continuity is established between the nodeN2 and the wiring VSE3, so that the potential of the node N2 changesfrom V_(High)−V_(th_MN3) to V_(Low).

In the above manner, the potential of the first gate of the transistorMN2 (the node N2) is V_(Low) and V_(Low) is supplied from the wiringVSE1 to the second terminal of the transistor MN2, whereby thetransistor MN2 is turned off.

In the above manner, the potential of the first gate of the transistorMN7 (the node N2) is V_(Low) and V_(Low) is supplied from the wiringVSE4 to the second terminal of the transistor MN7, whereby thetransistor MN7 is turned off.

In the above manner, the potential of the first gate of the transistorMN10 (the node N2) is V_(Low) and V_(Low) is supplied from the wiringVSE5 to the second terminal of the transistor MN10, whereby thetransistor MN10 is turned off.

V_(High) is supplied from the terminal IT to the first gate of thetransistor MN1, V_(High) is supplied from the wiring VDE1 to the firstterminal of the transistor MN1, and the potential of the second terminalof the transistor MN1 (the node N2) is V_(Low). At this time, thetransistor MN1 is turned on, so that electrical continuity isestablished between the wiring VDE1 and the node N1.

When the transistor MN1 is on, a current flows from the wiring VDE1 tothe node N1; thus, the potential of the node N1 becomes high. Thetransistor MN1 is turned off when the threshold voltage of thetransistor MN1 is V_(th_MN1) and the potential of the node N1 (thesecond terminal of the transistor MN1) increases up toV_(High)−V_(th_MN1).

Since V_(High) is input to the terminal IT in the period from Time T4 toTime T5, in the case where the potential of the node N1 (the secondterminal of the transistor MN1), V_(High)−V_(th_MN1), decreases for somereason, the transistor MN1 is turned on again and a current flows fromthe wiring VDE1 to the node N1, so that the potential of the node N1(the second terminal of the transistor MN1) increases up toV_(High)−V_(th_MN1). When the potential of the second terminal of thetransistor MN1 increases to V_(High)−V_(th_MN1), the transistor MN1 isturned off again.

In the transistor MN5, V_(High) is supplied from the wiring VDE3 to thefirst gate of the transistor MN5, V_(High)−V_(th_MN1) is supplied to thefirst terminal of the transistor MN5 (the node N1), and the potential ofthe second terminal of the transistor MN5 is V_(Low). At this time, thepotential of the second terminal of the transistor MN5 is lower than thepotential of the first terminal thereof, so that the second terminal ofthe transistor MN5 serves as a source, and the transistor MN5 is turnedon. Thus, electrical continuity is established between the node N1 andthe first gate of the transistor MN6.

When the transistor MN5 is on, a current flows from the node N1 to thefirst gate of the transistor MN6; thus, the potential of the first gateof the transistor MN6 becomes high. Here, in the case where thethreshold voltage of the transistor MN5 is V_(th_MN5) and V_(th_MN5) is,for example, a threshold voltage higher than or equal to V_(th_MN1), thetransistor MN5 is turned off when the potential of the first gate of thetransistor MN6 increases to V_(High)−V_(th_MN5). In contrast, forexample, when V_(th_MN5) is a threshold voltage lower than V_(th_MN1),the potential of the first gate of the transistor MN6 increases up toV_(High)−V_(th_MN1). At this time, the gate-source voltageV_(High)−(V_(High)−V_(th_MN1))=V_(th_MN1) is higher than the thresholdvoltage V_(th_MN5) of the transistor MN5, so that the transistor MN5 isturned on. Note that in this operation example with this configurationexample, the transistor MN5 is preferably off in the period from Time T4to Time T5. In other words, V_(th_MN5) is preferably a threshold voltagehigher than or equal to V_(th_MN1). Furthermore, V_(th_MN5) ispreferably a threshold voltage value which does not make the transistornormally-on. In this operation example, the case where the potential ofthe second terminal of the transistor MN5 (the first gate of thetransistor MN6) reaches V_(High)−V_(th_MN5) (the case where V_(th_MN5)is higher than or equal to V_(th_MN1)) is described.

The potential of the first gate of the transistor MN6 isV_(High)−V_(th_MN5), V_(Low) is supplied from the terminal CLK1 to thefirst terminal of the transistor MN6, and the potential of the secondterminal of the transistor MN6 is V_(Low). At this time, the first orthe second terminal of the transistor MN6 serves as a source, and thetransistor MN6 is turned on. Thus, electrical continuity is establishedbetween the terminal CLK1 and the terminal OT. Since V_(Low) is suppliedto the terminal CLK1 before Time T4, the potential of the secondterminal of the transistor MN6 (the terminal OT) remains V_(Low) anddoes not change.

V_(High) is supplied from the wiring VDE4 to the first gate of thetransistor MN8, V_(High)−V_(th_MN1) is supplied to the first terminal ofthe transistor MN8 (the node N1), and the potential of the secondterminal of the transistor MN8 is V_(Low). At this time, the potentialof the second terminal of the transistor MN8 is lower than the potentialof the first terminal thereof, so that the second terminal of thetransistor MN8 serves as a source, and the transistor MN8 is turned on.Thus, electrical continuity is established between the node N1 and thefirst gate of the transistor MN9.

When the transistor MN8 is on, a current flows from the node N1 to thefirst gate of the transistor MN9; thus, the potential of the first gateof the transistor MN9 becomes high. Here, in the case where thethreshold voltage of the transistor MN8 is V_(th_MN8) and V_(th_MN8) is,for example, a threshold voltage higher than or equal to V_(th_MN1), thetransistor MN8 is turned off when the potential of the first gate of thetransistor MN9 increases to V_(High)−V_(th_MN8). In contrast, forexample, when V_(th_MN8) is a threshold voltage lower than V_(th_MN1),the potential of the first gate of the transistor MN9 increases up toV_(High)−V_(th_MN1). At this time, the gate-source voltageV_(High)−(V_(High)−V_(th_MN1))=V_(th_MN1) is higher than the thresholdvoltage V_(th_MN8) of the transistor MN8, so that the transistor MN8 isturned on. Note that in this operation example with this configurationexample, the transistor MN8 is preferably off in the period from Time T4to Time T5. In other words, V_(th_MN8) is preferably a threshold voltagehigher than or equal to V_(th_MN1). Furthermore, V_(th_MN8) ispreferably a threshold voltage value which does not make the transistornormally-on. In this operation example, the case where the potential ofthe second terminal of the transistor MN8 (the first gate of thetransistor MN9) reaches V_(High)−V_(th_MN8) (the case where V_(th_MN8)is higher than or equal to V_(th_MN1)) is described.

The potential of the first gate of the transistor MN9 isV_(High)−V_(th_MN8), V_(Low) is supplied from the terminal PWC to thefirst terminal of the transistor MN9, and the potential of the secondterminal of the transistor MN9 is V_(Low). At this time, the first orthe second terminal of the transistor MN9 serves as a source, and thetransistor MN9 is turned on. Thus, electrical continuity is establishedbetween the terminal PWC and the terminal GT. Since V_(Low) is suppliedto the terminal PWC before Time T4, the potential of the terminal OTremains V_(Low) and does not change.

In the period from Time T4 to Time T5, after V_(High) is supplied to theterminal IT, V_(Low) is supplied to the terminal IT. Thus, thegate-source voltage of the transistor MN1 becomesV_(Low)−(V_(High)−V_(th_MN1)), and the transistor MN1 is turned off whenV_(th_MN1) is a threshold voltage in an appropriate range.

V_(Low) is supplied from the terminal IT to the first gate of thetransistor MN4, and V_(Low) is supplied from the wiring VSE3 to thesecond terminal of the transistor MN4, whereby the transistor MN4 isturned off Thus, the potential V_(Low) is held in the node N2.

[From Time T5 to Time T6]

In a period from Time T5 to Time T6, V_(High) is supplied to theterminal CLK1.

The potential of the first gate of the transistor MN6 isV_(High)−V_(th_MN5), V_(High) is supplied from the terminal CLK1 to thefirst terminal of the transistor MN6, and the potential of the secondterminal of the transistor MN6 is V_(Low). When the threshold voltage ofthe transistor MN6 is V_(th_MN6), the gate-source voltage of thetransistor MN6, V_(High)−V_(Low)−V_(th_MN5), is higher than thethreshold voltage V_(th_MN6) of the transistor MN6, whereby thetransistor MN6 is turned on. Thus, electrical continuity is establishedbetween the terminal CLK1 and the terminal OT.

When the transistor MN6 is on, a current flows from the terminal CLK1 tothe terminal OT; thus, the potential of the second terminal of thetransistor MN6 (the terminal OT) becomes high. When the potential of thesecond terminal of the transistor MN6 (the terminal OT) becomes high,the potential of the first gate of the transistor MN6 also becomes highdue to capacitive coupling by the capacitor C2. Accordingly, thepotential of the second terminal of the transistor MN6 (the terminal OT)becomes higher than V_(High)−V_(th_MN6), and eventually equals to thepotential V_(High) supplied by the terminal CLK1 in this operationexample. The potential of the first gate of the transistor MN6 at thistime increases up to (V_(High)−V_(th_MN5))(V_(High)−V_(Low))=2V_(High)−V_(Low)−V_(th_MN5). Note that in thisoperation example, increasing a gate potential of a transistor with anincrease in a potential of a first or a second terminal of thetransistor by utilizing capacitive coupling in such a manner is calledbootstrap.

Here, the case where the transistor MN1, the transistor MN3, or thetransistor MN4, which is off in the period from Time T5 to Time T6, isnormally on is considered.

In the transistor MN1, the gate-source voltage of the transistor MN1,V_(Low)−(V_(High)−V_(th_MN1)), is lower than the threshold voltageV_(th_MN1), and thus the transistor MN1 is off even when the transistorMN1 is normally on.

When the transistor MN3 is normally on, a current flows from the wiringVDE2 to the node N2. For this reason, the potential of the node N2 ishigher than V_(Low) in some cases. The increase in the potential of thenode N2 sometimes brings an increase in the potential of the first gateof the transistor MN2. Note that even when the transistor MN3 isnormally on, in the case where the potential of the node N2 becomesslightly higher than V_(Low), the gate-source voltage of the transistorMN3 becomes lower than or equal to the threshold voltage and thetransistor MN3 is turned off in some cases. Furthermore, in the casewhere the threshold voltage of the transistor MN2 is sufficiently high,the transistor MN2 can be kept off even when the potential of the nodeN2 increases because of the influence of the normally-on characteristicsof the transistor MN3; as a result, the circuit 101A1 operates normallyin some cases.

In the transistor MN4, the potential of the first terminal of thetransistor MN4 (the node N2) is V_(Low) and the potential of the secondterminal of the transistor MN4 (the wiring VSE3) is V_(Low); thus, thepotential of the node N2 does not change even when the transistor MN4 isnormally on.

[From Time T6 to Time T7]

In a period from Time T6 to Time T7, V_(High) is supplied to theterminal PWC.

The potential of the first gate of the transistor MN9 isV_(High)−V_(th_MN8), V_(High) is supplied from the terminal PWC to thefirst terminal of the transistor MN9, and the potential of the secondterminal of the transistor MN9 is V_(Low). When the threshold voltage ofthe transistor MN9 is V_(th_MN9), the gate-source voltage of thetransistor MN9, V_(High)−V_(Low)−V_(th_MN8), is higher than thethreshold voltage V_(th_MN9) of the transistor MN9, whereby thetransistor MN9 is turned on. Thus, electrical continuity is establishedbetween the terminal PWC and the terminal GT.

When the transistor MN9 is on, a current flows from the terminal PWC tothe terminal GT; thus, the potential of the second terminal of thetransistor MN9 (the terminal GT) becomes high. When the potential of thesecond terminal of the transistor MN9 (the terminal GT) becomes high,the potential of the first gate of the transistor MN9 also becomes highdue to capacitive coupling by the capacitor C3. By this bootstrap, thepotential of the second terminal of the transistor MN9 (the terminal GT)becomes higher than V_(High)−V_(th_MN8), and eventually equals to thepotential V_(High) supplied by the terminal PWC in this operationexample. The potential of the first gate of the transistor MN9 at thistime increases up to (V_(High)−V_(th_MN8))(V_(High)−V_(Low))=2V_(High)−V_(Low)−V_(th_MN8).

In the period from Time T6 to Time T7, after V_(High) is supplied to theterminal PWC, V_(Low) is supplied thereto. Thus, the potential of thesecond terminal of the transistor MN9 (the terminal GT) becomes V_(Low)as in the operation example in the period from Time T5 to Time T6, andthe gate-source voltage becomes V_(High)−V_(th_MN8).

For the case where the transistor MN1, the transistor MN3, or thetransistor MN4, which is off in the period from Time T6 to Time T7, isnormally on, the description of the operation example in the period fromTime T5 to Time T6 is referred to.

[From Time T8 to Time T9]

In a period from Time T8 to Time T9, V_(Low) is supplied to the terminalCLK1.

The potential of the first gate of the transistor MN6 is2V_(High)−V_(Low)−V_(th_MN5), V_(Low) is supplied from the terminal CLK1to the first terminal of the transistor MN6, and the potential of thesecond terminal of the transistor MN6 is V_(High). At this time, thepotential of the first terminal of the transistor MN6 is lower than thepotential of the second terminal thereof, so that the first terminal ofthe transistor MN6 serves as a source, and the transistor MN6 is turnedon. Thus, electrical continuity is established between the terminal CLK1and the terminal OT.

When the transistor MN6 is on, a current flows from the terminal OT tothe terminal CLK1; thus, the potential of the terminal OT becomes low.The potential of the terminal OT eventually equals to the potentialV_(Low) supplied by the terminal CLK1 in this operation example.Therefore, the potential of the first gate of the transistor MN6decreases to V_(High)−V_(th_MN5).

[From Time T9 to Time T10]

In a period from Time T9 to Time T10, V_(High) is supplied to theterminal CLK2. At this time, operation of the circuit 101A1 in theperiod from Time T9 to Time T10 is the same as that in the period fromTime T2 to Time T3.

For example, when V_(High) is supplied to the terminal CLK2, thetransistor MN3 is turned on, and the potential of the node N2 changesfrom V_(Low) to V_(High)−V_(th_MN3). Thus, the transistor MN2, thetransistor MN7, and the transistor MN10 are turned on, and each of thepotentials of the node N1, the terminal OT, and the terminal GT becomesV_(Low).

Furthermore, the potential of the node N1 decreases to V_(Low), wherebythe transistor MN5 and the transistor MN8 are turned on. Accordingly,each of the potentials of the second terminal of the transistor MN5 (thefirst gate of the transistor MN6) and the second terminal of thetransistor MN8 (the first gate of the transistor MN9) decreases toV_(Low). As a result, each of the potentials of the first terminal andthe second terminal of the transistor MN5 becomes V_(Low), andsimilarly, each of the potentials of the first terminal and the secondterminal of the transistor MN8 becomes V_(Low).

[After Time T10]

After Time T10, for example, a variable potential with V_(Low) is inputto the terminal CLK2 to set the potential of the node N1 to V_(Low) andthe potential of the node N2 to V_(High)−V_(th_MN3), and after that,V_(High) is supplied to the terminal CLK1 or the terminal PWC withoutinput of V_(High) to the terminal IT. A specific operation example isdescribed below.

[From Time T11 to Time T12]

In a period from Time T11 to Time T12, V_(High) is supplied to theterminal CLK1.

The potential of the first gate of the transistor MN6 is V_(Low),V_(High) is supplied from the terminal CLK1 to the first terminal of thetransistor MN6, and the potential of the second terminal of thetransistor MN6 is V_(Low). At this time, the potential of the secondterminal of the transistor MN6 is lower than the potential of the firstterminal thereof, so that the second terminal of the transistor MN6serves as a source, and the transistor MN6 is turned off. Thus,electrical continuity is not established between the terminal CLK1 andthe terminal OT.

The potential of the first gate of the transistor MN7 isV_(High)−V_(th_MN3), and the second terminal of the transistor MN7 issupplied with V_(Low) from the wiring VSE4, whereby the transistor MN7is turned on. Thus, electrical continuity is established between theterminal OT and the wiring VSE4, so that the potential of the terminalOT becomes V_(Low).

In the period from Time T11 to Time T12, after V_(High) is supplied tothe terminal CLK1, V_(Low) is supplied to the terminal CLK1. Thepotential of the first gate of the transistor MN6 is V_(Low), the firstterminal of the transistor MN6 is supplied with V_(Low) from theterminal CLK1, and the potential of the second terminal of thetransistor MN6 is V_(Low); thus, the transistor MN6 is turned off whenthe threshold voltage of the transistor MN6 is in an appropriate range.

The transistor MN6 remains off even when the variable potential withV_(Low) is input to the terminal CLK2 to set the potential of the nodeN1 to V_(Low) and the potential of the node N2 to V_(High)−V_(th_MN3),and then V_(High) is supplied to the terminal CLK1 without input ofV_(High) to the terminal IT as described above. After that, even whenV_(Low) is supplied to the terminal CLK1, the transistor MN6 remainsoff.

[From Time T12 to Time T13]

In a period from Time T12 to Time T13, V_(High) is supplied to theterminal PWC.

The potential of the first gate of the transistor MN9 is V_(Low),V_(High) is supplied from the terminal PWC to the first terminal of thetransistor MN9, and the potential of the second terminal of thetransistor MN9 is V_(Low). At this time, the potential of the secondterminal of the transistor MN9 is lower than the potential of the firstterminal thereof, so that the second terminal of the transistor MN9serves as a source and the transistor MN9 is turned off. Thus,electrical continuity is not established between the terminal PWC andthe terminal GT.

The potential of the first gate of the transistor MN10 isV_(High)−V_(th_MN3), and the second terminal of the transistor MN10 issupplied with V_(Low) from the wiring VSE5, whereby the transistor MN10is turned on. Thus, electrical continuity is established between theterminal GT and the wiring VSE5, so that the potential of the terminalGT becomes V_(Low).

In the period from Time T12 to Time T13, after V_(High) is supplied tothe terminal PWC, V_(Low) is supplied thereto. The potential of thefirst gate of the transistor MN9 is V_(Low), the first terminal of thetransistor MN9 is supplied with V_(Low) from the terminal PWC, and thepotential of the second terminal of the transistor MN9 is V_(Low),whereby the transistor MN9 is turned off.

The transistor MN9 remains off even when the variable potential withV_(Low) is input to the terminal CLK2 to set the potential of the nodeN1 to V_(Low) and the potential of the node N2 to V_(High)−V_(th_MN3),and then V_(High) is supplied to the terminal PWC without input ofV_(High) to the terminal IT as described above. After that, even whenV_(Low) is supplied to the terminal PWC, the transistor MN9 remains off

<<Comparison 1>>

Here, the circuit 100A1 is compared with the circuit 101 in FIG. 5.

The circuit configuration of the circuit 101 in FIG. 5 underlies thedevelopment into the circuit 100A1 in FIG. 1A and circuits and the likedescribed later in Configuration examples 2 to 8. For example, when thecircuit configurations of the circuit 101 and the circuit 100A1 arecompared, in the circuit 100A1, the second gate of the transistor MN7 iselectrically connected to the second terminal of the transistor MN7 andthe second gate of the transistor MN10 is electrically connected to thesecond terminal of the transistor MN10; in the circuit 101, the secondgate of the transistor MN7 is electrically connected to the wiring BG1and the second gate of the transistor MN10 is electrically connected tothe wiring BG1.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 101.

Here, the case where the transistor MN7 or the transistor MN10, which isoff in the period from Time T5 to Time T6 in the above operationexample, is normally on is considered.

When the transistor MN7 is normally on in the circuit 101, a currentflows from the terminal OT to the wiring VSE4. Thus, the potential ofthe terminal OT may be lower than V_(High) in some cases. Furthermore, ashoot-through current flows between the terminal CLK1 and the wiringVSE4, and thus the power consumption of the circuit 101 becomes high insome cases. Note that even when the transistor MN7 is normally on, thecircuit 101 sometimes normally operates in the case where the potentialof the terminal OT does not change largely from V_(High) (e.g., in thecase where a source-drain current of the transistor MN6 is larger than asource-drain current of the transistor MN7).

In the circuit 101, since the potential of the first terminal of thetransistor MN10 (the terminal GT) is V_(Low) and the potential of thesecond terminal of the transistor MN10 (the wiring VSE5) is V_(Low), thepotential of the terminal GT does not change even when the transistorMN10 is normally on.

In the circuit 101 in FIG. 5, each of the second gates of the transistorMN2, the transistor MN7, and the transistor MN10 is electricallyconnected to the wiring BG1. For this reason, in the case where, forexample, a negative potential (V_(LL)) is supplied to the wiring BG1 inorder to make the transistor MN2 normally-off, the transistor MN7 andthe transistor MN10 also become normally off in some cases. As describedabove, the circuit 101 operates normally in some cases even when thetransistor MN7 and the transistor MN10 are normally on, and thus thenegative potential is not necessarily supplied from the wiring BG1 tothe second gates of the transistor MN7 and the transistor MN10.Furthermore, in the case where the transistor MN7 and the transistorMN10 are normally off, the amounts of currents flowing through thetransistors MN7 and MN10 when the transistors MN7 and MN10 are on aresmall in some cases, which might lower the driving speed of the circuit101. Therefore, potentials supplied to the second gates of thetransistor MN7 and the transistor MN10 are preferably different from thepotential supplied to the second gate of the transistor MN2.

In the circuit 100A1 in FIG. 1A, the second gate of the transistor MN7is electrically connected to the wiring VSE4 and the second gate of thetransistor MN10 is electrically connected to the wiring VSE5; thus, apotential as low as the negative potential supplied from the wiring BG1can be prevented from being supplied to the second gates of thetransistors MN7 and MN10. Accordingly, in the circuit 100A1, only thetransistor MN2 among the transistors MN2, MN7, and MN10 can be normallyoff, which is different from the circuit 101. Therefore, the amounts ofcurrents flowing through the transistors MN7 and MN10 in the on statecan be larger in the circuit 100A1 than in the circuit 101. Accordingly,when the circuit 100A1 in FIG. 1A is employed for each of the circuits100[1] to 100[m] in the driver circuit GD in FIG. 3A or FIG. 3B, thedriving speed of the driver circuit GD can be higher than that in thecase where the circuit 101 in FIG. 5 is employed.

The configuration of the semiconductor device of one embodiment of thepresent invention is not limited to the configuration in FIG. 1A. Forexample, the configuration of the semiconductor device of one embodimentof the present invention may be modified in accordance withcircumstances as long as an object of one embodiment of the presentinvention is achieved.

For example, in the case where the potential of the node N2 can besufficiently held in the capacitor C1 in the circuit 100A1 in FIG. 1A,the configuration of the circuit 100A1 can be changed to theconfiguration of a circuit 100A2 in FIG. 1B where the transistor MN4does not have the second gate.

For example, the configuration of the circuit 100A1 in FIG. 1A may bemodified to the configuration of a circuit 100A3 in FIG. 6A. The circuit100A3 in FIG. 6A is different from the circuit 100A1 in FIG. 1A in thatthe second gate of the transistor MN7 is electrically connected to thewiring BG2 and the second gate of the transistor MN10 is electricallyconnected to the wiring BG2.

In the circuit 100A3 in FIG. 6A, the second gate of the transistor MN2is electrically connected to the wiring BG1, and each of the secondgates of the transistors MN7 and MN10 is electrically connected to thewiring BG2; thus, for example, even when a constant potential issupplied to the wiring BG1, the constant potential is not supplied tothe second gates of the transistors MN7 and MN10. That is, the thresholdvoltage of the transistor MN2 can be controlled independently of thethreshold voltages of the transistors MN7 and MN10. With thisconfiguration, for example, when a negative potential is supplied to thesecond gate of the transistor MN2 and the ground potential or alow-level potential (a potential higher than the negative potential) issupplied to the second gates of the transistors MN7 and MN10, theamounts of off-state currents of the transistors MN7 and MN10 can belarger than the amount of an off-state current of the transistor MN2.Accordingly, as in the case where the circuit 100A1 in FIG. 1A isemployed, in the case where the circuit 100A3 in FIG. 6A is employed foreach of the circuits 100[1] to 100[m] in the driver circuit GD in FIG.3A or FIG. 3B, the driving speed of the driver circuit GD can beincreased.

Furthermore, for example, the configuration of the circuit 100A1 in FIG.1A may be modified to the configuration of a circuit 100A4 in FIG. 6B.In the circuit 100A4 in FIG. 6B, each of the second gates of thetransistors MN7 and MN3 is electrically connected to the wiring BG3.

Like the wirings BG1 and BG2, the wiring BG3 functions as a wiringsupplying a constant potential, for example. The constant voltage canbe, for example, a low-level potential, the ground potential, or anegative potential. The wiring BG3 may supply a variable potential, nota constant potential.

Also in the circuit 100A4 in FIG. 6B, as in the circuit 100A3 in FIG.6A, the threshold voltage of the transistor MN2 can be controlledindependently of the threshold voltages of the transistors MN7 and MN10.With this configuration, for example, when a negative potential issupplied from the wiring BG1 to the second gate of the transistor MN2and the ground potential or a low-level potential (a potential higherthan the negative potential) is supplied from the wiring BG3 to thesecond gates of the transistors MN7 and MN10, the amounts of off-statecurrents of the transistors MN7 and MN10 can be larger than the amountof an off-state current of the transistor MN2. Accordingly, as in thecase where the circuit 100A1 in FIG. 1A is employed, in the case wherethe circuit 100A4 in FIG. 6A is employed for each of the circuits 100[1]to 100[m] in the driver circuit GD in FIG. 3A or FIG. 3B, the drivingspeed of the driver circuit GD can be increased.

Configuration Example 2

Next, an example of configuration of a circuit applicable to thecircuits 100[1] to 100[m] in each of the driver circuits GD in FIGS. 3Aand 3B, which is different from the circuits described in Configurationexample 1, will be described.

FIG. 7A illustrates a configuration example of a circuit applicable tothe circuits 100[1] to 100[m], which are semiconductor devices of oneembodiment of the present invention, in each of the driver circuits GDin FIGS. 3A and 3B. A circuit 100B1 has a configuration modified fromthat of the circuit 100A1 in FIG. 1A, and is different from the circuit100A1 in including a capacitor C4.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100B1, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100B1 may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

A first terminal of the capacitor C4 is electrically connected to thesecond terminal of the transistor MN1, the first terminal of thetransistor MN2, the first terminal of the transistor MN5, and the firstterminal of the transistor MN8, for example. A second terminal of thecapacitor C4 is electrically connected to a wiring VSE6, for example.

Like the wirings VSE1 to VSE5, the wiring VSE6 functions as a wiringsupplying a constant potential, for example. The constant voltage canbe, for example, a low-level potential, the ground potential, or anegative potential. In the case where the constant potential supplied bythe wiring VSE6 is the same as a potential supplied by at least one ofthe wirings VSE1 to VSE5, the wiring VSE6 and the wiring may be a singlewiring.

The wiring VSE6 may supply a variable potential, not a constantpotential.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 100B1.

<<Comparison 2>>

Here, differences in configuration and operation between the circuit100B1 in FIG. 7A and the above-described circuit 101 in FIG. 5 aredescribed as in Configuration example 1.

As described above, the circuit 100B1 in FIG. 7A includes the capacitorC4, while the circuit 101 in FIG. 5 does not include the capacitor C4.

The case where the transistor MN2, which is off in the period from TimeT5 to Time T6 in the above operation example, is normally on isconsidered.

When the transistor MN2 is normally on in the circuit 101, a currentflows from the node N1 to the wiring VSE1. Thus, the potential of thenode N1 may be lower than V_(High)−V_(th_MN1) in some cases. Inparticular, in the case where the potential of the node N1 becomes lowerthan V_(High)−V_(th_MN1), one or both of the transistors MN5 and MN8 areturned on, and one or both of the potentials of the first gates of thetransistors MN6 and MN9 decrease; as a result, the effect of thebootstrap described above might be small. Thus, the circuit 101 does notoperate normally in some cases.

In contrast, in the circuit 100B1 in FIG. 7A, the first terminal of thecapacitor C4 is electrically connected to the second terminal of thetransistor MN1, the first terminal of the transistor MN2, the firstterminal of the transistor MN5, and the first terminal of the transistorMN8; thus, the potential of the first terminal of the capacitor C4 (thenode N1) is less likely to decrease in the case where the transistor MN2is normally on. Accordingly, the circuit 100B1 can operate more stablythan the circuit 101.

Accordingly, when the circuit 100B1 in FIG. 7A is employed for each ofthe circuits 100[1] to 100[m] in the driver circuit GD in FIG. 3A orFIG. 3B, the driver circuit GD can operate more stably than that in thecase where the circuit 101 in FIG. 5 is employed.

Note that in the case where the potential of the node N1 can besufficiently held in the capacitor C4 in the circuit 100B1 in FIG. 7A,the configuration of the circuit 100B1 can be changed to theconfiguration of a circuit 100B2 in FIG. 7B where the transistor MN2does not have the second gate.

Configuration Example 3

FIG. 8 illustrates a configuration example of a circuit applicable tothe circuits 100[1] to 100[m], which are semiconductor devices of oneembodiment of the present invention, in each of the driver circuits GDin FIGS. 3A and 3B. The circuit in FIG. 8 is different from the circuit100A1 in FIG. 1A, the circuit 100A2 in FIG. 1B, the circuit 100A3 inFIG. 6A, the circuit 100A4 in FIG. 6B, and the circuit 100B1 in FIG. 7A.

A circuit 100C has a configuration modified from that of the circuit100A1 in FIG. 1A, and is different from the circuit 100A1 in that thefirst gate of the transistor MN5 is electrically connected to a wiringVME1 and the first gate of the transistor MN8 is electrically connectedto a wiring VME2.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100C, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100C may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

Each of the wirings VME1 and VME2 functions as a wiring supplying aconstant potential, for example. The constant potentials are preferablylower than the potentials supplied by the wirings VDE1 to VDE4, forexample. Note that the constant potentials supplied by the wirings VME1and VME2 may be the same or different. For example, when the constantpotentials supplied by the wirings VDE1 and VDE2 are 5 V, the constantpotentials supplied by the wirings VME1 and VME2 are preferably 4 V.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 100C.

<<Comparison 3>>

Here, differences in configuration and operation between the circuit100C in FIG. 8 and the above-described circuit 101 in FIG. 5 aredescribed as in Configuration examples 1 and 2.

The circuit 100C in FIG. 8 is different from the circuit 101 in FIG. 5in that the first gate of the transistor MN5 is electrically connectedto the wiring VME1 and the first gate of the transistor MN8 iselectrically connected to the wiring VME2.

The case where the transistor MN5, which is off in the period from TimeT5 to Time T6 in the above operation example, is normally on isconsidered.

In the circuit 101, when the transistor MN5 is normally on, electriccharge held in the second terminal of the transistor MN5 (the first gateof the transistor MN6) flows to the node N1; as a result, the potentialof the second terminal of the transistor MN5 (the first gate of thetransistor MN6) is sometimes lower than 2V_(High)−V_(Low)−V_(th_MN5).Accordingly, the effect of the bootstrap described above might be smalland the potential of the terminal OT might be lower than V_(High).

The case where the transistor MN8, which is off in the period from TimeT6 to Time T7 in the above operation example, is normally on isconsidered.

In the circuit 101, when the transistor MN8 is normally on, electriccharge held in the second terminal of the transistor MN8 (the first gateof the transistor MN9) flows to the node N1; as a result, the potentialof the second terminal of the transistor MN8 (the first gate of thetransistor MN9) is sometimes lower than 2V_(High)−V_(Low)−V_(th_MN8).Accordingly, the effect of the bootstrap described above might be smalland the potential of the terminal GT might be lower than V_(High).

In the circuit 100C in FIG. 8, when each of potentials supplied to thefirst gates of the transistors MN5 and MN8 (potentials supplied by thewirings VME1 and VME2) is set to be lower than a potential supplied bythe wiring VDE1, timings when the transistors MN5 and MN8 are turned offat the time of increasing the potential of the node N1 are earlier thanthose in the circuit 101 in FIG. 5. Even after the transistors MN5 andMN8 are turned off, the potential of the node N1 ideally increases up toa potential difference between the potential supplied by the wiring VDE1and the threshold voltage of the transistor MN1. Thus, the gate-sourcevoltage of each of the transistors MN5 and MN8 becomes lower than 0 V,and off-state currents of the transistors MN5 and MN8 can be lower.Accordingly, the potential of the first gate of each of the transistorsMN6 and MN9 can be held for a long time.

At this time, the potential of the first gate of the transistor MN6 is adifference between the potential supplied by the wiring VME1 and thethreshold voltage of the transistor MN5, and the potential of the firstgate of the transistor MN9 is a difference between the potentialsupplied by the wiring VME2 and the threshold voltage of the transistorMN9. Accordingly, the potentials of the first gates of the transistorsMN6 and MN9 in the circuit 100C in FIG. 8 are lower than the potentialsof the first gates of the transistors MN6 and MN9 in the circuit 101 inFIG. 5, respectively, but can be increased by bootstrap using thecapacitors C2 and C3.

Accordingly, when the circuit 100C in FIG. 8 is employed for each of thecircuits 100[1] to 100[m] in the driver circuit GD in FIG. 3A or FIG.3B, the driver circuit GD can operate more stably than that in the casewhere the circuit 101 in FIG. 5 is employed.

Configuration Example 4

FIG. 9A illustrates a configuration example of a circuit, which is asemiconductor device of one embodiment of the present invention anddifferent from the circuits described in Configuration examples 1 to 3,applicable to the circuits 100[1] to 100[m] in each of the drivercircuits GD in FIGS. 3A and 3B.

A circuit 100D1 has a configuration modified from that of the circuit100A1 in FIG. 1A, and is different from the circuit 100A1 in that thesecond gate of the transistor MN5 is electrically connected to a wiringVSE7 and the second gate of the transistor MN8 is electrically connectedto a wiring VSE8.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100D1, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100D1 may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

Like the wirings VSE1 to VSE5, each of the wirings VSE7 and VSE8functions as a wiring supplying a constant potential, for example. Theconstant voltage can be, for example, a low-level potential, the groundpotential, or a negative potential. In the case where the constantpotential supplied by the wiring VSE7 is the same as a potentialsupplied by at least one of the wirings VSE1 to VSE5 and VSE8, thewiring VSE7 and the wiring may be a single wiring. In the case where theconstant potential supplied by the wiring VSE8 is the same as apotential supplied by at least one of the wirings VSE1 to VSE5 and VSE7,the wiring VSE8 and the wiring may be a single wiring.

One or both of the wirings VSE7 and VSE8 may supply a variablepotential, not a constant potential.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 100D1.

<<Comparison 4>>

Here, differences in configuration and operation between the circuit100D1 in FIG. 9A and the above-described circuit 101 in FIG. 5 aredescribed as in Configuration examples 1 to 3.

As described above, in the circuit 100D1 in FIG. 9A, the second gate ofthe transistor MN5 is electrically connected to the wiring VSE7, and thesecond gate of the transistor MN8 is electrically connected to thewiring VSE8. In the circuit 101 in FIG. 5, the second gate of thetransistor MN5 is electrically connected to the first gate of thetransistor MN5, and the second gate of the transistor MN8 iselectrically connected to the first gate of the transistor MN8.

The case where the transistor MN5, which is off in the period from TimeT5 to Time T6 in the above operation example, is normally on isconsidered.

In the circuit 101, when the transistor MN5 is normally on, thepotential of the second terminal of the transistor MN5 (the first gateof the transistor MN6) is sometimes lower than2V_(High)−V_(Low)−V_(th_MN5) as described in Comparison 3. Accordingly,the effect of the bootstrap described above might be small and thepotential of the terminal OT might be lower than V_(High).

The case where the transistor MN8, which is off in the period from TimeT6 to Time T7 in the above operation example, is normally on isconsidered.

In the circuit 101, when the transistor MN8 is normally on, thepotential of the second terminal of the transistor MN8 (the first gateof the transistor MN9) is sometimes lower than2V_(High)−V_(Low)−V_(th_MN8) as described in Comparison 3. Accordingly,the effect of the bootstrap described above might be small and thepotential of the terminal GT might be lower than V_(High).

Unlike the threshold voltages of the transistors MN5 and MN8 in thecircuit 101 in FIG. 5, the threshold voltages of the transistors MN5 andMN8 in the circuit 100D1 in FIG. 9A can be changed by the potentialssupplied to the wirings VSE7 and VSE8. For example, when the potentialssupplied to the wirings VSE7 and VSE8 are set to a low-level potential,the ground potential, or a negative potential, the threshold voltages ofthe transistors MN5 and MN8 can be increased, and thus the transistorsMN5 and MN8 can be changed from normally-on to normally-off. Thus, theamount of off-state current of each of the transistors MN5 and MN8 inthe circuit 100D1 can be smaller than the amount of off-state current ofthe transistors MN5 and MN8 in the circuit 101. That is, the potentialof the first gate of each of the transistors MN6 and MN9 can be held fora long time.

The circuit configuration of the circuit 100D1 may be modified to thecircuit configuration of a circuit 100D2 in FIG. 9B. The circuit 100D2is different from the circuit 100D1 in that the second gate of thetransistor MN5 is electrically connected to the wiring BG2 and thesecond gate of the transistor MN8 is electrically connected to thewiring BG2, for example.

When the ground potential, a low-level potential, or a negativepotential is supplied to the wiring BG2, the transistors MN5 and MN8 canbe normally off also in the circuit 100D2 as in the circuit 100D1.

The circuit configuration of the circuit 100D1 may be modified to thecircuit configuration of a circuit 100D3 in FIG. 10A, instead of thecircuit 100D2. The circuit 100D3 is different from the circuit 100D1 inthat the second gate of the transistor MN5 is electrically connected tothe wiring BG3 and the second gate of the transistor MN8 is electricallyconnected to the wiring BG3, for example.

For the wiring BG3, the description of the wiring BG3 used in thecircuit 100A4 described in Configuration example 1 is referred to.

When the ground potential, a low-level potential, or a negativepotential is supplied to the wiring BG3, the transistors MN5 and MN8 canbe normally off also in the circuit 100D3 as in the circuit 100D1.

The circuit configuration of the circuit 100D1 may be modified to thecircuit configuration of a circuit 100D4 in FIG. 10B. The circuit 100D4is different from the circuit 100D1, for example, in that the secondgate of each of the transistors MN5 and MN8 is electrically connected tothe first gate of the transistor MN2, the first terminal of thecapacitor C1, the first terminal of the transistor MN4, the first gateof the transistor MN7, and the first gate of the transistor MN10.

In the circuit 100D4 in FIG. 10B, for example, when a low-levelpotential is input to the terminal IT and a high-level potential isinput to the terminal CLK2, the transistor MN1 is turned off, thetransistor MN3 is turned on, and the transistor MN4 is turned off; thus,the potentials of the first gate of the transistor MN2, the firstterminal of the capacitor C1, the first terminal of the transistor MN4,the first gate of the transistor MN7, and the first gate of thetransistor MN10 become high. At this time, each of the transistors MN5and MN8 becomes normally on and is brought into an on state.Furthermore, the potential of the first gate of the transistor MN2becomes a high-level potential and thus the transistor MN2 is turned on,and the potential of the first gate of each of the transistors MN6 andMN9 becomes a low-level potential.

For example, when a high-level potential is input to the terminal IT anda low-level potential is input to the terminal CLK2, the transistor MN3is turned off and the transistor MN4 is turned on; thus, the potentialsof the first gate of the transistor MN2, the first terminal of thecapacitor C1, the first terminal of the transistor MN4, the first gateof the transistor MN7, and the first gate of the transistor MN10 becomelow. At this time, each of the transistors MN5 and MN8 becomes normallyon and is brought into an on state. At this time, since the transistorMN1 is on, the transistor MN2 is off, the transistor MN5 is on, and thetransistor MN8 is on, the potential of the first gate of each of thetransistors MN6 and MN8 becomes high. Then, when the potential of thefirst terminal of each of the transistors MN5 and MN8 (the node N1)reaches a certain level, the transistors MN5 and MN8 are turned off.

As described above, with the configuration of the circuit 100D4, thetransistors MN5 and MN8 can be temporarily normally-off at a necessarytiming during the operation of the circuit 100D4. Thus, the potential ofthe first gate of each of the transistors MN6 and MN9 can be held for along period.

Therefore, when the circuit 100D1 in FIG. 9A, the circuit 100D2 in FIG.9B, the circuit 100D3 in FIG. 10A, or the circuit 100D4 in FIG. 10B isused as each of the circuits 100[1] to 100[m] in the driver circuit GDin FIG. 3A or FIG. 3B, the driver circuit GD can operate more stablythan when the circuit 101 in FIG. 5 is used.

Configuration Example 5

FIG. 11 illustrates a configuration example of a circuit, which is asemiconductor device of one embodiment of the present invention anddifferent from the circuits described in Configuration examples 1 to 4,applicable to the circuits 100[1] to 100[m] in each of the drivercircuits GD in FIGS. 3A and 3B.

A circuit 100E has a configuration modified from that of the circuit100A1 in FIG. 1A, and is different from the circuit 100A1 in that thesecond gate of the transistor MN5 is electrically connected to the firstterminal of the transistor MN5 and the second gate of the transistor MN8is electrically connected to the first terminal of the transistor MN8.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100E, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100E may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 100E.

<<Comparison 5>>

Here, differences in configuration and operation between the circuit100E in FIG. 11 and the above-described circuit 101 in FIG. 5 aredescribed as in Configuration examples 1 to 4.

As described above, in the circuit 100E in FIG. 11, the second gate ofthe transistor MN5 is electrically connected to the first terminal ofthe transistor MN5 and the second gate of the transistor MN8 iselectrically connected to the first terminal of the transistor MN8. Inthe circuit 101 in FIG. 5, the second gate of the transistor MN5 iselectrically connected to the first gate of the transistor MN5 and thesecond gate of the transistor MN8 is electrically connected to the firstgate of the transistor MN8.

The case where the circuit 101 operates as in the operation example ofthe timing chart in FIG. 4 is considered. In a period in which ahigh-level potential is input to the terminal IT (in a period from TimeT4 to Time T5), the potential of the node N1 (an electrical connectionpoint between the second terminal of the transistor MN1, the firstterminal of the transistor MN2, the first terminal of the transistorMN5, and the first terminal of the transistor MN8) is increased and inthe case where the gate-source voltages of the transistors MN5 and MN8become lower than the respective threshold voltages, the transistors MN5and MN8 are turned off.

At this time, when the configuration of the circuit 101 is modified tothat of the circuit 100E, the potential of the second gate of each ofthe transistors MN5 and MN8 becomes the potential of the node N1. Thatis, the potential of the second gate of each of the transistors MN5 andMN8 (the node N1) in the circuit 100E is lower than that in the aboveoperation example, and thus the threshold voltage of each of thetransistors MN5 and MN8 in the circuit 100E is higher than that in thecircuit 101. Accordingly, with the configuration modification of thecircuit 101 to the circuit 100E, when a high-level potential is input tothe terminal IT so that the potential of the node N1 (in the period fromTime T4 to Time T5) increases, each of the transistors MN5 and MN8 islikely to be turned off and thus the amount of the off-state current ofeach of the transistors MN5 and MN8 can be small. That is, the potentialof the first gate of each of the transistors MN6 and MN9 can be held fora long time.

Accordingly, when the circuit 100E in FIG. 11 is employed for each ofthe circuits 100[1] to 100[m] in the driver circuit GD in FIG. 3A orFIG. 3B, the driver circuit GD can operate more stably than that in thecase where the circuit 101 in FIG. 5 is employed.

Configuration Example 6

FIG. 12A illustrates a configuration example of a circuit, which is asemiconductor device of one embodiment of the present invention anddifferent from the circuits described in Configuration examples 1 to 5,applicable to the circuits 100[1] to 100[m] in each of the drivercircuits GD in FIGS. 3A and 3B.

The circuit configuration of a circuit 100F1 is modified from that ofthe circuit 100A1 in FIG. 1A, and different from the circuit 100A1 inincluding a transistor MN11 and a capacitor C5. Specifically, in thecircuit 100F1, a first terminal of the transistor MN11 is electricallyconnected to the terminal IT; a second terminal of the transistor MN11is electrically connected to the first gate of the transistor MN1, thesecond gate of the transistor MN1, and a first terminal of the capacitorC5; and a first gate of the transistor MN11 is electrically connected toa second gate of the transistor MN11 and a wiring VDE5. A secondterminal of the capacitor C5 is electrically connected to the secondterminal of the transistor MN1, the first terminal of the transistorMN2, the first terminal of the transistor MN5, and the first terminal ofthe transistor MN8.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100F1, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100F1 may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

Like the wirings VDE1 to VDE4, the wiring VDE5 functions as a wiringsupplying a constant potential, for example. The constant voltage can bea high-level potential, for example. In the case where the constantpotential supplied by the wiring VDE5 is the same as a potentialsupplied by at least one of the wirings VDE1 to VDE4, the wiring VDE5and the wiring may be a single wiring.

The wiring VDE5 may supply a variable potential, not a constantpotential.

The operation example of the circuit 100A1 described above can beapplied to the operation of the circuit 100F1.

<<Comparison 6>>

Here, differences in configuration and operation between the circuit100F1 in FIG. 12A and the above-described circuit 101 in FIG. 5 aredescribed as in Configuration examples 1 to 5.

As described above, the circuit 100F1 in FIG. 12A includes thetransistor MN11 and the capacitor C5. In contrast, the circuit 101 inFIG. 5 does not include the transistor MN11 and the capacitor C5.

The case where the circuit 101 operates as in the operation example ofthe timing chart in FIG. 4 is considered. In a period in which ahigh-level potential is input to the terminal IT (in the period fromTime T4 to Time T5), the potential of the node N1 (an electricalconnection point between the second terminal of the transistor MN1, thefirst terminal of the transistor MN2, the first terminal of thetransistor MN5, and the first terminal of the transistor MN8) isincreased and in the case where the gate-source voltages of thetransistors MN5 and MN8 become lower than the respective thresholdvoltages, the transistors MN5 and MN8 are turned off.

The case where the circuit 100F1 operates as in the operation example ofthe timing chart in FIG. 4 is considered. In a period in which ahigh-level potential is input to the terminal IT (in the period fromTime T4 to Time T5), the potentials of the first terminal of thetransistor MN11 and the second terminal of the transistor MN11 (thefirst gate of the transistor MN1) become high. When the gate-sourcevoltage of the transistor MN11 becomes lower than the threshold voltageof the transistor MN11, the transistor MN11 is turned off. In addition,the gate-source voltage of the transistor MN1 becomes higher than thethreshold voltage of the transistor MN1, whereby the transistor MN1 isturned on and the potential of the node N1 becomes high. At this time,since the transistor MN11 is off, bootstrap by the capacitor C5 furtherincreases the potential of the first gate of the transistor MN1. Thus,the gate-source voltage of the transistor MN1 is sufficiently higherthan the threshold voltage, and the potential of the node N1 isincreased up to the potential supplied by the wiring VDE1.

That is, the amount in increase in the potential of the node N1 bysupplying a high-level potential to the terminal IT in the circuit 100F1in FIG. 12A is larger than that in the circuit 101 in FIG. 5.

Thus, the potential of the first terminal of each of the transistors MN5and MN8 in the circuit 100F1 increases up to the potential supplied bythe wiring VDE1, whereby a difference between the gate-source voltageand the threshold voltage of the transistors MN5 and MN8 in the offstate is larger than that in the circuit 101. Thus, the amount ofoff-state current of each of the transistors MN5 and MN8 in the circuit100F1 can be smaller than the amount of off-state current of thetransistors MN5 and MN8 in the circuit 101. That is, the potential ofthe first gate of each of the transistors MN6 and MN9 can be held for along time.

The circuit configuration of the circuit 100F1 may be modified to thecircuit configuration of a circuit 100F2 in FIG. 12B. The circuit 100F2is different from the circuit 100F1 in the connection of the transistorMN11 and including a transistor MN12.

Specifically, the first gate of the transistor MN11 is not electricallyconnected to the wiring VDE5 and is electrically connected to the secondgate of the transistor MN11. A first terminal of the transistor MN12 iselectrically connected to the first gate and the second gate of thetransistor MN1 and the second terminal of the transistor MN11; a secondterminal of the transistor MN12 is electrically connected to theterminal IT, the first terminal of the transistor MN11, and the firstgate of the transistor MN4; a first gate of the transistor MN12 iselectrically connected to the terminal CLK1; and a second gate of thetransistor MN12 is electrically connected to the wiring BG1.

When a low-level potential is input to the terminal CLK1 and thetransistor MN12 is turned off, by an input of a high-level potential tothe terminal IT, the potential of the first gate of the transistor MN1becomes a potential obtained by subtracting the threshold voltage of thetransistor MN11 from the high-level potential supplied to the terminalIT. Since the transistor MN11 is diode-connected, when the potential ofthe second terminal of the transistor MN11 becomes a potential obtainedby subtracting the threshold voltage of the transistor MN11 from thehigh-level potential supplied to the terminal IT, the transistor MN11 isturned off. For the following operations in which the transistor MN1 isturned on and the potential of the node N1 is increased due to bootstrapby the capacitor C5, the description of the operation of the circuit100F1 is referred to.

In the case where the potential of the first gate of the transistor MN1is set to be a low-level potential, for example, a low-level potentialis input to the terminal IT and a high-level potential is input to theterminal CLK1. This corresponds to operations in a period from Time T5to Time T9 in the operation example of the circuit 100A in Embodiment 1.With this operation, the transistor MN12 is turned on and electricalcontinuity is established between the terminal IT and the first gate ofthe transistor MN1, whereby the potential of the first gate of thetransistor MN1 can be set to be a low-level potential. At this time, thegate-source voltage of the transistor MN1 is lower than the thresholdvoltage of the transistor MN1; thus, the transistor MN1 is turned off,the node N1 is brought into floating, and the capacitor C5 holds thehigh-level potential supplied by the wiring VDE1.

In the configuration of the circuit 100F2, as in the circuit 100F1, theamount of off-state current of each of the transistors MN5 and MN8 inthe circuit 100F2 can be smaller than that in the circuit 101, and thusthe potential of the first gate of each of the transistors MN6 and MN9can be held for a long time.

Accordingly, when the circuit 100F1 in FIG. 12A or the circuit 100F2 inFIG. 12B is employed for each of the circuits 100[1] to 100[m] in thedriver circuit GD in FIG. 3A or FIG. 3B, the driver circuit GD canoperate more stably than that in the case where the circuit 101 in FIG.5 is employed.

Configuration Example 7

FIG. 13 illustrates a configuration example of a circuit, which is asemiconductor device of one embodiment of the present invention anddifferent from the circuits described in Configuration examples 1 to 6,applicable to the circuits 100[1] to 100[m] in each of the drivercircuits GD in FIGS. 3A and 3B.

The circuit configuration of a circuit 100G is modified from that of thecircuit 100A1 in FIG. 1A, and different from the circuit 100A1 in thatthe transistors MN5 and MN8 are not provided.

Although each of the second gates of the transistors MN7 and MN10 iselectrically connected to the wiring BG1 in the circuit 100G, theconnection destination of the second gates of the transistors MN7 andMN10 in the circuit 100G may be changed to match any one of theconfigurations of the circuit 100A1 in FIG. 1A, the circuit 100A3 inFIG. 6A, and the circuit 100A4 in FIG. 6B.

The configuration without the transistor MN5 can reduce the parasiticcapacitance in the periphery of the first gate of the transistor MN6.Similarly, the configuration without the transistor MN8 can reduce theparasitic capacitance in the periphery of the first gate of thetransistor MN8.

The circuit 100G is preferably configured such that the parasiticcapacitance in the periphery of the first gates of the transistors MN6and MN9 (the node N1) is as small as possible. Specifically, forexample, a wiring that electrically connects the first gates of thetransistors MN6 and MN9 to the second terminal of the transistor MN1 andthe first terminal of the transistor MN2 is preferably short.

When the parasitic capacitance in the periphery of the first gates ofthe transistors MN6 and MN9 (the node N1) is made small, the amount ofincrease in the potential of the first gate of each of the transistorsMN6 and MN9 caused by bootstrap by the capacitors C2 and C3 can be evenlarger. Therefore, the transistors MN6 and MN9 can have high drivingcapability, the potential from the terminal CLK1 is output to theterminal OT while decreasing very little, and the potential from theterminal PWC is output to the terminal GT while decreasing very little.

Accordingly, when the circuit 100G in FIG. 13 is employed for each ofthe circuits 100[1] to 100[m] in the driver circuit GD in FIG. 3A orFIG. 3B, the driver circuit GD can operate more stably than that in thecase where the circuit 101 in FIG. 5 is employed.

Configuration Example 8

Each of a circuit 100AA1 in FIG. 14A, a circuit 100AA2 in FIG. 14B, acircuit 100AA3 in FIG. 15A, a circuit 100AA4 in FIG. 15B, and a circuit100AA5 in FIG. 16 is a modification example of the circuit 100A1described in Configuration example 1, and can be used as the circuits100[1] to 100[m], which are semiconductor devices of one embodiment ofthe present invention, in each of the driver circuits GD in FIGS. 3A and3B.

The circuit 100AA1 in FIG. 14A has a configuration in which each of thetransistors MN2 and MN4 in the circuit 100A1 in FIG. 1A has a multi-gatestructure, for example.

Specifically, for example, the transistor MN2 includes a transistor MN2a and a transistor MN2 b, first terminals of the transistors MN2 a andMN2 b are electrically connected to each other, first gates of thetransistors MN2 a and MN2 b are electrically connected to each other,and second gates of the transistors MN2 a and MN2 b are electricallyconnected to each other. Thus, the first gates of the transistors MN2 aand MN2 b function as the first gate of the transistor MN2, and thesecond gates of the transistors MN2 a and MN2 b function as the secondgate of the transistor MN2. A second terminal of the transistor MN2 acorresponds to the first terminal of the transistor MN2, and a secondterminal of the transistor MN2 b corresponds to the second terminal ofthe transistor MN2.

For example, the transistor MN4 includes a transistor MN4 a and atransistor MN4 b, first terminals of the transistors MN4 a and MN4 b areelectrically connected to each other, first gates of the transistors MN4a and MN4 b are electrically connected to each other, and second gatesof the transistors MN4 a and MN4 b are electrically connected to eachother. Thus, the first gates of the transistors MN4 a and MN4 b functionas the first gate of the transistor MN4, and the second gates of thetransistors MN4 a and MN4 b function as the second gate of thetransistor MN4. A second terminal of the transistor MN4 a corresponds tothe first terminal of the transistor MN4, and a second terminal of thetransistor MN4 b corresponds to the second terminal of the transistorMN4.

The use of a transistor with a multi-gate structure as the transistorMN2 can reduce the off-state current flowing between the first terminaland the second terminal of the transistor MN2 when the transistor MN2 isoff. Similarly, the use of a transistor with a multi-gate structure asthe transistor MN4 can reduce the off-state current flowing between thefirst terminal and the second terminal of the transistor MN4 when thetransistor MN4 is off.

Although each of the transistors MN2 and MN4 in the circuit 100AA1 inFIG. 14A has a multi-gate structure including two transistors, each ofthe transistors MN2 and MN4 may have a multi-gate structure includingthree or more transistors.

In the circuit 100AA1 in FIG. 14A, each of the transistors MN2 and MN4has a multi-gate structure; however, the circuit 100AA1 may have aconfiguration in which one or more selected from the transistors MN1 toMN10 have a multi-gate structure.

A multi-gate structure can be applied to not only the transistors MN2and MN4 in the circuit 100AA1 in FIG. 14A but also transistors in theother drawings in this specification.

Note that the circuit 100AA1 has a configuration in which the secondgate of the transistor MN7 is electrically connected to the secondterminal of the transistor MN7 and the second gate of the transistorMN10 is electrically connected to the second terminal of the transistorMN10; however, each of the second gates of the transistors MN7 and MN10in the circuit 100AA1 may be electrically connected to the wiring BG1.Alternatively, the connection destination of each of the second gates ofthe transistors MN7 and MN10 in the circuit 100AA1 may be changed tomatch the circuit 100A3 in FIG. 6A or the circuit 100A4 in FIG. 6B.

The circuit 100AA2 in FIG. 14B has a configuration in which theconnection destinations of the first gates and the second gates of thetransistors MN2, MN4, MN7, and MN10 in the circuit 100A1 in FIG. 1A areexchanged, as an example.

Specifically, in the circuit 100AA2 in FIG. 14B, for example, the firstgate of the transistor MN2 is electrically connected to the wiring BG1,and the second gate of the transistor MN2 is electrically connected tothe first terminal of the capacitor C1, the second terminal of thetransistor MN3, the first terminal of the transistor MN4, the secondgate of the transistor MN7, and the second gate of the transistor MN10.For example, the first gate of the transistor MN4 is electricallyconnected to the wiring BG2. For example, the first gate of thetransistor MN7 is electrically connected to the second terminal of thetransistor MN7 and the wiring VSE4. For example, the first gate of thetransistor MN10 is electrically connected to the second terminal of thetransistor MN10 and the wiring VSE5.

Even when the connection destinations of the first gates and the secondgates of the transistors MN2, MN4, MN7, and MN10 are exchanged asillustrated in the circuit 100AA2 in FIG. 14B, the circuit 100AA2 cansometimes perform a desired operation as well as the circuit 100A1 does.

Although in the circuit 100AA2 in FIG. 14B, the connection destinationsof the first gates and the second gates of the transistors MN2, MN4,MN7, and MN10 are exchanged, connection destinations of first gates andsecond gates of transistors other than the transistors MN2, MN4, MN7,and MN10 in the circuit 100AA2 may be exchanged.

Not only for the transistors MN2, MN4, MN7, and MN10 in the circuit100AA2 in FIG. 14B, but also for transistors in the other drawings inthis specification, the connection destinations of a first gate and asecond gate may be exchanged.

Note that the circuit 100AA2 has a configuration in which the secondgate of the transistor MN7 is electrically connected to the secondterminal of the transistor MN7 and the second gate of the transistorMN10 is electrically connected to the second terminal of the transistorMN10; however, each of the second gates of the transistors MN7 and MN10in the circuit 100AA2 may be electrically connected to the wiring BG1.Alternatively, the connection destination of each of the second gates ofthe transistors MN7 and MN10 in the circuit 100AA2 may be changed tomatch the circuit 100A3 in FIG. 6A or the circuit 100A4 in FIG. 6B.

The circuit 100AA3 in FIG. 15A has a configuration in which each of thetransistors MN1, MN3, MN5, MN6, MN8, and MN9 does not have a secondgate, as an example.

A transistor whose first gate and second gate are electrically connectedto each other can have a high on-state current. On the other hand, inthe case where a transistor does not need to have a high on-statecurrent, a second gate is not necessarily provided in the transistor.Specifically, for example, in the circuit 100A1 in FIG. 1A, in the casewhere the transistors MN1, MN3, MN5, MN6, MN8, and MN9 have sufficientlyhigh on-state currents, the transistors do not necessarily have secondgates as illustrated in the circuit 100AA3 in FIG. 15A.

Note that the circuit 100AA3 has a configuration in which the secondgate of the transistor MN7 is electrically connected to the secondterminal of the transistor MN7 and the second gate of the transistorMN10 is electrically connected to the second terminal of the transistorMN10; however, each of the second gates of the transistors MN7 and MN10in the circuit 100AA3 may be electrically connected to the wiring BG1.Alternatively, the connection destination of each of the second gates ofthe transistors MN7 and MN10 in the circuit 100AA3 may be changed tomatch the circuit 100A3 in FIG. 6A or the circuit 100A4 in FIG. 6B.

The circuit 100AA4 in FIG. 15B has a configuration in which then-channel transistors MN1 to MN10 in the circuit 100A1 in FIG. 1A arechanged to transistors MP1 to MP10, which are p-channel transistors, asan example.

For example, the transistors MP1 to MP10 can be p-channel transistorswith a silicon-on-insulator (SOI) structure.

Specifically, a first terminal of the transistor MP1 is electricallyconnected to a wiring VSE11, a second terminal of the transistor MP1 iselectrically connected to a first terminal of the transistor MP2, afirst terminal of the transistor MP5, and a first terminal of thetransistor MP8, and a first gate of the transistor MP1 is electricallyconnected to a second gate of the transistor MP1, the terminal IT, and afirst gate of the transistor MP4.

A first terminal of the transistor MP3 is electrically connected to awiring VSE12, a second terminal of the transistor MP3 is electricallyconnected to a first gate of the transistor MP2, a first terminal of thecapacitor C1, a first terminal of the transistor MP4, a first gate ofthe transistor MP7, and a first gate of the transistor MP10, and a firstgate of the transistor MP3 is electrically connected to a second gate ofthe transistor MP3 and the terminal CLK2.

A second terminal of the transistor MP5 is electrically connected to afirst gate of the transistor MP6, a second gate of the transistor MP6,and a first terminal of the capacitor C2, and a first gate of thetransistor MP5 is electrically connected to a second gate of thetransistor MP5 and a wiring VSE13. A first terminal of the transistorMP6 is electrically connected to the terminal CLK1, a second terminal ofthe transistor MP6 is electrically connected to a second terminal of thecapacitor C2, a first terminal of the transistor MP7, and the terminalOT.

A second terminal of the transistor MP8 is electrically connected to afirst gate of the transistor MP9, a second gate of the transistor MP9,and a first terminal of the capacitor C3, and a first gate of thetransistor MP8 is electrically connected to a second gate of thetransistor MP8 and a wiring VSE14. A first terminal of the transistorMP9 is electrically connected to the terminal PWC, a second terminal ofthe transistor MP9 is electrically connected to a second terminal of thecapacitor C3, a first terminal of the transistor MP10, and the terminalGT.

A second terminal of the transistor MP2 is electrically connected to awiring VDE11, and a second gate of the transistor MP2 is electricallyconnected to a wiring BG11. A second terminal of the capacitor C1 iselectrically connected to a wiring VDE12. A second terminal of thetransistor MP4 is electrically connected to a wiring VDE13, and a secondgate of the transistor MP4 is electrically connected to a wiring BG12. Asecond terminal of the transistor MP7 is electrically connected to asecond gate of the transistor MP7 and a wiring VDE14. A second terminalof the transistor MP10 is electrically connected to a second gate of thetransistor MP10 and a wiring VDE15.

Like the wirings VDE1 to VDE4 described in Configuration example 1, eachof the wirings VDE11 to VDE15 functions as a wiring supplying a constantpotential, for example. The constant voltage can be a high-levelpotential, for example. Note that the wirings VDE11 to VDE15 may supplythe same constant potential or different constant potentials.Alternatively, two or more of the wirings VDE11 to VDE15 may supply thesame constant potential, and the other wiring(s) may supply a potentialdifferent from the constant potential. Furthermore, the two or more ofthe wirings VDE11 to VDE15 which supply the same constant potential maybe a single wiring. For example, in the case where the wiring VDE11 andwiring VDE12 supply the same constant potential, the wiring VDE11 andthe wiring VDE12 may be a single wiring.

One or more of the wirings VDE1 to VDE15 may supply a variablepotential, not a constant potential.

Like the wirings VSE1 to VSE5 described in Configuration example 1, eachof the wirings VSE11 to VSE14 functions as a wiring supplying a constantpotential, for example. The constant voltage can be a low-levelpotential or the ground potential, for example. Note that the wiringsVSE11 to VSE14 may supply the same constant potential or differentconstant potentials. Alternatively, two or more of the wirings VSE11 toVSE14 may supply the same constant potential, and the other wiring(s)may supply a potential different from the constant potential.Furthermore, the two or more of the wirings VSE11 to VSE14 which supplythe same constant potential may be a single wiring. For example, in thecase where the wiring VSE11 and wiring VSE12 supply the same constantpotential, the wiring VSE11 and the wiring VSE12 may be a single wiring.

One or more of the wirings VSE11 to VSE14 may supply a variablepotential, not a constant potential.

Like the wirings BG1 and BG2 described in Configuration example 1, eachof the wirings BG11 and BG12 functions as a wiring supplying a constantpotential, for example. The constant voltage can be a high-levelpotential, for example. Note that the wirings BG11 and BG12 may supplythe same constant potential or different constant potentials. In thecase where the wiring BG11 and wiring BG12 supply the same constantpotential, the wiring BG11 and the wiring BG12 may be a single wiring.

One or both of the wirings BG11 and BG12 may supply a variablepotential, not a constant potential.

As illustrated in the circuit 100AA4 in FIG. 15B, the transistors MN1 toMN10 in the circuit 100A1 are changed to the transistors MP1 to MP10,the wirings VDE1 to VDE4 are changed to the wirings VSE11 to VSE14, andthe wirings VSE1 to VSE5 are changed to the wirings VDE11 to VDE15,whereby the circuit 100AA4 can perform a desired operation as well asthe circuit 100A1 in some cases.

Note that the circuit 100AA4 in FIG. 15B has a configuration in whichthe transistors MN1 to MN10 in the circuit 100A1 in FIG. 1A are changedto the transistors MP1 to MP10; similarly, the polarities (n-channel andp-channel) of transistors included in circuits illustrated in the otherdrawings in this specification may be changed. In the case where thepolarities of the transistors are changed, the levels of constantpotentials supplied by the wirings VDE1 to VDE4, the wirings VSE1 toVSE5, the wirings BG1 and BG2, and the like may be changed.

Note that the circuit 100AA4 has a configuration in which the secondgate of the transistor MP7 is electrically connected to the secondterminal of the transistor MP7 and the second gate of the transistorMP10 is electrically connected to the second terminal of the transistorMP10; however, each of the second gates of the transistors MP7 and MP10in the circuit 100AA4 may be electrically connected to the wiring BG11.Alternatively, the second gate of each of the transistors MP7 and MP10in the circuit 100AA4 may be electrically connected to the wiring BG12,as in the circuit 100A3 in FIG. 6A. Alternatively, the second gate ofeach of the transistors MP7 and MP10 in the circuit 100AA4 may beelectrically connected to an additional wiring, as in the circuit 100A4in FIG. 6B. Note that the additional wiring can supply a constantpotential, such as a high-level potential, or a variable potential.

The circuit 100AA5 in FIG. 16 has a configuration without including thetransistors MN8 to MN10, the capacitor C3, and the terminal GT in thecircuit 100A1 in FIG. 1A, for example.

The circuit 100AA5 in FIG. 16 is configured to output a signal only tothe terminal OT, not to the terminal GT because of not including theterminal GT. For example, when the circuit 100A1 in FIG. 1A and thecircuit 100AA5 in FIG. 16 are combined to form a shift register in FIG.3A or FIG. 3B, the shift register can have a configuration in which asignal is not output from the terminal GT of the circuit 100corresponding to the circuit 100AA5. Note that the shift register issometimes used for adjusting timings of a clock signal input to theshift register and signals output from the terminal OT, the terminal GT,and the like. The timings can be adjusted in the design phase of theshift register.

Although the circuit 100AA5 in FIG. 16 has a configuration withoutincluding the transistors MN8 to MN10, the capacitor C3, and theterminal GT in the circuit 100A1 in FIG. 1A, the circuit 100AA5 may havea configuration without including the transistors MN5 to MN7, thecapacitor C2, and the terminal OT (not illustrated).

With use of the circuit 100A1 or the like described in Configurationexamples 1 to 8 for the shift register in the driver circuit GD in FIG.3A or FIG. 3B, the shift register can be formed with single-polaritycircuits with only n-channel transistors (in the case of the circuit100AA4 in FIG. 15B, a single-polarity circuit with only p-channeltransistors). In particular, when the circuit configuration of any ofConfiguration examples 1 to 8, or a circuit configuration formed bycombining two or more of the circuits of Configuration examples 1 to 8is used for the shift register, a circuit with stable operation isachieved.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 2

In this embodiment, a specific circuit configuration of the circuit100A1 described in Embodiment 1 will be described.

FIG. 17 is a layout view (a plan view) illustrating an example of acircuit configuration of the circuit 100A1 in FIG. 1A. The circuit 100A1in FIG. 17 includes a conductor GEM, a conductor BGM, a conductor PLG, aconductor SDM, and a semiconductor SMC, for example. Note that aninsulator included in the circuit 100A1 is not illustrated in FIG. 17.

The conductor BGM is positioned below the semiconductor SMC, forexample. The semiconductor SMC is positioned below the conductor GEM,for example. The conductor GEM is positioned below the conductor SDM,for example. That is, in the circuit 100A1 in FIG. 17, the conductorBGM, the semiconductor SMC, the conductor GEM, and the conductor SDM areformed in this order from the bottom.

Part of the conductor BGM functions as second gates of the transistorsMN1 to MN10, for example. Part of the conductor GEM functions as firstgates of the transistors MN1 to MN10, for example.

The conductor BGM, the semiconductor SMC, the conductor GEM, and theconductor SDM can be formed through photolithography, for example.Specifically, for example, in the case where the conductor BGM isformed, a conductive material to be the conductor BGM is deposited by asputtering method, a chemical vapor deposition (CVD) method, a pulsedlaser deposition (PLD) method, or an atomic layer deposition (ALD)method, and then a desired pattern is formed through photolithography.The semiconductor SMC, the conductor GEM, and the conductor SDM can alsobe formed in a manner similar to that of the conductor BGM.

An insulator may be provided between the conductor BGM and thesemiconductor SMC, between the semiconductor SMC and the conductor GEM,and between the conductor GEM and the conductor SDM. In particular, theinsulator provided between the conductor BGM and the semiconductor SMCfunctions as a first gate insulating film (referred to as a back gateinsulating film in some cases), the insulator provided between thesemiconductor SMC and the conductor GEM functions as a second gateinsulating film (referred to as a gate insulating film or a front gateinsulating film in some cases).

The conductor PLG is positioned between the conductor BGM and theconductor GEM, between the conductor BGM and the conductor SDM, betweenthe conductor GEM and the conductor SDM, or between the semiconductorSMC and the conductor SDM, and functions as a wiring or a plugelectrically connect them. The conductor PLG is formed, for example, insuch a manner that an opening is formed in the insulator, and theopening is filled with a conductive material to be the conductor PLG.Note that after the formation of the conductor PLG, planarization usingchemical mechanical polishing or the like may be performed to align thelevels of film surfaces of the conductor PLG and peripheral insulators.

Each of the transistors MN1 to MN10 included in the circuit 100A1 inFIG. 17 includes, for example, part of the conductor BGM, part of thesemiconductor SMC, part of the conductor GEM, and part of the insulator.In other words, materials such as part of the conductor BGM, part of thesemiconductor SMC, part of the conductor GEM, and part of the insulatorform the transistors MN1 to MN10.

The capacitor C1 included in the circuit 100A1 in FIG. 17 includes partof the conductor BGM and part of the conductor GEM. Each of thecapacitors C2 and C3 included in the circuit 100A1 in FIG. 17 includespart of the conductor BGM and part of the conductor SDM. Note that aninsulator with high dielectric constant is preferably provided betweenthe conductor BGM and the conductor GEM which are included in thecapacitor C1. Similarly, an insulator with high dielectric constant ispreferably provided between the conductor BGM and the conductor SDMwhich are included in the capacitors C2 and C3.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 3

In this embodiment, configuration examples of a display apparatuscombining the semiconductor device of one embodiment of the presentinvention with a display portion will be described.

FIG. 18 is a schematic cross-sectional view of a display apparatus ofone embodiment of the present invention. A display apparatus 10 includesa pixel layer PXAL, a wiring layer LINL, and a circuit layer SICL.

The wiring layer LINL is provided over the circuit layer SICL, and thepixel layer PXAL is provided over the wiring layer LINL.

The circuit layer SICL includes a substrate BS, a driver circuit regionDRV, and a functional circuit region MFNC.

As the substrate BS, a semiconductor substrate (e.g., a single crystalsubstrate) formed of silicon or germanium can be used, for example.Besides such a semiconductor substrate, any of the following can be usedas the substrate BS: a silicon on insulator (SOI) substrate, a glasssubstrate, a quartz substrate, a plastic substrate, a sapphire glasssubstrate, a metal substrate, a stainless steel substrate, a substrateincluding stainless steel foil, a tungsten substrate, a substrateincluding tungsten foil, a flexible substrate, an attachment film, paperincluding a fibrous material, and a base film. Examples of the glasssubstrate include a barium borosilicate glass substrate, analuminoborosilicate glass substrate, and a soda lime glass substrate.Examples of a material for the flexible substrate, the attachment film,the base film, or the like include plastic typified by polyethyleneterephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone(PES), and polytetrafluoroethylene (PTFE). Another example is asynthetic resin such as an acrylic resin. Other examples arepolypropylene, polyester, polyvinyl fluoride, and polyvinyl chloride.Other examples are polyamide, polyimide, aramid, an epoxy resin, aninorganic film formed by evaporation, and paper. Note that in the casewhere the manufacturing process of the display apparatus 10 involvesheat treatment, a highly heat-resistant material is preferably used forthe substrate BS.

For example, in the case where a semiconductor substrate includingsilicon as a material is used as the substrate BS, transistors includedin the driver circuit region DRV and the functional circuit region MFNCcan be Si transistors.

For example, in the case where a glass substrate is used as thesubstrate BS, transistors included in the driver circuit region DRV andthe functional circuit region MFNC can be OS transistors.

The driver circuit region DRV and the functional circuit region MFNC areprovided over the substrate BS.

The driver circuit region DRV includes, for example, a driver circuitfor driving a pixel included in the pixel layer PXAL to be describedlater. A specific configuration example of the driver circuit region DRVwill be described later.

The functional circuit region MFNC includes a graphics processing unit(GPU), as an example. In the case where the display apparatus 10includes a touch panel, the functional circuit region MFNC may include asensor controller for controlling a touch sensor included in the touchpanel. In the case where a light-emitting device using an EL material isused as a display element of the display apparatus 10, an EL correctioncircuit may be included in the functional circuit region MFNC. In thecase where a liquid crystal element is used as the display element ofthe display apparatus 10, a gamma correction circuit may be included inthe functional circuit region MFNC.

The wiring layer LINL is provided over the circuit layer SICL.

The wiring layer LINL includes wirings. The wiring included in thewiring layer LINL functions as, for example, a wiring that electricallyconnects a driver circuit included in the driver circuit region DRVprovided below the wiring layer LINL and a circuit included in the pixellayer PXAL provided above the wiring layer LINL.

The pixel layer PXAL includes, for example, a plurality of pixels. Theplurality of pixels may be arranged in a matrix in the pixel layer PXAL.

Each of the plurality of pixels can express one color or a plurality ofcolors. In particular, the plurality of colors can be, for example,three colors of red (R), green (G), and blue (B). Alternatively, theplurality of colors may be two or more colors selected from, forexample, red (R), green (G), blue (B), cyan, magenta, yellow, and white.Note that in the case where each of pixels expressing different colorsis called a subpixel and white is expressed by a plurality of subpixelsexpressing different colors, the plurality of subpixels are collectivelycalled a pixel in some cases. In this specification and the like, asubpixel is referred to as a pixel for convenience.

FIG. 19 is a block diagram illustrating a configuration example of thedisplay apparatus 10 illustrated in FIG. 18. The display apparatus 10illustrated in FIG. 19 includes a display portion DIS and a circuitportion SIC, for example. A sensor PDA illustrated in FIG. 19 may beplaced inside or outside the display apparatus 10.

In FIG. 19, the thick solid lines denote a plurality of wirings or buswirings.

In FIG. 19, the display portion DIS includes a plurality of pixelcircuits PX arranged in a matrix, for example. For example, one or moreselected from a liquid crystal display device, a light-emitting deviceincluding an organic EL material, and a light-emitting device includinga light-emitting diode (e.g., a micro LED) can be used in the pixelcircuit PX. Note that in the description in this embodiment, the pixelcircuit PX in the display portion DIS includes a light-emitting deviceincluding an organic EL material. Note that a pixel circuit applicableto the display portion DIS, the pixel circuit PX, and the like will bedescribed in detail in Embodiment 4.

In FIG. 19, the circuit portion SIC includes the driver circuit regionDRV and the functional circuit region MFNC.

The driver circuit region DRV functions as a peripheral circuit fordriving the display portion DIS, for example. Specifically, the drivercircuit region DRV includes, for example, a source driver circuit 11, adigital-to-analog converter circuit 12, a gate driver circuit 13, and alevel shifter 14. Note that the source driver circuit 11 corresponds tothe driver circuit SD in FIG. 2, and the gate driver circuit 13corresponds to the driver circuit GD in FIG. 2, for example.

The functional circuit region MFNC can be provided with, for example, amemory device storing image data to be displayed on the display portionDIS, a decoder for decoding encoded image data, a graphics processingunit (GPU) for processing image data, a power supply circuit, acorrection circuit, and a CPU. In FIG. 19, the functional circuit regionMFNC includes a memory device 21, a GPU (AI accelerator) 22, an ELcorrection circuit 23, a timing controller 24, a CPU (NoffCPU(registered trademark)) 25, a sensor controller 26, and a power supplycircuit 27, for example.

In the display apparatus 10 shown in FIG. 19, for example, a bus wiringBSL is electrically connected to each of the circuits included in thedriver circuit region DRV and each of the circuits included in thefunctional circuit region MFNC.

The source driver circuit 11 has a function of transmitting image datato the pixel circuit PX included in the display portion DIS, forexample. Thus, the source driver circuit 11 is electrically connected tothe pixel circuit PX through a wiring SL.

The digital-to-analog converter circuit 12 has a function of, forexample, converting image data that has been digitally processed by theGPU, correction circuit, or the like described later, into analog data.The image data converted into analog data is transmitted to the displayportion DIS through the source driver circuit 11. Note that thedigital-to-analog converter circuit 12 may be included in the sourcedriver circuit 11, and the image data may be transmitted to the sourcedriver circuit 11, the digital-to-analog converter circuit 12, and thedisplay portion DIS in this order.

The gate driver circuit 13 has a function of selecting the pixel circuitPX to which image data is to be transmitted in the display portion DIS,for example. Thus, the gate driver circuit 13 is electrically connectedto the pixel circuit PX through a wiring GL.

The level shifter 14 has a function of converting the signals to beinput to the source driver circuit 11, the digital-to-analog convertercircuit 12, the gate driver circuit 13, and the like into signals havingappropriate levels, for example.

The memory device 21 has a function of storing image data to bedisplayed on the display portion DIS, for example. Note that the memorydevice 21 can be configured to store the image data as digital data oranalog data.

In the case where the memory device 21 stores image data, the memorydevice 21 is preferably a nonvolatile memory. In this case, the memorydevice 21 can be a NAND memory or the like.

In the case where the memory device 21 stores temporary data generatedin the GPU 22, the EL correction circuit 23, the CPU 25, or the like,the memory device 21 is preferably a volatile memory. In that case, astatic random access memory (SRAM), a dynamic random access memory(DRAM), or the like can be used as the memory device 21.

The GPU 22 has a function of performing processing for plotting theimage data read from the memory device 21 on the display portion DIS,for example. Specifically, the GPU 22 is configured to perform pipelineprocessing in parallel and can thus perform high-speed processing of theimage data to be displayed on the display portion DIS. The GPU 22 canalso function as a decoder for decoding an encoded image.

The functional circuit region MFNC may include a plurality of circuitsthat can increase the display quality of the display portion DIS. Assuch circuits, for example, correction circuits (dimming or toningcircuits) that detect and correct color irregularity of an imagedisplayed on the display portion DIS to optimize the image may beprovided. In the case where the pixel in the display portion DISincludes a light-emitting device including an organic EL material, thefunctional circuit region MFNC may be provided with an EL correctioncircuit. The luminance of light emitted from the light-emitting deviceincluding an organic EL material is determined depending on the amountof current flowing through the light-emitting device. Accordingly, whenthe amount of current flowing through the light-emitting device ischanged due to transistor characteristics or the like, the luminance ofthe light-emitting device is also changed unintentionally. The ELcorrection circuit has a function of measuring the amount of currentflowing through the light-emitting device, comparing it with a desiredamount of current, and adjusting the amount of current flowing throughthe light-emitting device when necessary. Thus, the luminance of lightemitted from the light-emitting device can be set appropriate. Note thatbecause the description in this embodiment is made on the assumptionthat the pixel circuit PX in the display portion DIS includes thelight-emitting device including an organic EL material, the functionalcircuit region MFNC in this example is provided with the EL correctioncircuit 23.

The above-described image correction may be performed using artificialintelligence in the following manner, for example. A current flowing inthe display device included in the pixel (or a voltage applied to thedisplay device) is monitored and acquired, an image displayed on thedisplay portion DIS is acquired with an image sensor or the like, thecurrent (or voltage) and the image are used as input data in anarithmetic operation of the artificial intelligence (e.g., an artificialneural network), and the output result is used to determine whether theimage should be corrected.

Such an arithmetic operation of artificial intelligence can be appliedto not only image correction but also upconversion of image data. Inthis case, upconversion of low-resolution image data in accordance withthe resolution of the display portion DIS allows a high-display-qualityimage to be displayed on the display portion DIS. The arithmeticoperation of artificial intelligence can also be applied todownconversion of image data.

Note that the above-described arithmetic operation of the artificialintelligence can be performed using the GPU 22 included in thefunctional circuit region MFNC. That is, the GPU 22 can be used toperform arithmetic operations for various kinds of correction (e.g., acolor irregularity correction circuit 22 a and an upconversion circuit22 b).

Note that in this specification and the like, a GPU performing anarithmetic operation of the artificial intelligence is referred to as anAI accelerator. That is, the GPU included in the functional circuitregion MFNC may be replaced with an AI accelerator in the description inthis specification and the like.

The timing controller 24 has a function of changing the frame rate atwhich an image is displayed on the display portion DIS. For example, thedisplay apparatus 10 can be driven at a frame rate reduced by the timingcontroller 24 in the case where the display portion DIS displays a stillimage; for another example, the display apparatus 10 can be driven at aframe rate increased by the timing controller 24 in the case where thedisplay portion DIS displays a moving image. In other words, the displayapparatus 10 provided with the timing controller 24 can be driven at aframe rate that is changed depending on which of a still image and amoving image is displayed. Specifically, since the frame rate when thedisplay portion DIS displays a still image can be lowered, the powerconsumption of the display apparatus 10 can be reduced.

The CPU 25 has a function of, for example, performing general-purposeprocessing such as execution of an operating system, control of data,and execution of various arithmetic operations and programs. In thedisplay apparatus 10, the CPU 25 has a function of, for example, givingan instruction for an operation for writing or reading image datato/from the memory device 21, an operation for correcting image data, anoperation for a later-described sensor, or the like. Furthermore, theCPU 25 may have a function of, for example, transmitting a controlsignal to at least one of the circuits included in the functionalcircuit region MFNC, such as the memory device, the GPU, the correctioncircuit, the timing controller, and a high frequency circuit.

The CPU 25 may include a circuit for temporarily backing up data(hereinafter referred to as a backup circuit). The backup circuit ispreferably capable of holding the data even after supply of a powersupply voltage is stopped. For example, in the case where the displayportion DIS displays a still image, the CPU 25 can cease to work untilan image different from the currently displayed still image isdisplayed. Accordingly, dynamic power consumption by the CPU 25 can bereduced in such a manner that the data under processing by the CPU 25 isbacked up in the backup circuit and then supply of a power supplyvoltage to the CPU 25 is stopped to stop the CPU 25. In thisspecification and the like, a CPU including a backup circuit is referredto as an NoffCPU.

The sensor controller 26 has a function of, for example, controlling thesensor PDA. FIG. 19 shows a wiring SNCL as a wiring for electricallyconnecting the sensor PDA to the sensor controller 26.

The sensor PDA is, for example, a touch sensor that can be providedabove, below, or inside the display portion DIS.

Alternatively, the sensor PDA may be an illuminance sensor, for example.Specifically, the illuminance sensor acquiring the intensity of theexternal light with which the display portion DIS is irradiated makes itpossible to change the brightness (luminance) of an image displayed onthe display portion DIS in accordance with the intensity of the externallight. For example, under intense external light, the luminance of animage displayed on the display portion DIS can be increased to enhancethe viewability of the image. By contrast, under weak external light,the luminance of an image displayed on the display portion DIS can belowered to reduce the power consumption.

Further alternatively, the sensor PDA can be an image sensor, forexample. For example, an image or the like acquired with the imagesensor can be displayed on the display portion DIS.

The power supply circuit 27 has a function of, for example, generatingvoltages to be supplied to the circuits included in the driver circuitregion DRV, the circuits included in the functional circuit region MFNC,the pixels included in the display portion DIS, and the like. Note thatthe power supply circuit 27 may have a function of selecting a circuitto which a voltage is to be supplied. For example, the power supplycircuit 27 stops supply of a voltage to the CPU 25, the GPU 22, and thelike during a period in which the display portion DIS displays a stillimage, whereby the power consumption of the whole display apparatus 10can be reduced.

<Configuration Example of Image Sensor>

Here, an image sensor that can be used as the sensor PDA of the displayapparatus 10 is described.

As the image sensor that can be used as the sensor PDA, for example, animaging device IM illustrated in FIG. 20 can be employed.

FIG. 20 is a block diagram illustrating an example of a circuitconfiguration of the imaging device IM. The imaging device IM includesan imaging unit 31, a first driver circuit unit 33, a second drivercircuit unit 34, a reading circuit unit 35, and a control circuit unit36. Note that the first driver circuit unit 33, the second drivercircuit unit 34, the reading circuit unit 35, and the control circuitunit 36 are collectively called a “functional circuit” in some cases.Any of a variety of circuits such as a shift register, a level shifter,an inverter, a latch, an analog switch, and a logic circuit can be usedas the functional circuit.

Transistors used in the imaging unit 31 and the functional circuit whichare provided in the imaging device IM may be n-channel transistors orp-channel transistors. Both n-channel transistors and p-channeltransistors may be used. A CMOS structure in which n-channel transistorsand p-channel transistors are combined may be employed for the imagingunit 31 and the functional circuit.

The imaging unit 31 includes imaging pixels 32 arranged in a matrix of mrows and n columns (each of m and n is an integer greater than or equalto 1). The imaging unit 31 is electrically connected to the first drivercircuit unit 33 through a plurality of wirings 41. The imaging unit 31is electrically connected to the reading circuit unit 35 through aplurality of wirings 42. The reading circuit unit 35 is electricallyconnected to the second driver circuit unit 34 through a plurality ofwirings 43. For example, the imaging pixel 32 in the i-th row (here, iis an integer greater than or equal to 1 and less than or equal to m) iselectrically connected to the first driver circuit unit 33 through thei-th wiring 41. The imaging pixel 32 in the j-th column (here, j is aninteger greater than or equal to 1 and less than or equal to n) iselectrically connected to the reading circuit unit 35 through the j-thwiring 42.

In FIG. 20, the imaging pixel 32 placed in the first row and the firstcolumn is shown as the imaging pixel 32[1, 1], and the imaging pixel 32placed in the m-th row and the n-th column is shown as the imaging pixel32[m, n]. The imaging pixel 32 placed in the i-th row and the j-thcolumn is shown as the imaging pixel 32[i, j].

Note that wirings connected to one imaging pixel 32 are not limited tothe wiring 41 and the wiring 42. A wiring other than the wiring 41 andthe wiring 42 may be connected to the imaging pixel 32.

The pixel density (also referred to as “resolution”) of the imaging unit31 is preferably higher than or equal to 100 ppi and lower than or equalto 10000 ppi, and more preferably higher than or equal to 1000 ppi andlower than or equal to 10000 ppi. For example, the resolution may behigher than or equal to 2000 ppi and lower than or equal to 6000 ppi, orhigher than or equal to 3000 ppi and lower than or equal to 5000 ppi.

The aspect ratio of the imaging unit 31 is not particularly limited. Theimaging unit 31 in the imaging device IM can correspond to variousaspect ratios, such as 1:1 (a square), 4:3, 16:9, and 16:10.

The diagonal of the imaging unit 31 is greater than or equal to 0.1inches and less than or equal to 100 inches. Depending on thecircumstances, the diagonal may be greater than or equal to 100 inches.

The control circuit unit 36 has a function of controlling the operationof a circuit included in the imaging device IM. The first driver circuitunit 33 has a function of selecting the imaging pixels 32 row by row.The imaging pixels 32 in the row selected by the first driver circuitunit 33 output imaging data to the reading circuit unit 35 through thewirings 42.

The reading circuit unit 35 holds imaging data supplied by the imagingpixels 32 in every column, and performs noise removal and the like. Asthe noise removal, for example, correlated double sampling (CDS)treatment may be performed. The reading circuit unit 35 may have afunction of amplifying imaging data or a function of converting imagingdata from analog to digital.

The second driver circuit unit 34 has functions of sequentiallyselecting imaging data held in the reading circuit unit 35, andoutputting the imaging data from an output terminal OUT to the outside.

One or more selected from the first driver circuit unit 33, the seconddriver circuit unit 34, the reading circuit unit 35, and the controlcircuit unit 36 may be provided with the shift register in FIG. 3A orFIG. 3B described in Embodiment 1, for example. As the circuits 100[1]to 100[m] in the shift register, for example, the circuit 100A1described in Configuration examples 1 to 8 in Embodiment 1 may be used.

<Circuit Configuration Example of Imaging Pixel>

FIG. 21A is a circuit diagram illustrating a circuit configurationexample of the imaging pixel 32. The imaging pixel 32 includes aphotoelectric conversion device PHD (also referred to as a“photoelectric conversion element” or an “imaging element”), atransistor Tr1, a transistor Tr2, a transistor Tr3, a transistor Tr4,and a capacitor CA. Note that the capacitor CA is not necessarilyprovided. In this specification and the like, a configuration in whichthe photoelectric conversion device PHD is removed from the abovecomponents is referred to as an “imaging pixel circuit” in some cases.

One electrode (cathode) of the photoelectric conversion device PHD iselectrically connected to one of a source and a drain of the transistorTr1. The other of the source and the drain of the transistor Tr1 iselectrically connected to one of a source and a drain of the transistorTr2. The one of the source and the drain of the transistor Tr2 iselectrically connected to one electrode of the capacitor CA. The oneelectrode of the capacitor CA is electrically connected to a gate of thetransistor Tr3. One of a source and a drain of the transistor Tr3 iselectrically connected to one of a source and a drain of the transistorTr4.

Here, a node where the other of the source and the drain of thetransistor Tr1, the one electrode of the capacitor CA, and the gate ofthe transistor Tr3 are electrically connected is referred to as a nodeFD. The node FD can function as a charge detection portion.

The other electrode (anode) of the photoelectric conversion device PHDis electrically connected to a wiring POW1. A gate of the transistor Tr1is electrically connected to a wiring SEL2. The other of the source andthe drain of the transistor Tr2 is electrically connected to a wiringPOW2. The other of the source and the drain of the transistor Tr3 iselectrically connected to a wiring POW3. A gate of the transistor Tr2 iselectrically connected to a wiring SELL A gate of the transistor Tr4 iselectrically connected to a wiring SEL3. The other electrode of thecapacitor CA is electrically connected to a reference potential linesuch as a GND wiring, for example. The other of the source and the drainof the transistor Tr4 is electrically connected to a wiring OPT.

The wirings SEL2, SEL1, and SEL3 each have a function of a signal linecontrolling on/off states of the corresponding transistor. The wiringOPT has a function of an output line.

The wirings POW1, POW2, and POW3 each have a function of a power supplyline. The imaging pixel 32 in FIG. 21A has a configuration in which thecathode of the photoelectric conversion device PHD is electricallyconnected to the transistor Tr1, and is capable of taking an image byresetting the node FD to a high potential. Thus, the wiring POW2 is at ahigh potential (a potential higher than that of the wiring POW1).

Although the cathode of the photoelectric conversion device PHD iselectrically connected to the node FD in FIG. 21A, the anode of thephotoelectric conversion device PHD may be electrically connected to theone of the source and the drain of the transistor Tr1. In that case, theimaging pixel 32 is capable of taking an image by resetting the node FDto a low potential. Thus, the wiring POW2 is set at a low potential (apotential lower than that of the wiring POW1).

The transistor Tr1 has a function of controlling the potential of thenode FD. The transistor Tr1 is also referred to as a “transfertransistor”. The transistor Tr2 has a function of resetting thepotential of the node FD. The transistor Tr2 is also referred to as a“reset transistor”. The transistor Tr3 functions as a source followercircuit, and can output the potential of the node FD as imaging data tothe wiring OPT. The transistor Tr4 has a function of selecting a pixelfrom which the imaging data is output. The transistor Tr3 is alsoreferred to as an “amplifier transistor”. The transistor Tr4 is alsoreferred to as a “selection transistor”.

The photoelectric conversion device PHD and the transistor Tr1 areregarded as one set as illustrated in FIG. 21B, and a plurality of setseach including the photoelectric conversion device PHD and thetransistor Tr1 may be connected to the node FD. With the circuitconfiguration illustrated in FIG. 21B, the area occupied by one imagingpixel 32 can be reduced. Thus, the packing density of the imaging pixels32 can be increased.

In FIG. 21B, the photoelectric conversion device PHD and the transistorTr1 of the first set are shown as a photoelectric conversion devicePHD_1 and a transistor Tr1_1. A gate of the transistor Tr1_1 iselectrically connected to a wiring SEL2_1. The photoelectric conversiondevice PHD and the transistor Tr1 of the second set are shown as aphotoelectric conversion device PHD_2 and a transistor Tr1_2. A gate ofthe transistor Tr1_2 is electrically connected to a wiring SEL2_2. Thephotoelectric conversion device PHD and the transistor Tr1 of the k-thset (k is an integer greater than or equal to 1) are shown as aphotoelectric conversion device PHD_k and a transistor Tr1_k. A gate ofthe transistor Tr1_k is electrically connected to a wiring SEL2_k.

As an example, all transistors included in the imaging device IM can beformed through the same process.

Note that the functional circuit included in the imaging device IM doesnot necessarily include all the components described in this embodimentand the like, and can include components other than these.

<Configuration Example of Display Apparatus and Imaging Device>

Next, a configuration of the display apparatus 10 in which the displayapparatus and the imaging device are integrated is described.

FIG. 22 illustrates a configuration of the display apparatus 10 formedby combining the imaging device IM in FIGS. 21A and 21B and a displayapparatus in FIG. 19 (hereinafter referred to as a display apparatus DS)including the pixel array PA, the source driver circuit 11, and the gatedriver circuit 13.

Note that in FIG. 22, the plurality of wirings 41 are shown as wirings41[1] to 41[m], the plurality of wirings 42 are shown as wirings 42[1]to 42[n], and the plurality of wirings 43 are shown as wirings 43[1] to43[n].

In FIG. 22, for example, the second driver circuit unit 34 and thesource driver circuit 11 are electrically connected to each otherthrough the wirings 44[1] to 44[n].

For example, imaging data read by the reading circuit unit 35 istransmitted to the source driver circuit 11 through the wirings 43[1] to43[n], the second driver circuit unit 34, and the wirings 44[1] to44[n].

Thus, the source driver circuit 11 may have functions of executing thevoltage adjustment, the polarity conversion, the power amplification,and the like of imaging data supplied from the imaging device IM. Thatis, the source driver circuit 11 may have a function of convertingimaging data into an image signal. Thus, the source driver circuit 11can output an image signal converted from imaging data to the pixelarray PA.

With this structure, imaging data obtained by the imaging unit 31 can beconverted into an image signal that is suitable to be displayed on thepixel array PA, by the source driver circuit 11. As a result, forexample, a display apparatus which is hardly affected by noise and hasfavorable display quality is achieved.

In the display apparatus 10, the pixel array PA and the imaging unit 31may be arranged in the same array. For example, as illustrated in FIG.23, the display apparatus 10 may have a configuration in which a pixelcircuit and an imaging circuit may be arranged in the same array.

In a cell array AY in the display apparatus 10 in FIG. 23, circuitsCE[1, 1] to CE[m, n] are arranged in a matrix of m rows and n columns.When i is an integer greater than or equal to 1 and less than or equalto m and j is an integer greater than or equal to 1 and less than orequal to n, a circuit CE[i, j] includes a pixel circuit PX [i, j] and animaging pixel 32[i, j], for example. Note that in the cell array AY inFIG. 23, only the circuit CE[1, 1] and the circuit CE[m, n] are shownwith references.

With the configuration of the display apparatus 10 in which the pixelcircuits PX and the imaging pixels 32 are arranged in the same array asillustrated in FIG. 23, the whole of the display portion can be used asa sensor region. For example, an image of a finger is captured by theimaging pixels 32[1, 1] to 32[m, n]; thus, the display apparatus 10 canhave a function of fingerprint identification. When the imaging pixels32[1, 1] to 32[m, n] continuously take images of a user's finger, thedisplay apparatus 10 or an electronic device including the displayapparatus 10 can recognize movement of the user's finger. The displayapparatus 10 or the electronic device including the display apparatus 10may be configured to perform various operations in accordance withmovement of the user's finger (e.g., zoom-in/zoom-out of an image andscrolling on a displayed image). That is, the display apparatus 10 mayhave a function of a touch panel.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 4

In this embodiment, a display apparatus that can be provided in anelectronic device of one embodiment of the present invention will bedescribed. Note that the display apparatus described in this embodimentcan be used in the display portion DIS described in the aboveembodiment.

<Structure Example of Display Apparatus>

FIG. 24 is a cross-sectional view illustrating an example of a displayapparatus of one embodiment of the present invention. A displayapparatus 1000 in FIG. 24 includes a pixel circuit and a driver circuitover a substrate 310, for example. Note that the display apparatus DSP,the display apparatus 10, and the like described in the above embodimentcan have a structure of the display apparatus 1000 in FIG. 24.

Specifically, for example, the circuit layer SICL, the wiring layerLINL, and the pixel layer PXAL in the display apparatus 10 can be formedas illustrated by the display apparatus 1000 in FIG. 24. For example,the circuit layer SICL includes the substrate 310 on which a transistor300 is formed. Above the transistor 300 is provided the wiring layerLINL that includes wirings that electrically connect the transistor 300,a transistor 200 to be described later, light-emitting devices 150 a and150 b to be described later, and the like. Above the wiring layer LINLis provided the pixel layer PXAL that includes, for example, thetransistor 200 and a light-emitting device 150 (the light-emittingdevices 150 a and 150 b in FIG. 24).

As the substrate 310, a substrate that can be used as the substrate BScan be used, for example. Note that in the case where the manufacturingprocess of the display apparatus 1000 involves heat treatment, a highlyheat-resistant material is preferably selected for the substrate 310.

In the description of this embodiment, the substrate 310 is asemiconductor substrate containing silicon as a material.

The transistor 300 is provided over the substrate 310 and includes anelement isolation layer 312, a conductor 316, an insulator 315, aninsulator 317, a semiconductor region 313 that is part of the substrate310, and low-resistance regions 314 a and 314 b functioning as sourceand drain regions. Thus, the transistor 300 is a Si transistor. AlthoughFIG. 24 illustrates a structure in which one of a source and a drain ofthe transistor 300 is electrically connected to conductors 330, 356, and366 to be described later through a conductor 328 to be described later,the electrical connection in the semiconductor device of one embodimentof the present invention is not limited thereto. In the semiconductordevice of one embodiment of the present invention, for example, a gateof the transistor 300 may be electrically connected to the conductors330, 356, and 366 through the conductor 328.

The transistor 300 can have a fin-type structure when, for example, atop surface of the semiconductor region 313 and a side surface thereofin the channel width direction are covered with the conductor 316 withthe insulator 315 as a gate insulating film therebetween. The effectivechannel width is increased in the fin-type transistor 300, whereby theon-state characteristics of the transistor 300 can be improved. Inaddition, contribution of the electric field of the gate electrode canbe increased, so that the off-state characteristics of the transistor300 can be improved.

Note that the transistor 300 can be a p-channel transistor or ann-channel transistor. Alternatively, both the p-channel transistor 300and the n-channel transistor 300 may be included.

A region in the semiconductor region 313 where a channel is formed, aregion in the vicinity thereof, and the low-resistance regions 314 a and314 b functioning as the source and drain regions preferably contain asemiconductor such as a silicon-based semiconductor, and preferablycontain single crystal silicon. Alternatively, a material includinggermanium (Ge), silicon germanium (SiGe), gallium arsenide (GaAs),aluminum gallium arsenide (GaAlAs), or gallium nitride (GaN) may beused. Alternatively, silicon whose effective mass is controlled byapplying stress to the crystal lattice and thereby changing the latticespacing may be used for the above regions in the transistor 300.Alternatively, the transistor 300 may be a high-electron-mobilitytransistor (HEMT) including gallium arsenide and aluminum galliumarsenide.

For the conductor 316 functioning as a gate electrode, a semiconductormaterial such as silicon that contains an element imparting n-typeconductivity (e.g., arsenic or phosphorus) or an element impartingp-type conductivity (e.g., boron) can be used. Alternatively, for theconductor 316, a conductive material such as a metal material, an alloymaterial, or a metal oxide material can be used.

Note that a material used for a conductor determines the work function;thus, selecting the material used for the conductor can adjust thethreshold voltage of a transistor. Specifically, titanium nitride,tantalum nitride, or the like is preferably used for the conductor.Furthermore, in order to ensure the conductivity and embeddability ofthe conductor, a metal material such as tungsten or aluminum ispreferably stacked over the conductor. In particular, tungsten ispreferable in terms of heat resistance.

The element isolation layer 312 is provided to separate a plurality oftransistors on the substrate 310 from each other. The element isolationlayer can be formed by a local oxidation of silicon (LOCOS) method, ashallow trench isolation (STI) method, a mesa isolation method, or thelike.

Note that the transistor 300 shown in FIG. 24 is only an example and isnot limited to having the structure shown in FIG. 24; a transistorappropriate for a circuit configuration, a driving method, or the likecan be used. For example, the transistor 300 may have a planar structureinstead of a fin-type structure.

Over the transistor 300 shown in FIG. 24, an insulator 320, an insulator322, an insulator 324, and an insulator 326 are stacked in this orderfrom the substrate 310 side.

For the insulators 320, 322, 324, and 326, silicon oxide, siliconoxynitride, silicon nitride oxide, silicon nitride, aluminum oxide,aluminum oxynitride, aluminum nitride oxide, or aluminum nitride can beused, for example.

The insulator 322 may function as a planarization film for eliminating alevel difference caused by the transistor 300 covered with theinsulators 320 and 322. For example, a top surface of the insulator 322may be planarized by planarization treatment using a chemical mechanicalpolishing (CMP) method or the like to increase the level of planarity.

For the insulator 324, it is preferable to use a barrier insulating filmpreventing diffusion of impurities such as water and hydrogen from thesubstrate 310, the transistor 300, or the like to a region above theinsulator 324 (e.g., the region including the transistor 200, thelight-emitting devices 150 a and 150 b, and the like). Accordingly, theinsulator 324 is preferably formed using an insulating material having afunction of inhibiting diffusion of impurities such as a hydrogen atom,a hydrogen molecule, and a water molecule, that is, an insulatingmaterial which does not easily transmit the above impurities.Alternatively, depending on circumstances, the insulator 324 ispreferably formed using an insulating material having a function ofinhibiting diffusion of impurities such as a nitrogen atom, a nitrogenmolecule, a nitrogen oxide molecule (e.g., N₂O, NO, and NO₂), and acopper atom, that is, an insulating material which does not easilytransmit the above oxygen. The insulator 324 preferably has a functionof inhibiting diffusion of oxygen (e.g., at least one of an oxygen atomand an oxygen molecule).

For the film having a barrier property against hydrogen, for example,silicon nitride deposited by a CVD method can be used.

The amount of released hydrogen can be measured by thermal desorptionspectroscopy (TDS), for example. The amount of hydrogen released fromthe insulator 324 that is converted into hydrogen atoms per unit area ofthe insulator 324 is less than or equal to 10×10¹⁵ atoms/cm², preferablyless than or equal to 5×10¹⁵ atoms/cm² in TDS analysis in a film-surfacetemperature range of 50° C. to 500° C., for example.

Note that the dielectric constant of the insulator 326 is preferablylower than that of the insulator 324. For example, the dielectricconstant of the insulator 326 is preferably lower than 4, furtherpreferably lower than 3. For example, the dielectric constant of theinsulator 326 is preferably 0.7 times or less that of the insulator 324,further preferably 0.6 times or less that of the insulator 324. When amaterial with a low dielectric constant is used for an interlayer film,the parasitic capacitance generated between wirings can be reduced.

In addition, the conductors 328 and 330 that are connected to a circuitelement or the light-emitting devices above the insulator 326 areembedded in the insulators 320, 322, 324, and 326. Note that each of theconductors 328 and 330 functions as a plug or a wiring. A plurality ofconductors functioning as plugs or wirings are collectively denoted bythe same reference numeral in some cases. In this specification and thelike, a wiring and a plug connected to the wiring may be a singlecomponent. That is, in some cases, part of a conductor functions as awiring or part of a conductor functions as a plug.

As a material for each of plugs and wirings (e.g., the conductor 328 andthe conductor 330), a conductive material such as a metal material, analloy material, a metal nitride material, or a metal oxide material canbe used in a single-layer structure or a stacked-layer structure. It ispreferable to use a high-melting-point material that has both heatresistance and conductivity, such as tungsten or molybdenum, and it isparticularly preferable to use tungsten. Alternatively, a low-resistanceconductive material such as aluminum or copper is preferably used. Theuse of a low-resistance conductive material can reduce wiringresistance.

A wiring layer may be provided over the insulator 326 and the conductor330. For example, in FIG. 24, an insulator 350, an insulator 352, and aninsulator 354 are sequentially stacked above the insulator 326 and theconductor 330. Furthermore, the conductor 356 is formed in theinsulators 350, 352, and 354. The conductor 356 functions as a plug or awiring that is connected to the transistor 300. Note that the conductor356 can be formed using a material similar to that for the conductor 328and the conductor 330.

Note that for example, the insulator 350 is preferably formed using aninsulator having a barrier property against impurities such as hydrogenand water, like the insulator 324. The insulators 352 and 354 arepreferably formed using an insulator having a relatively low dielectricconstant to reduce the parasitic capacitance generated between wirings,like the insulator 326. The insulator 362 and the insulator 364 havefunctions of an interlayer insulating film and a planarization film.Furthermore, the conductor 356 preferably includes a conductor having abarrier property against hydrogen, oxygen, and water.

Note that as the conductor having a barrier property against hydrogen,for example, tantalum nitride is preferably used. A stacked structure oftantalum nitride and tungsten having high conductivity can inhibithydrogen diffusion from the transistor 300 while the conductivity of awiring is ensured. In this case, a tantalum nitride layer having abarrier property against hydrogen is preferably in contact with theinsulator 350 having a barrier property against hydrogen.

An insulator 360, an insulator 362, and an insulator 364 aresequentially stacked over the insulator 354 and the conductor 356.

The insulator 360 is preferably formed using an insulator having abarrier property against impurities such as water and hydrogen, like theinsulator 324 and the like. Thus, the insulator 360 can be formed usingany of the materials usable for the insulator 324 and the like, forexample.

The insulator 362 and the insulator 364 have functions of an interlayerinsulating film and a planarization film. The insulators 362 and 364 arepreferably formed using an insulator having a barrier property againstimpurities such as water and hydrogen, like the insulator 324. Thus, theinsulator 362 and/or the insulator 364 can be formed using any of thematerials usable for the insulator 324.

The conductor 366 is embedded to fill an opening portion provided inregions of the insulator 360, the insulator 362, and the insulator 364that overlap with part of the conductor 356. The conductor 366 is alsoformed over the insulator 362. The conductor 366 functions as a plug ora wiring that is connected to the transistor 300, for example. Note thatthe conductor 366 can be formed using a material similar to that for theconductor 328 and the conductor 330.

An insulator 370 and an insulator 372 are sequentially stacked over theinsulator 364 and the conductor 366.

The insulator 370 is preferably formed using an insulator having abarrier property against impurities such as water and hydrogen, like theinsulator 324 and the like. Thus, the insulator 370 can be formed usingany of the materials usable for the insulator 324 and the like, forexample.

The insulator 372 has functions of an interlayer insulating film and aplanarization film. The insulator 372 is preferably formed using aninsulator having a barrier property against impurities such as water andhydrogen, like the insulator 324. Thus, the insulator 372 can be formedusing any of the materials usable for the insulator 324.

The conductor 376 is provided to fill an opening provided in regions ofthe insulator 370 and the insulator 372 that overlap with part of theconductor 366. The conductor 376 is also formed over the insulator 372.After that, the conductor 376 is patterned into a form of a wiring, aterminal, a pad, or the like by etching treatment or the like.

The conductor 376 can be formed using, for example, copper, aluminum,tin, zinc, tungsten, silver, platinum, or gold. The material used forthe conductor 376 preferably contains the same component as the materialused for a later-described conductor 216 in the pixel layer PXAL.

Then, an insulator 380 is formed to cover the insulator 372 and theconductor 376 and is subsequently subjected to planarization treatmentby a chemical mechanical polishing (CMP) method or the like until theconductor 376 is exposed. In this manner, the conductor 376 serving as awiring, a terminal, or a pad can be formed over the substrate 310.

Like the insulator 324, the insulator 380 is preferably formed using afilm with a barrier property inhibiting diffusion of impurities such aswater and hydrogen, for example. In other words, the insulator 380 ispreferably formed using any of the materials usable for the insulator324. Like the insulator 326, the insulator 380 may be formed using aninsulator having a relatively low dielectric constant to reduce theparasitic capacitance generated between wirings, for example. In otherwords, the insulator 380 may be formed using any of the materials usablefor the insulator 326.

The pixel layer PXAL is provided with a substrate 210, the transistor200, the light-emitting device 150 (the light-emitting devices 150 a and150 b in FIG. 24), and a substrate 102. Moreover, the pixel layer PXALis provided with an insulator 220, an insulator 222, an insulator 226,an insulator 250, insulators 111 a and 111 b, an insulator 112, aninsulator 113, an insulator 162, and a resin layer 163, for example.Furthermore, the pixel layer PXAL is provided with a conductor 216, aconductor 228, a conductor 230, a conductor 121 (conductors 121 a and121 b in FIG. 24), a conductor 122 (conductors 122 a and 122 b in FIG.24), and a conductor 123, for example.

An insulator 202 in FIG. 24 functions as a bonding layer together withthe insulator 380, for example. The insulator 202 preferably contains,for example, the same component as the material used for the insulator380.

The substrate 210 is provided above the insulator 202. In other words,the insulator 202 is provided on a bottom surface of the substrate 210.The substrate 210 is preferably a substrate usable for the substrate310, for example. Note that in the description of the display apparatus1000 shown in FIG. 24, the substrate 310 is a semiconductor substratecontaining silicon.

Over the substrate 210, the transistor 200 is formed, for example. Beingformed on the substrate 210 that is a semiconductor substrate containingsilicon, the transistor 200 functions as a Si transistor. For thestructure of the transistor 200, refer to the description of thetransistor 300.

Above the transistor 200, the insulator 220 and the insulator 222 areprovided. The insulator 220 has functions of an interlayer insulatingfilm and a planarization film, for example, like the insulator 320. Theinsulator 222 has functions of an interlayer insulating film and aplanarization film, for example, like the insulator 322.

A plurality of opening portions are provided in the insulators 220 and222. The plurality of opening portions are formed in regions overlappingwith a source and a drain of the transistor 200, a region overlappingwith the conductor 376, and the like. Of the plurality of openingportions, the opening portions formed in the regions overlapping withthe source and the drain of the transistor 200 are each filled with theconductor 228. Of the other opening portions, the opening portion formedin the region overlapping with the conductor 376 has a side surfaceprovided with an insulator 214, and the conductor 216 fills the spaceinside the insulator 214. The conductor 216 is sometimes particularlyreferred to as a through silicon via (TSV).

For the conductor 216 or the conductor 228, any of the materials usablefor the conductor 328 can be used, for example. In particular, theconductor 216 is preferably formed using the same material as theconductor 376.

The insulator 214 has a function of insulating the conductor 216 fromthe substrate 210, for example. Note that the insulator 214 ispreferably formed using, for example, any of the materials usable forthe insulator 320, or the insulator 324.

The insulator 380 and the conductor 376 that are formed over thesubstrate 310 are bonded to the insulator 202 and the conductor 216 thatare formed on the substrate 210 by a bonding step, for example.

Before the bonding step, for example, planarization treatment isperformed to make surfaces of the insulator 380 and the conductor 376level with each other on the substrate 310 side. In a similar manner,planarization treatment is performed to make surfaces of the insulator202 and the conductor 216 level with each other on the substrate 210side.

In the bonding step, hydrophilic bonding or the like can be employed forbonding of the insulator 380 and the insulator 202, i.e., bonding ofinsulators; in the hydrophilic bonding, after high planarity is obtainedby polishing or the like, the surfaces of the insulators are subjectedto hydrophilicity treatment with oxygen plasma or the like, arranged incontact with and bonded to each other temporarily, and then dehydratedby heat treatment to perform final bonding. The hydrophilic bonding canalso cause bonding at an atomic level; thus, bonding with excellentmechanical strength can be obtained.

Surface activated bonding, diffusion bonding, or the like can beemployed for bonding of the conductor 376 and the conductor 216, i.e.,bonding of conductors. Surface activated bonding is a method in which anoxide film and a layer adsorbing impurities over the surface of eachconductor are removed by sputtering treatment or the like and thecleaned and activated surfaces of the conductors are made to be incontact with and bonded to each other. Diffusion bonding is a method inwhich the surfaces of the conductors are bonded to each other byadjusting temperature and pressure together. Both methods can causebonding at an atomic level and therefore the bonding with excellentelectric and mechanical strength can be achieved.

Through the above-described bonding step, the conductor 376 on thesubstrate 310 side can be electrically connected to the conductor 216 onthe substrate 210 side. In addition, mechanically strong connection canbe established between the insulator 380 on the substrate 310 side andthe insulator 202 on the substrate 210 side.

The insulating layers and the metal layers are mixed on the bondingsurfaces of the substrates 310 and 210; therefore, for example, surfaceactivated bonding and hydrophilic bonding are preferably performed incombination when the substrates 310 and 210 are bonded to each other.For example, the following method can be used: the surfaces of the metallayers are made clean after polishing, the surfaces of the metal layersare subjected to antioxidant treatment and hydrophilicity treatment, andthen bonding is performed. Alternatively, hydrophilicity treatment maybe performed with the metal layers having surfaces of a hardlyoxidizable metal such as gold.

Note that the substrate 310 and the substrate 210 may be bonded by abonding method different from the above-described methods. For example,the substrate 310 and the substrate 210 may be bonded by flip-chipbonding. In the case of employing flip-chip bonding, a connectionterminal such as a bump may be provided above the conductor 376 on thesubstrate 310 side or provided below the conductor 216 on the substrate210 side. Flip-chip bonding can be performed by, for example, injectinga resin containing anisotropic conductive particles between theinsulator 380 and the insulator 202 and between the conductor 376 andthe conductor 216, or by using a Sn—Ag solder. Alternatively, ultrasonicwave bonding can be used in the case where the bump and a conductorconnected to the bump are gold. To reduce thermal stress, physicalstress such as an impact, or the like, the above-described flip-chipbonding may be combined with injection of an underfill agent between theinsulator 380 and the insulator 202 and between the conductor 376 andthe conductor 216. Furthermore, a die bonding film may be used inbonding of the substrate 310 and the substrate 210, for example.

An insulator 224 and the insulator 226 are sequentially stacked over theinsulator 222, the insulator 214, the conductor 216, and the conductor228.

Like the insulator 324, the insulator 224 is preferably a barrierinsulating film inhibiting diffusion of impurities such as water andhydrogen to the region above the insulator 224. Thus, the insulator 224is preferably formed using, for example, any of the materials usable forthe insulator 324.

Like the insulator 326, the insulator 226 is preferably an interlayerfilm with a low dielectric constant. Thus, the insulator 226 ispreferably formed using, for example, any of the materials usable forthe insulator 326.

In the insulators 224 and 226, the conductor 230 and the like that areelectrically connected to the transistor 200, the light-emitting device150, and the like are embedded. Note that the conductor 230 functions asa plug or a wiring. For the conductor 230, any of the materials usablefor the conductor 328 or the conductor 330 can be used, for example.

Over the insulators 224 and 226, the insulators 250, 111 a, and 111 bare sequentially stacked.

The insulator 250 is preferably formed using an insulator having abarrier property against impurities such as water and hydrogen, like theinsulator 324. Thus, the insulator 250 can be formed using any of thematerials usable for the insulator 324 and the like, for example.

As each of the insulators 111 a and 111 b, any of a variety of inorganicinsulating films such as an oxide insulating film, a nitride insulatingfilm, an oxynitride insulating film, and a nitride oxide insulating filmcan be suitably used. As the insulator 111 a, an oxide insulating filmor an oxynitride insulating film, such as a silicon oxide film, asilicon oxynitride film, or an aluminum oxide film, is preferably used.As the insulator 111 b, a nitride insulating film or a nitride oxideinsulating film, such as a silicon nitride film or a silicon nitrideoxide film, is preferably used. More specifically, it is preferable touse a silicon oxide film as the insulator 111 a and a silicon nitridefilm as the insulator 111 b. The insulator 111 b preferably has afunction of an etching protective film. Alternatively, a nitrideinsulating film or a nitride oxide insulating film may be used as theinsulator 111 a, and an oxide insulating film or an oxynitrideinsulating film may be used as the insulator 111 b. Although thisembodiment shows an example in which a depressed portion is provided inthe insulator 111 b, the depressed portion is not necessarily providedin the insulator 111 b.

The conductor 121 is embedded to fill an opening portion provided inregions of the insulator 250, the insulator 111 a, and the insulator 111b that overlap with part of the conductor 230. Note that in thisspecification and the like, the conductors 121 a and 121 b in FIG. 24are collectively referred to as the conductor 121. The conductor 121 canbe formed using a material similar to that for the conductor 328 and theconductor 330.

A pixel electrode and a counter electrode described in this embodimentcontain, for example, a material reflecting visible light and a materialtransmitting visible light, respectively.

The display apparatus 1000 has a top-emission structure. Light emittedfrom the light-emitting device is emitted toward the substrate 102. Forthe substrate 102, a material having a high visible-light-transmittingproperty is preferably used.

The light-emitting devices 150 a and 150 b are provided above theconductor 121.

Here, the light-emitting devices 150 a and 150 b are described.

The light-emitting device described in this embodiment is aself-luminous light-emitting device such as an organic EL element (alsoreferred to as an organic light-emitting diode (OLED)). Note that thelight-emitting device electrically connected to a pixel circuit can be aself-luminous light-emitting device such as a light-emitting diode(LED), a micro LED, a quantum-dot light-emitting diode (QLED), or asemiconductor laser.

The conductors 122 a and 122 b can be formed in such a manner that, forexample, a conductive film is formed over the insulator 111 b, theconductor 121 a, and the conductor 121 b and the conductive film issubjected to a patterning step and an etching step.

The conductors 122 a and 122 b function as anodes of the light-emittingdevices 150 a and 150 b of the display apparatus 1000, for example.

The conductors 122 a and 122 b can be formed using indium tin oxide(sometimes referred to as ITO), for example.

Each of the conductors 122 a and 122 b may have a stacked-layerstructure of two or more layers instead of a single-layer structure. Forexample, the first conductor can be formed using a conductor with highvisible-light reflectance and the uppermost conductor can be formedusing a conductor with a high light-transmitting property. Examples of aconductor with high visible-light reflectance include silver, aluminum,and an alloy film of silver (Ag), palladium (Pd), and copper (Cu) (anAg—Pd—Cu (APC) film). Examples of a conductor with a highlight-transmitting property include indium tin oxide described above.The conductors 122 a and 122 b can each be a stacked-layer film in whicha pair of titanium films sandwich aluminum (a film in which Ti, Al, andTi are stacked in this order), or a stacked-layer film in which a pairof indium tin oxide films sandwich silver (a film in which ITO, Ag, andITO are stacked in this order).

An EL layer 141 a is provided over the conductor 122 a. An EL layer 141b is provided over the conductor 122 b.

The EL layers 141 a and 141 b preferably include light-emitting layersemitting light of different colors. For example, the EL layer 141 aincludes a light-emitting layer emitting light of any one of red (R),green (G), and blue (B), and the EL layer 141 b includes alight-emitting layer emitting light of one of the other two colors.Although not illustrated in FIG. 24, in the case where an EL layerdifferent from the EL layers 141 a and 141 b is provided, the EL layercan include a light-emitting layer emitting light of the remaining onecolor. Thus, the display apparatus 1000 may have such an SBS structurein which light-emitting layers for respective colors are provided over aplurality of pixel electrodes (e.g., the conductors 121 a and 121 b).

Note that the combination of the colors of light emitted by thelight-emitting layers of the EL layers 141 a and 141 b is not limited tothe above example, and cyan, magenta, or yellow may also be used, forexample. The number of colors of light emitted by the light-emittingdevices 150 of the display apparatus 1000, which is three in the aboveexample, may be two or four or more.

The EL layers 141 a and 141 b may each include one or more of anelectron-injection layer, an electron-transport layer, a hole-injectionlayer, and a hole-transport layer in addition to a layer containing alight-emitting organic compound (the light-emitting layer).

The EL layers 141 a and 141 b can be formed by an evaporation method(e.g., a vacuum evaporation method), a coating method (e.g., a dipcoating method, a die coating method, a bar coating method, a spincoating method, or a spray coating method), a printing method (e.g., anink-jet method, screen printing (stencil), offset printing(planography), flexography (relief printing), gravure printing, ormicro-contact printing), or the like.

In the case where the coating method or the printing method is employed,a high molecular compound (e.g., an oligomer, a dendrimer, or apolymer), a middle molecular compound (a compound between a lowmolecular compound and a high molecular compound with a molecular weightof 400 to 4000), or an inorganic compound (e.g., a quantum dot material)can be used. The quantum dot material can be a colloidal quantum dotmaterial, an alloyed quantum dot material, a core-shell quantum dotmaterial, or a core quantum dot material.

Like the light-emitting device 150 shown in FIG. 25A, the light-emittingdevices 150 a and 150 b in FIG. 24 can include a plurality of layerssuch as a light-emitting layer 4411 and a layer 4430.

The layer 4420 can include, for example, a layer containing a substancewith a high electron-injection property (an electron-injection layer)and a layer containing a substance with a high electron-transportproperty (an electron-transport layer). The light-emitting layer 4411contains a light-emitting compound, for example. The layer 4430 caninclude, for example, a layer containing a substance with a highhole-injection property (a hole-injection layer) and a layer containinga substance with a high hole-transport property (a hole-transportlayer).

The structure including the layer 4420, the light-emitting layer 4411,and the layer 4430, which is provided between a pair of electrodes (theconductor 121 and a later-described conductor 122), can function as asingle light-emitting unit, and the structure in FIG. 25A is referred toas a single structure in this specification and the like.

FIG. 25B is a modification example of the EL layer 141 included in thelight-emitting device 150 illustrated in FIG. 25A. Specifically, thelight-emitting device 150 illustrated in FIG. 25B includes a layer4430-1 over the conductor 121, a layer 4430-2 over the layer 4430-1, alight-emitting layer 4411 over the layer 4430-2, a layer 4420-1 over thelight-emitting layer 4411, a layer 4420-2 over the layer 4420-1, and theconductor 122 over the layer 4420-2. For example, in the case where theconductor 121 serves as an anode and the conductor 122 serves as acathode, the layer 4430-1 serves as a hole-injection layer, the layer4430-2 serves as a hole-transport layer, the layer 4420-1 serves as anelectron-transport layer, and the layer 4420-2 serves as anelectron-injection layer. Alternatively, in the case where the conductor121 serves as a cathode and the conductor 122 serves an anode, the layer4430-1 serves as an electron-injection layer, the layer 4430-2 serves asan electron-transport layer, the layer 4420-1 serves as a hole-transportlayer, and the layer 4420-2 serves as a hole-injection layer. With sucha layer structure, carriers can be efficiently injected to thelight-emitting layer 4411, and the efficiency of the recombination ofcarriers in the light-emitting layer 4411 can be enhanced.

Note that the structure in which a plurality of light-emitting layers(e.g., light-emitting layers 4411, 4412, and 4413) are provided betweenthe layer 4420 and the layer 4430 as illustrated in FIG. 25C is anothervariation of the single structure.

A stack including a plurality of layers such as the layer 4420, thelight-emitting layer 4411, and the layer 4430 is sometimes referred toas a light-emitting unit. A plurality of light-emitting units can beconnected in series with an intermediate layer (a charge-generationlayer) therebetween. Specifically, a light-emitting unit 4400 a and alight-emitting unit 4400 b can be connected in series with anintermediate layer (charge-generation layer) 4440 therebetween as shownin FIG. 25D. Such a structure is referred to as a tandem structure inthis specification. A tandem structure may be rephrased as a stackstructure in this specification and the like. By having a tandemstructure, a light-emitting device can emit light at high luminance. Byhaving a tandem structure, a light-emitting device presumably hasincreased emission efficiency and an extended lifetime, for example. Inthe case where the light-emitting device 150 of the display apparatus1000 in FIG. 24 has a tandem structure, the EL layer 141 can include,for example, the layer 4420, the light-emitting layer 4411, and thelayer 4430 that are included in the light-emitting unit 4400 a, theintermediate layer 4440, and the layer 4420, the light-emitting layer4412, and the layer 4430 that are included in the light-emitting unit4400 b.

In displaying white, the aforementioned SBS structure consumes lowerpower than the aforementioned single structure and tandem structure. Toreduce power consumption, the SBS structure is thus preferably used.Meanwhile, the single structure and the tandem structure are preferablein that the manufacturing cost is low or the manufacturing yield is highbecause the manufacturing processes of the single structure and thetandem structure are simpler than that of the SBS structure.

The emission color of the light-emitting device 150 can be changed tored, green, blue, cyan, magenta, yellow, white, or the like depending onthe material of the EL layer 141. When the light-emitting device 150 hasa microcavity structure, the color purity can be further increased.

A light-emitting device exhibiting white light preferably contains twoor more kinds of light-emitting substances in its light-emitting layers.To obtain white light emission, two light-emitting substances that emitlight of complementary colors are selected. For example, when emissioncolors of a first light-emitting layer and a second light-emitting layerare complementary colors, the light-emitting device can be configured toexhibit white light as a whole. When three or more light-emitting layersare used to obtain white light emission, a structure in which thelight-emitting device exhibits white light as a whole by combination ofemission colors of the three or more light-emitting layers is employed.

The light-emitting layer preferably contains two or more selected fromlight-emitting substances that emit light of red (R), green (G), blue(B), yellow (Y), and orange (O). Alternatively, the light-emitting layerpreferably contains two or more light-emitting substances that emitlight containing two or more of spectral components of R, G, and B.

As illustrated in FIG. 24, a gap is provided between the two EL layersof the adjacent light-emitting devices. Specifically, in FIG. 24, adepressed portion is formed between the adjacent light-emitting devices,and the insulator 112 is provided to cover side surfaces (side surfacesof the conductors 121 a and 122 a and the EL layer 141 a and sidesurfaces of the conductors 121 b and 122 b and the EL layer 141 b) and abottom surface (a region in the insulator 111 b) of the depressedportion. The insulator 162 is formed over the insulator 112 to fill thedepressed portion. In this manner, the EL layers 141 a and 141 b arepreferably provided so as not to be in contact with each other. Thissuitably prevents unintentional light emission (also referred to ascrosstalk) from being caused by a current (also referred to as lateralleakage current or side leakage current) flowing through two adjacent ELlayers. As a result, the contrast can be increased to achieve a displayapparatus with high display quality. Furthermore, with the structurewith extremely low lateral leakage current between light-emittingdevices, the display apparatus can perform black display with as littlelight leakage as possible (such display is also referred to ascompletely black display).

The EL layers 141 a and 141 b can be formed through photolithography,for example. For example, the EL layers 141 a and 141 b can be formed insuch a manner that an EL film to be the EL layers 141 a and 141 b isformed over the conductor 122 and then subjected to patterning throughphotolithography. Accordingly, a gap can be provided between the two ELlayers of the adjacent light-emitting devices.

The insulator 112 can be an insulating layer containing an inorganicmaterial. As the insulator 112, an inorganic insulating film such as anoxide insulating film, a nitride insulating film, an oxynitrideinsulating film, or a nitride oxide insulating film can be used, forexample. The insulator 112 may have a single-layer structure or astacked-layer structure. Examples of the oxide insulating film include asilicon oxide film, an aluminum oxide film, a magnesium oxide film, anindium gallium zinc oxide film, a gallium oxide film, a germanium oxidefilm, an yttrium oxide film, a zirconium oxide film, a lanthanum oxidefilm, a neodymium oxide film, a hafnium oxide film, and a tantalum oxidefilm. Examples of the nitride insulating film include a silicon nitridefilm and an aluminum nitride film. Examples of the oxynitride insulatingfilm include a silicon oxynitride film and an aluminum oxynitride film.Examples of the nitride oxide insulating film include a silicon nitrideoxide film and an aluminum nitride oxide film. In particular, analuminum oxide film is preferable because it has high etchingselectivity with the EL layer and has a function of protecting the ELlayer during formation of the insulator 162 to be described later. Aninorganic insulating film such as an aluminum oxide film, a hafniumoxide film, or a silicon oxide film is formed by an ALD method as theinsulator 112, whereby the insulator 112 can have few pinholes and anexcellent function of protecting the EL layer.

Note that in this specification and the like, oxynitride refers to amaterial that contains more oxygen than nitrogen, and nitride oxiderefers to a material that contains more nitrogen than oxygen. Forexample, a silicon oxynitride refers to a material that contains oxygenat a higher proportion than nitrogen, and a silicon nitride oxide refersto a material that contains nitrogen at a higher proportion than oxygen.

The insulator 112 can be formed by, for example, a deposition methodsuch as a sputtering method, a CVD method, a PLD method, or an ALDmethod. In particular, the insulator 112 is preferably formed by an ALDmethod capable of film deposition with good coverage.

The insulator 162 provided over the insulator 112 has a function offilling the depressed portion of the insulator 112, which is formedbetween the adjacent light-emitting devices. In other words, theinsulator 162 has an effect of improving the planarity of the formationsurface of the conductor 123 to de described later. As the insulator162, an insulating layer containing an organic material can be favorablyused. For example, the insulator 162 can be formed using an acrylicresin, a polyimide resin, an epoxy resin, an imide resin, a polyamideresin, a polyimide-amide resin, a silicone resin, a siloxane resin, abenzocyclobutene-based resin, a phenol resin, precursors of theseresins, or the like. The insulator 162 may be formed using an organicmaterial such as polyvinyl alcohol (PVA), polyvinyl butyral,polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan,water-soluble cellulose, or an alcohol-soluble polyamide resin.Moreover, the insulator 162 can be formed using, for example, aphotosensitive resin. A photoresist may be used as the photosensitiveresin. The photosensitive resin can be of positive or negative type.

A difference between a top surface of the insulator 162 and a topsurface of the EL layer 141 a or 141 b is preferably less than or equalto 0.5 times the thickness of the insulator 162, more preferably lessthan or equal to 0.3 times the thickness of the insulator 162. Theinsulator 162 may be, for example, provided such that the top surface ofthe EL layer 141 a or 141 b is higher than the top surface of theinsulator 162. Alternatively, the insulator 162 may be, for example,provided such that the top surface of the insulator 162 is higher than atop surface of the light-emitting layer included in the EL layer 141 aor 141 b.

The conductor 123 is provided over the EL layer 141 a, the EL layer 141b, the insulator 112, and the insulator 162. The insulator 113 isprovided over the light-emitting devices 150 a and 150 b.

The conductor 123 functions as, for example, a common electrode of thelight-emitting devices 150 a and 150 b. The conductor 123 preferablycontains a conductive material having a light-transmitting property sothat light from the light-emitting device 150 can be extracted to abovethe display apparatus 1000.

The conductor 123 is preferably formed using a light-transmitting andlight-reflective material having high conductivity (sometimes referredto as a transflective electrode). The conductor 123 can be formed using,for example, an alloy of silver and magnesium, or indium tin oxide.

The insulator 113 is referred to as a protective layer in some cases. Bythe insulator 113 provided above the light-emitting devices 150 a and150 b, the light-emitting devices can have higher reliability. That is,the insulator 113 functions as a passivation film protecting thelight-emitting devices 150 a and 150 b. Thus, the insulator 113 ispreferably formed using a material preventing entry of water and thelike. The insulator 113 can be formed using a material usable for theinsulator 111 a or the insulator 111 b, for example. Specifically,aluminum oxide, silicon nitride, or silicon nitride oxide can be used.

A resin layer 163 is provided over the insulator 113. A substrate 102 isprovided over the resin layer 163.

The substrate 102 is preferably a light-transmitting substrate, forexample. Using a light-transmitting substrate as the substrate 102enables extraction of light emitted from the light-emitting devices 150a, and 150 b to above the substrate 102.

Note that the display apparatus of one embodiment of the presentinvention does not necessary have the structure of the display apparatus1000 in FIG. 24. The structure of the display apparatus of oneembodiment of the present invention may be changed as appropriate aslong as an object of one embodiment of the present invention isachieved.

For example, the transistor 200 included in the pixel layer PXAL in thedisplay apparatus 1000 in FIG. 24 may be a transistor including a metaloxide in a channel formation region (hereinafter referred to as an OStransistor). The display apparatus 1000 in FIG. 26 is provided with thelight-emitting device 150 and a transistor 500 (an OS transistor),instead of the transistor 200 in the display apparatus 1000 in FIG. 24,above the circuit layer SICL and the wiring layer LINL.

In FIG. 26, the transistor 500 is provided over an insulator 512. Theinsulator 512 is provided above the insulator 364 and the conductor 366.The insulator 512 is preferably formed with a substance having a barrierproperty against oxygen and hydrogen, for example. Specifically, siliconoxide, silicon oxynitride, silicon nitride oxide, silicon nitride,aluminum oxide, aluminum oxynitride, aluminum nitride oxide, or aluminumnitride may be used, for example.

For the film having a barrier property against hydrogen, for example,silicon nitride deposited by a CVD method can be used. Here, diffusionof hydrogen into a semiconductor element including an oxidesemiconductor, such as the transistor 500, degrades the characteristicsof the semiconductor element in some cases. Therefore, a film thatinhibits hydrogen diffusion is preferably provided between thetransistor 500 and the transistor 300. Specifically, the film thatinhibits hydrogen diffusion is a film from which a small amount ofhydrogen is released.

The insulator 512 can be formed using a material similar to that for theinsulator 320, for example. In the case where a material with arelatively low dielectric constant is used for these insulators, theparasitic capacitance between wirings can be reduced. A silicon oxidefilm or a silicon oxynitride film can be used as the insulator 512, forexample.

An insulator 514 is provided over the insulator 512, and the transistor500 is provided over the insulator 514. An insulator 576 is formed overthe insulator 512 so as to cover the transistor 500. An insulator 581 isformed over the insulator 576 to cover the insulator 576.

The insulator 514 is preferably formed using a film having a barrierproperty inhibiting diffusion of impurities such as hydrogen or waterfrom the substrate 310 or the region below the insulator 512 wherecircuit elements and the like are provided to the region where thetransistor 500 is provided. Thus, the insulator 514 can be formed usingsilicon nitride deposited by a CVD method, for example.

The transistor 500 in FIG. 26 is an OS transistor that includes a metaloxide in a channel formation region, as described above. As the metaloxide, an In-M-Zn oxide containing indium, the element M, and zinc canbe used; the element M is one or more selected from aluminum, gallium,yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron,nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium,hafnium, tantalum, tungsten, and magnesium. Specifically, the metaloxide may be an oxide containing indium, gallium, and zinc (referred toas IGZO in some cases), for example. Alternatively, the metal oxide maybe an oxide containing indium, aluminum, and zinc (referred to as IAZOin some cases), for example. Alternatively, the metal oxide may be anoxide containing indium, aluminum, gallium, and zinc (referred to asIAGZO in some cases), for example. Other than the above, the metal oxidemay be an In—Ga oxide, an In—Zn oxide, or an indium oxide.

The metal oxide functioning as a semiconductor preferably has a band gapof 2 eV or more, preferably 2.5 eV or more. The use of such a metaloxide having a wide band gap can reduce the off-state current (referredto as leakage current in some cases) of the transistor.

In particular, as a driving transistor included in a pixel circuit, atransistor having a sufficiently low off-state current, for example, anOS transistor is preferably used even when the source-drain voltage ishigh. When the driving transistor is an OS transistor, the off-statecurrent flowing through the light-emitting device can be reduced whenthe driving transistor is off, whereby the luminance of light emittedfrom the light-emitting device through which off-state current flows canbe sufficiently reduced. In the case where a driving transistor havinghigh off-state current and a driving transistor having low off-statecurrent are compared, a pixel circuit including the driving transistorhaving low off-state current can have lower emission luminance than apixel circuit including the driving transistor having high off-statecurrent when black display is performed on the pixel circuits. That is,with use of an OS transistor, black blurring when black display isperformed by the pixel circuit can be inhibited.

The value of off-state current of an OS transistor per channel width of1 μm at room temperature can be less than or equal to 1 aA (1×10⁻¹⁸ A),less than or equal to 1 zA (1×10⁻²¹ A), or less than or equal to 1 yA(1×10⁻²⁴ A). Note that the value of off-state current of a Si transistorper channel width of 1 μm at room temperature can be greater than orequal to 1 fA (1×10⁻¹⁵ A) and less than or equal to 1 pA (1×10⁻¹² A).Therefore, the off-state current of the OS transistor can be lower thanthat of the Si transistor by approximately 10 digits.

In order to increase the emission luminance of the light-emitting deviceincluded in the pixel circuit, the amount of current flowing through thelight-emitting device needs to be increased. For that purpose, thesource-drain voltage of the driving transistor included in the pixelcircuit needs to be increased. Since an OS transistor has a higherwithstand voltage between a source and a drain than a Si transistor, ahigh voltage can be applied between the source and the drain of the OStransistor. Thus, with use of an OS transistor as the driving transistorincluded in the pixel circuit, a high voltage can be applied between asource and a drain of the OS transistor, so that the amount of currentflowing through the light-emitting device can be increased and theemission luminance of the light-emitting device can be increased.

In the case where the transistor operates in a saturation region, achange in source-drain current with respect to a change in gate-sourcevoltage can be smaller in an OS transistor than in a Si transistor.Therefore, when an OS transistor is used as the driving transistorincluded in the pixel circuit, the current flowing between the sourceand the drain can be determined minutely by the change in thegate-source voltage, so that the amount of current flowing through thelight-emitting device can be controlled minutely. Therefore, theemission luminance of the light-emitting device can be controlledminutely (the number of gray levels in the pixel circuit can beincreased).

As to saturation characteristics of a current flowing when a transistoroperates in a saturation region, the OS transistor enables a stablerconstant current (saturation current) to flow than the Si transistoreven when the source-drain voltage gradually increases. Accordingly,with use of an OS transistor as the driving transistor, for example, astable constant current can flow through the light-emitting device evenwhen current-voltage characteristics of light-emitting device containingan EL material vary. That is, in the case where the OS transistoroperates in a saturation region, the source-drain current of the OStransistor hardly change even when the source-drain voltage isincreased; thus, the emission luminance of the light-emitting device canbe stabilized.

As described above, the use of an OS transistor as the drivingtransistor included in the pixel circuit enables “inhibition of blackblurring”, “an increase in emission luminance”, “an increase in graylevels”, “inhibition of variations in the luminance of thelight-emitting device”, and the like. Thus, a display apparatusincluding the pixel circuit can display a clear and smooth image; as aresult, image clearness (image sharpness) and/or a high contrast ratiocan be observed. Note that image clearness (image sharpness) refers tothe state where motion blur is inhibited and/or the state where blackblurring is inhibited in some cases. When the driving transistorincluded in the pixel circuit has extremely low off-state current, thedisplay apparatus can perform black display with as little light leakageas possible (completely black display).

One or both of the insulator 576 and the insulator 581 preferablyfunction as a barrier insulating film that prevents impurities such aswater and hydrogen from diffusing from above the transistor 500 into thetransistor 500. Accordingly, it is preferable to use, for one or both ofthe insulator 576 and the insulator 581, an insulating material having afunction of inhibiting diffusion of impurities such as a hydrogen atom,a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogenmolecule, a nitrogen oxide molecule (e.g., N₂O, NO, and NO₂), and acopper atom (an insulating material through which the above impuritiesare less likely to pass). Alternatively, the insulator 576 and/or theinsulator 581 is preferably formed using an insulating material having afunction of inhibiting diffusion of oxygen (e.g., oxygen atoms and/oroxygen molecules) (an insulating material through which the oxygen isless likely to pass).

An insulator having a function of inhibiting diffusion of oxygen andimpurities such as water and hydrogen is preferably used for theinsulator 576 and/or the insulator 581; for example, aluminum oxide,magnesium oxide, hafnium oxide, gallium oxide, indium-gallium-zincoxide, silicon nitride, or silicon nitride oxide can be used.

An opening for forming a plug or a wiring is provided in the insulator581, the insulator 576, and one of a source electrode and a drainelectrode of the transistor 500. A conductor 540 functioning as a plugor a wiring is formed in the opening.

The insulator 581 preferably functions as an interlayer film and/or aplanarization film.

The insulator 224 and the insulator 226 are formed above the insulator581 and the conductor 540. For the insulator 224 and componentspositioned above the insulator 224, such as an insulator, a conductor,and a circuit element, description of the display apparatus 1000 in FIG.24 is referred to.

Note that FIG. 24 illustrates a display apparatus formed by bonding thesemiconductor substrate provided with the light-emitting device 150, thepixel circuit, and the like and the semiconductor substrate providedwith a driver circuit and the like; FIG. 26 illustrates a displayapparatus in which the light-emitting device 150, the pixel circuit, andthe like are formed over a semiconductor substrate provided with adriver circuit. However, one embodiment of the present invention is notlimited to the display apparatuses in FIG. 24 and FIG. 26. The displayapparatus of one embodiment of the present invention may have astructure in which transistors are formed in only one layer, not astacked-layer structure in which transistors are formed in two or morelayers.

Specifically, for example, the display apparatus of one embodiment ofthe present invention may include a circuit including the transistor 200formed over the substrate 210 and the light-emitting device 150 providedabove the transistor 200, as in the display apparatus 1000 in FIG. 27A.For another example, the display apparatus of one embodiment of thepresent invention may have a structure in which the insulator 512 isformed over a substrate 501, the transistor 500 is provided over theinsulator 512, and the light-emitting device 150 is provided above thetransistor 500, as in the display apparatus 1000 in FIG. 27B. Note thatas the substrate 501, a substrate that can be used as the substrate 310can be used, for example, and in particular, a glass substrate ispreferably used.

The display apparatus of one embodiment of the present invention mayhave a structure in which transistors are provided in only one layer andthe light-emitting device 150 is provided above the transistors, as inthe display apparatus 1000 in FIG. 27A or FIG. 27B. Although notillustrated, the display apparatus of one embodiment of the presentinvention may have a stacked-layer structure in which transistors areformed in three or more layers.

<Sealing Structure Example of Display Apparatus>

Next, a sealing structure for the light-emitting device 150 applicableto the display apparatus 1000 in FIG. 24 is described.

FIG. 28A is a cross-sectional view of an example of a sealing structureapplicable to the display apparatus 1000 in FIG. 24. Specifically, FIG.28A shows an end portion of the display apparatus 1000 in FIG. 24 andcomponents provided around the end portion. FIG. 28A illustrates part ofthe pixel layer PXAL of the display apparatus 1000. Specifically, FIG.28A illustrates the insulator 250, and insulators, conductors, and thelight-emitting device 150 a which are positioned above the insulator250.

In a region 123CM illustrated in FIG. 28A, for example, an opening isprovided. In the opening, a conductor 121CM is provided, for example.The conductor 123 is electrically connected to a wiring provided belowthe insulator 250 through the conductor 121CM. With this structure, thepotential (e.g., an anode potential and a cathode potential of thelight-emitting device 150 a) can be supplied to the conductor 123functioning as the common electrode. Note that at least one of aconductor included in the region 123CM and a conductor near the region123CM is referred to as a connection electrode in some cases.

For the conductor 121CM, any of the materials usable for the conductor121 can be used, for example.

In the display apparatus 1000 shown in FIG. 28A, an adhesive layer 164is provided at or around the end portion of the resin layer 163.Specifically, the display apparatus 1000 is fabricated such that theadhesive layer 164 is placed between the insulator 113 and the substrate102.

The adhesive layer 164 is preferably formed using, for example, amaterial inhibiting transmission of an impurity such as moisture. Usingthe material for the adhesive layer 164 can increase the reliability ofthe display apparatus 1000.

The structure in which the adhesive layer 164 is used to bond theinsulator 113 and the substrate 102 with the resin layer 163 positionedbetween the insulator 113 and the substrate 102 is sometimes referred toas a solid sealing structure. In the case where the resin layer 163 inthe solid sealing structure has a function of bonding the insulator 113and the substrate 102 like the adhesive layer 164, the adhesive layer164 is not necessarily provided.

A structure in which the adhesive layer 164 is used to bond theinsulator 113 and the substrate 102 with not the resin layer 163 but aninert gas filling the space between the insulator 113 and the substrate102 is sometimes referred to as a hollow sealing structure (not shown).Examples of an inert gas include a nitrogen gas and an argon gas.

In the sealing structure of the display apparatus 1000 shown in FIG.28A, two or more overlapping adhesive layers may be used. For example,as shown in FIG. 28B, an adhesive layer 165 may be provided inward fromthe adhesive layer 164 (may be provided between the adhesive layer 164and the resin layer 163). Two or more overlapping adhesive layers caninhibit transmission of an impurity such as moisture more, furtherincreasing the reliability of the display apparatus 1000.

A desiccant may be mixed into the adhesive layer 165. In this case, thedesiccant adsorbs moisture contained in the resin layer 163, insulators,conductors, EL layers, and the like that are provided inward from theadhesive layers 164 and 165, increasing the reliability of the displayapparatus 1000.

Although the solid sealing structure of the display apparatus 1000 isshown in FIG. 28B, a hollow sealing structure may be employed.

Furthermore, the resin layer 163 filling the space in each of thesealing structures of the display apparatus 1000 shown in FIGS. 28A and28B may be replaced with an inert liquid. Examples of an inert liquidinclude a fluorine-based inert liquid.

<Modification Example of Display Apparatus>

One embodiment of the present invention is not limited to theabove-described structures, and the above-described structures can bemodified as appropriate in accordance with circumstances. A modificationexample of the display apparatus 1000 in FIG. 24 is described withreference to FIG. 29A to FIG. 30B. Note that FIG. 29A to FIG. 30Billustrate part of the pixel layer PXAL of the display apparatus 1000.

Specifically, each of FIG. 29A to FIG. 30B illustrates the insulator250, the insulator 111 a, and insulators, conductors, the light-emittingdevice 150 a, and the light-emitting device 150 b which are positionedabove the insulator 111 a. In particular, each of FIG. 29A to FIG. 30Balso illustrates a light-emitting device 150 c, a conductor 121 c, aconductor 122 c, and an EL layer 141 c.

Note that, for example, the color of light emitted from the EL layer 141c may be different from those of light emitted from the EL layers 141 aand 141 b. For example, in the display apparatus 1000, the number ofcolors of light emitted from the light-emitting devices 150 a to 150 cmay be two. For another example, the display apparatus 1000 may have astructure in which the number of light-emitting devices 150 is increasedand the number of colors of light emitted from the plurality oflight-emitting devices is four or more (not illustrated).

The display apparatus 1000 may have a structure in which, for example,an EL layer 142 is provided over the EL layers 141 a to 141 c as shownin FIG. 29A. Specifically, for example, the EL layer 142 can include thelayer 4420 shown in FIG. 25A when the EL layers 141 a to 141 c eachinclude the layer 4430 and the light-emitting layer 4411 shown in FIG.25A. In this case, the layer 4420 of the EL layer 142 functions as acommon layer shared by the light-emitting devices 150 a to 150 c. In asimilar manner, for another example, the EL layer 142 can include thelayer 4420 shown in FIG. 25C when the EL layers 141 a to 141 c eachinclude the layer 4430, the light-emitting layer 4411, thelight-emitting layer 4412, and the light-emitting layer 4413 shown inFIG. 25C. In this case, the layer 4420 of the EL layer 142 functions asa common layer shared by the light-emitting devices 150 a to 150 c. Foranother example, the EL layer 142 can include the layer 4420 of thelight-emitting unit 4400 b shown in FIG. 25D when the EL layers 141 a to141 c each include the layer 4430, the light-emitting layer 4412, andthe layer 4420 that are included in the light-emitting unit 4400 b, theintermediate layer 4440, and the layer 4430 and the light-emitting layer4411 that are included in the light-emitting unit 4400 a in FIG. 25D. Inthis case, the layer 4420 of the light-emitting unit 4400 a in the ELlayer 142 functions as a common layer shared by the light-emittingdevices 150 a to 150 c.

In the display apparatus 1000, for example, the insulator 113 may have astacked-layer structure including two or more layers, instead of asingle-layer structure. The insulator 113 may have a three-layerstructure that includes an insulator made of an inorganic material asthe first layer, an insulator made of an organic material as the secondlayer, and an insulator made of an inorganic material as the thirdlayer. FIG. 29B shows a cross-sectional view of part of the displayapparatus 1000 in which the insulator 113 has a multilayer structureincluding an insulator 113 a that is an insulator made of an inorganicmaterial, an insulator 113 b that is an insulator made of an organicmaterial, and an insulator 113 c that is an insulator made of aninorganic material.

In the display apparatus 1000, for example, the EL layers 141 a to 141 cmay each have a microcavity structure. In the microcavity structure, forexample, the conductor 122 as an upper electrode (common electrode) isformed using a light-transmitting and light-reflective conductivematerial, the conductor 121 as a lower electrode (pixel electrode) isformed using a light-reflective conductive material, and the distancebetween a bottom surface of the light-emitting layer and a top surfaceof the lower electrode, i.e., the thickness of the layer 4430 in FIG.25A, is set to the value corresponding to the wavelength of the color oflight emitted by the light-emitting layer of the EL layer 141.

For example, light that is reflected back by the lower electrode(reflected light) considerably interferes with light that directlyenters the upper electrode from the light-emitting layer (incidentlight). For this reason, the optical path length between the lowerelectrode and the light-emitting layer is preferably adjusted to(2n−1)λ/4 (n is a natural number greater than or equal to 1 and λ is thewavelength of light to be amplified). By adjusting the optical pathlength, the phases of the reflected light and the incident light eachhaving the wavelength λ can be aligned with each other, and the lightemitted from the light-emitting layer can be further amplified. In thecase where the reflected light and the incident light have a wavelengthother than the wavelength λ, their phases are not aligned with eachother, resulting in attenuation without resonation.

In the above structure, the EL layer may include a plurality oflight-emitting layers or a single light-emitting layer. It is alsopossible to, for example, combine the microcavity structure with theaforementioned tandem structure; specifically, a structure in which onelight-emitting device includes a plurality of EL layers sandwiching acharge-generation layer and each EL layer includes one or morelight-emitting layers can be applied to the microcavity structure.

With the microcavity structure, emission intensity with a specificwavelength in the front direction can be increased, whereby powerconsumption can be reduced. Particularly in the case of a device for XRsuch as VR and AR, light emitted from the light-emitting device in thefront direction often enters the eyes of the user wearing the device;thus, a display apparatus of a device for XR preferably includes amicrocavity structure. Note that in the case of a display apparatuswhich displays images with subpixels of four colors, red, yellow, green,and blue, the display apparatus can have favorable characteristicsbecause the luminance can be increased owing to yellow light emissionand each subpixel can employ a microcavity structure suitable for thewavelength of the corresponding color.

As an example, FIG. 30A shows a cross-sectional view of part of thedisplay apparatus 1000 including a microcavity structure. In the casewhere the light-emitting device 150 a includes a blue (B)-light-emittinglayer, the light-emitting device 150 b includes a green(G)-light-emitting layer, and the light-emitting device 150 c includes ared (R)-light-emitting layer, it is preferable that the EL layer 141 ahave the smallest thickness, the EL layer 141 b have the second largestthickness, and the EL layer 141 c have the largest thickness as shown inFIG. 30A. Specifically, the thicknesses of the layers 4430 included inthe EL layers 141 a, 141 b, and 141 c are determined depending on thecolor of the light emitted by the corresponding light-emitting layer. Inthis case, the layer 4430 of the EL layer 141 a has the smallestthickness and the layer 4430 of the EL layer 141 c has the largestthickness.

In the display apparatus 1000, for example, a coloring layer (colorfilter) or the like may be provided. As an example, FIG. 30B shows astructure in which a coloring layer 166 a, a coloring layer 166 b, and acoloring layer 166 c are provided between the resin layer 163 and thesubstrate 102. Note that the coloring layers 166 a to 166 c can beformed on the substrate 102, for example. In the case where thelight-emitting device 150 a includes a blue (B)-light-emitting layer,the light-emitting device 150 b includes a green (G)-light-emittinglayer, and the light-emitting device 150 c includes a red(R)-light-emitting layer, the coloring layer 166 a is a blue coloringlayer, the coloring layer 166 b is a green coloring layer, and thecoloring layer 166 c is a red coloring layer.

The display apparatus 1000 shown in FIG. 30B can be fabricated in such amanner that the substrate 102 provided with the coloring layers 166 a to166 c and the substrate 310 over which components up to thelight-emitting devices 150 a to 150 c are formed are bonded to eachother with the resin layer 163 therebetween. This bonding is preferablyperformed such that the light-emitting device 150 a and the coloringlayer 166 a overlap with each other, the light-emitting device 150 b andthe coloring layer 166 b overlap with each other, and the light-emittingdevice 150 c and the coloring layer 166 c overlap with each other. Inthe display apparatus 1000 provided with the coloring layers 166 a to166 c, for example, the light emitted by the light-emitting device 150 bis extracted to above the substrate 102 through the coloring layer 166 binstead of through the coloring layer 166 a or the coloring layer 166 c.That is, light emitted from the light-emitting device 150 in an obliquedirection (a direction at an elevation angle with a top surface of thesubstrate 102 used as a horizontal plane) can be blocked in the displayapparatus 1000; thus, the viewing angle dependence of the displayapparatus 1000 can be reduced, inhibiting the display quality of animage displayed by the display apparatus 1000 from decreasing when theimage is viewed from an oblique direction.

The coloring layers 166 a to 166 c formed on the substrate 102 may becovered with, for example, a resin which is also referred to as anovercoat layer. Specifically, the resin layer 163, the overcoat layer,the coloring layers 166 a to 166 c, and the substrate 102 may be stackedin this order in the display apparatus 1000 (not shown). Note thatexamples of the resin usable for the overcoat layer include athermosetting material having a light-transmitting property and based onan acrylic or epoxy resin.

In the display apparatus 1000, for example, a black matrix (not shown)may be provided in addition to the coloring layers. A black matrixprovided between the coloring layer 166 a and the coloring layer 166 b,between the coloring layer 166 b and the coloring layer 166 c, andbetween the coloring layer 166 c and the coloring layer 166 a canenhance blockage of the light emitted from the light-emitting devices150 of the display apparatus 1000 in an oblique direction (a directionat an elevation angle with the top surface of the substrate 102 used asa horizontal plane), further inhibiting the display quality of an imagedisplayed by the display apparatus 1000 from decreasing when the imageis viewed from an oblique direction.

In the case where the display apparatus includes coloring layers asshown in FIG. 30B or the like, the light-emitting devices 150 a to 150 cof the display apparatus may each be a white-light-emitting device (notshown). The structure of the light-emitting device can be a singlestructure or a tandem structure, for example.

In the above-described structures of the display apparatus 1000, theconductors 121 a to 121 c serve as the anodes and the conductor 122serves as a cathode; however, the display apparatus 1000 may have astructure in which the conductors 121 a to 121 c serve as cathodes andthe conductor 122 serves as an anode. In other words, in theabove-described manufacturing process, the stacking order of thehole-injection layer, hole-transport layer, light-emitting layer,electron-transport layer, and electron-injection layer that are includedin the EL layers 141 a to 141 c and the EL layer 142 can be reversed.

<Structure Example of Insulator 162>

Next, cross-sectional structures of a region including the insulator 162and its periphery in the display apparatus 1000 are described.

FIG. 31A illustrates an example in which the EL layer 141 a and the ELlayer 141 b have different thicknesses. The height of the top surface ofthe insulator 112 is aligned with or substantially aligned with theheight of the top surface of the EL layer 141 a on the EL layer 141 aside, and aligned with or substantially aligned with the height of thetop surface of the EL layer 141 b on the EL layer 141 b side. The topsurface of the insulator 112 has a gentle slope such that the sidecloser to the EL layer 141 a is higher and the side closer to the ELlayer 141 b is lower. In this manner, the heights of the insulators 112and 162 are preferably aligned with the height of the top surface of theadjacent EL layer. Alternatively, the height of the insulators may bealigned with the height of the top surface of any adjacent EL layer sothat their top surfaces can have a flat portion.

In FIG. 31B, the top surface of the insulator 112 includes a regionwhose height is higher than the height of the top surfaces of the ELlayers 141 a and 141 b. Moreover, the top surface of the insulator 112has a convex shape that is gently curved outward toward the center.

In FIG. 31C, the top surface of the insulator 112 has a region which ishigher than the top surfaces of the EL layers 141 a and 141 b.Specifically, in the region including the insulator 162 and itsperiphery, the display apparatus 1000 includes a sacrificial layer 118and/or a sacrificial layer 119. The display apparatus 1000 has a firstregion where the top surface of the insulator 112 is higher than the topsurfaces of the EL layers 141 a and 141 b and the insulator 112 ispositioned outside the insulator 162. The first region is positionedover the sacrificial layer 118 and/or the sacrificial layer 119. In theregion including the insulator 162 and its periphery, the displayapparatus 1000 includes the sacrificial layer 118 and/or the sacrificiallayer 119. The display apparatus 1000 has a second region where theinsulator 162 is higher than the top surfaces of the EL layers 141 a and141 b and is positioned outside the insulator 112. The second region ispositioned over the sacrificial layer 118 and/or the sacrificial layer119.

In FIG. 31D, the top surface of the insulator 162 includes a regionwhose height is lower than the height of the top surface of the EL layer141 a and the top surface of the EL layer 141 b. Moreover, the topsurface of the insulator 162 has a concave shape that is gently recessedtoward the center.

In FIG. 31E, the top surface of the insulator 112 includes a regionwhose height is higher than the height of the top surfaces of the ELlayers 141 a and 141 b. That is, the insulator 112 protrudes from theformation surface of the EL layer 141 and forms a projection.

For example, when the insulator 112 is formed so that its height isaligned with or substantially aligned with the height of the sacrificiallayer, the insulator 112 may protrude as illustrated in FIG. 31E.

In FIG. 31F, the top surface of the insulator 112 includes a regionwhose height is less than the height of the top surfaces of the EL layer141 a and 141 b. That is, the insulator 112 forms a depressed portion onthe formation surface of the EL layer 141.

As described above, the insulator 112 and insulator 162 can have avariety of shapes.

<Configuration Example of Pixel Circuit>

Here, configuration examples of a pixel circuit that can be included inthe pixel layer PXAL are described.

FIGS. 32A and 32B show a configuration example of a pixel circuit thatcan be included in the pixel layer PXAL and the light-emitting device150 connected to the pixel circuit. FIG. 32A shows connection of circuitelements of a pixel circuit 400 included in the pixel layer PXAL, andFIG. 32B schematically shows the positional relation of the circuitlayer SICL including a driver circuit 30 and the like, a layer OSLincluding a plurality of transistors of the pixel circuit, and a layerEML including the light-emitting device 150. Note that the pixel layerPXAL in the display apparatus 1000 in FIG. 32B includes the layer OSLand the layer EML, for example. A transistor 500A, a transistor 500B,and a transistor 500C included in the layer OSL illustrated in FIG. 32Beach correspond to the transistor 200 in FIG. 24. The light-emittingdevice 150 included in the layer EML illustrated in FIG. 32B correspondsto the light-emitting device 150 a or the light-emitting device 150 b inFIG. 24.

The pixel circuit 400 illustrated as an example in FIGS. 32A and 32Bincludes the transistor 500A, the transistor 500B, the transistor 500C,and a capacitor 600. As the transistors 500A, 500B, and 500C, forexample, transistors usable as the above-described transistor 200 can beused. That is, the transistors 500A, 500B, and 500C can be Sitransistors. Alternatively, as the transistors 500A, 500B, and 500C, forexample, transistors usable as the above-described transistor 500 can beused. That is, the transistors 500A, 500B, and 500C can be OStransistors. In particular, in the case where the transistors 500A,500B, and 500C are OS transistors, each of the transistors 500A, 500B,and 500C preferably includes a back gate electrode, in which case theback gate electrode and a gate electrode can be supplied with the samesignals or different signals. Although each of the transistors 500A,500B, and 500C in FIGS. 32A and 32B includes a back gate electrode, eachof the transistors 500A, 500B, and 500C does not necessarily include aback gate electrode.

The transistor 500B includes the gate electrode electrically connectedto the transistor 500A, a first electrode electrically connected to thelight-emitting device 150, and a second electrode electrically connectedto a wiring ANO. The wiring ANO supplies a potential for supplying acurrent to the light-emitting device 150.

The transistor 500A includes a first terminal electrically connected tothe gate electrode of the transistor 500B, a second terminalelectrically connected to the wiring SL functioning as a source line,and the gate electrode having a function of controlling the conductionstate or the non-conduction state based on the potential of a wiring GL1functioning as a gate line.

The transistor 500C includes a first terminal electrically connected toa wiring V0, a second terminal electrically connected to thelight-emitting device 150, and the gate electrode having a function ofcontrolling the conduction state or the non-conduction state based onthe potential of a wiring GL2 functioning as a gate line. The wiring V0supplies a reference potential and outputs a current flowing in thepixel circuit 400 to the driver circuit 30.

The capacitor 600 includes a conductive film electrically connected tothe gate electrode of the transistor 500B and a conductive filmelectrically connected to the second electrode of the transistor 500C.

The light-emitting device 150 includes a first electrode electricallyconnected to the first electrode of the transistor 500B and a secondelectrode electrically connected to a wiring VCOM. The wiring VCOMsupplies a potential for supplying a current to the light-emittingdevice 150.

Accordingly, the intensity of light emitted by the light-emitting device150 can be controlled in accordance with an image signal supplied to thegate electrode of the transistor 500B. Furthermore, variations in thegate-source voltage of the transistor 500B can be reduced by thereference potential of the wiring V0 supplied through the transistor500C.

A current value that can be used for setting of pixel parameters can beoutput from the wiring V0. Specifically, the wiring V0 can function as amonitor line for outputting a current flowing in the transistor 500B ora current flowing in the light-emitting device 150 to the outside. Acurrent output to the wiring V0 is converted into a voltage by a currentvoltage conversion circuit and output to the outside. Alternatively, thecurrent is converted into a digital signal by an A/D converter, and canbe output to the AI accelerator described in the above embodiment.

In the configuration illustrated as an example in FIG. 32B, the wiringselectrically connecting the pixel circuit 400 and the driver circuit 30can be short, so that the wiring resistance of the wirings can be low.Thus, data writing can be performed at a high speed, leading tohigh-speed operation of the display apparatus 1000. Therefore, even whenthe number of pixel circuits 400 included in the display apparatus 1000is large, a sufficiently long frame period can be ensured and thus thepixel density of the display apparatus 1000 can be increased. Inaddition, the increased pixel density of the display apparatus 1000 canincrease the resolution of an image displayed by the display apparatus1000. For example, the pixel density of the display apparatus 1000 canbe higher than or equal to 1000 ppi, higher than or equal to 5000 ppi,or higher than or equal to 7000 ppi. Thus, the display apparatus 1000can be, for example, a display apparatus for VR or AR and can besuitably used in a head-mounted display with a short distance betweenthe display portion and the user.

Although FIGS. 32A and 32B illustrate, as an example, the pixel circuit400 including three transistors in total, one embodiment of the presentinvention is not limited thereto. Configuration examples which can beused for the pixel circuit 400 will be described below.

A pixel circuit 400A illustrated in FIG. 33A includes the transistor500A, the transistor 500B, and the capacitor 600. FIG. 33A illustratesthe light-emitting device 150 connected to the pixel circuit 400A. Thewirings SL, GL, ANO, and VCOM are electrically connected to the pixelcircuit 400A.

The gate of the transistor 500A is electrically connected to the wiringGL, one of the source and the drain of the transistor 500A iselectrically connected to the wiring SL, and the other of the source andthe drain of the transistor 500A is electrically connected to the gateof the transistor 500B and one electrode of the capacitor 600. One ofthe source and the drain of the transistor 500B is electricallyconnected to the wiring ANO and the other of the source and the drain ofthe transistor 500B is electrically connected to the anode of thelight-emitting device 150. The other electrode of the capacitor 600 iselectrically connected to the anode of the light-emitting device 150.The cathode of the light-emitting device 150 is electrically connectedto the wiring VCOM.

A pixel circuit 400B illustrated in FIG. 33B has a configuration inwhich the transistor 500C is added to the pixel circuit 400A. Inaddition, the wiring V0 is electrically connected to the pixel circuit400B.

A pixel circuit 400C illustrated in FIG. 33C is an example in which atransistor including a gate and a back gate that are electricallyconnected to each other is used as each of the transistor 500A and thetransistor 500B of the pixel circuit 400A. A pixel circuit 400Dillustrated in FIG. 33D is an example in the case where such transistorsare used in the pixel circuit 400B. With these structures, a currentthat can flow in the transistors can be increased. Although a transistorin which a pair of gates are electrically connected to each other isused as every transistor here, one embodiment of the present inventionis not limited thereto. A transistor that includes a pair of gateselectrically connected to different wirings may be used. When, forexample, a transistor in which one of the gates is electricallyconnected to the source is used, the reliability can be increased.

A pixel circuit 400E illustrated in FIG. 34A has a configuration inwhich a transistor 500D is added to the pixel circuit 400B. Threewirings (wirings GL1, GL2, and GL3) functioning as gate lines areelectrically connected to the pixel circuit 400E.

A gate of the transistor 500D is electrically connected to the wiringGL3, one of a source and a drain of the transistor 500D is electricallyconnected to the gate of the transistor 500B, and the other of thesource and the drain of the transistor 500D is electrically connected tothe wiring V0. The gate of the transistor 500A is electrically connectedto the wiring GL1, and the gate of the transistor 500C is electricallyconnected to the wiring GL2.

When the transistors 500C and 500D are turned on at the same time, thesource and the gate of the transistor 500B have the same potential, sothat the transistor 500B can be turned off. Thus, a current flowing tothe light-emitting device 150 can be blocked forcibly. Such a pixelcircuit is suitable for the case of using a display method in which adisplay period and an off period are alternately provided.

A pixel circuit 400F illustrated in FIG. 34B is an example in which acapacitor 600A is added to the pixel circuit 400E. The capacitor 600Afunctions as a storage capacitor.

A pixel circuit 400G illustrated in FIG. 34C and a pixel circuit 400Hillustrated in FIG. 34D are respectively examples of the cases wheretransistors each including a gate and a back gate that are electricallyconnected to each other are used in the pixel circuit 400E and the pixelcircuit 400F. A transistor including a gate and a back gate that areelectrically connected to each other is used as each of the transistors500A, 500C, and 500D, and a transistor in which one of gates iselectrically connected to a source is used as the transistor 500B.

<Schematic Plan View and Cross-Sectional View of Light-Emitting Device>

FIG. 35A is a schematic plan view illustrating a structure example ofthe case where light-emitting devices and a light-receiving device areprovided in one pixel in the display apparatus 1000 of one embodiment ofthe present invention. The display apparatus 1000 includeslight-emitting devices 150R that emit red light, light-emitting devices150G that emit green light, light-emitting devices 150B that emit bluelight, and light-receiving devices 160. In FIG. 35A, light-emittingregions of the light-emitting devices 150 are denoted by R, G, and B toeasily differentiate the light-emitting devices 150. In addition,light-receiving regions of the light-receiving devices 160 are denotedby PD.

The light-emitting devices 150R, the light-emitting devices 150G, thelight-emitting devices 150B, and the light-receiving devices 160 arearranged in a matrix. FIG. 35A illustrates an example where thelight-emitting devices 150R, the light-emitting devices 150G, and thelight-emitting devices 150B are arranged in the X direction and thelight-receiving devices 160 are arranged thereunder. FIG. 35Aillustrates a structure example where the light-emitting devices 150that emit light of the same color are arranged in the Y directionintersecting the X direction. In the display apparatus 1000 in FIG. 35A,a pixel 80 can be composed of a sub-pixel including the light-emittingdevice 150R, a sub-pixel including the light-emitting device 150G, and asub-pixel including the light-emitting device 150B, which are arrangedin the X direction, and a sub-pixel including the light-receiving device160 provided under the sub-pixels, for example.

As each of the light-emitting devices 150R, 150G, and 150B, an ELelement such as an organic light-emitting diode (OLED) or a quantum-dotlight-emitting diode (QLED) is preferably used. Examples of alight-emitting substance included in the EL elements include a substanceexhibiting fluorescence (a fluorescent material), a substance exhibitingphosphorescence (a phosphorescent material), an inorganic compound(e.g., a quantum dot material), and a substance exhibiting thermallyactivated delayed fluorescence (a thermally activated delayedfluorescent (TADF) material). Note that as the TADF material, a TADFmaterial whose singlet excited state and triplet excited state are in athermal equilibrium state may be used. Because such a TADF material hasa short emission lifetime (a short excitation lifetime), it inhibits areduction in the efficiency of the light-emitting device in a highluminance region.

As the light-receiving devices 160, a PN photodiode or a PIN photodiodecan be used, for example. The light-receiving devices 160 each functionas a photoelectric conversion element that senses light incident on thecorresponding light-receiving device 160 and generates electric charges.The amount of generated electric charges depends on the amount ofincident light.

It is particularly preferable to use an organic photodiode including alayer containing an organic compound as the light-receiving devices 160.An organic photodiode, which is easily made thin, lightweight, and largein area and has a high degree of freedom for shape and design, can beused in a variety of display apparatuses.

In one embodiment of the present invention, organic EL elements are usedas the light-emitting devices 150, and organic photodiodes are used asthe light-receiving devices 160. The organic EL elements and the organicphotodiodes can be formed over one substrate. Thus, the organicphotodiodes can be incorporated in a display apparatus including theorganic EL elements. A photolithography method is preferably employed toseparate the organic EL elements from each other, separate the organicphotodiodes from each other, and separate the organic EL element fromthe organic photodiode. This can reduce the distance between thelight-emitting devices, that between the organic photodiodes, and thatbetween the light-emitting device and the organic photodiode, enablingfabrication of a display apparatus having a higher aperture ratio thanthat formed using, for example, a shadow mask such as a metal mask.

FIG. 35A shows the conductor 123 functioning as a common electrode andthe conductor 121CM functioning as a connection electrode. The conductor121CM is electrically connected to the conductor 123. The conductor121CM is provided outside a display portion where the light-emittingdevices 150 and the light-receiving devices 160 are arranged. In FIG.35A, the conductor 123 having a region overlapping with thelight-emitting devices 150, the light-receiving devices 160, and theconductor 121CM is shown by dashed lines.

The conductor 121CM can be provided along the outer periphery of thedisplay portion. For example, the conductor 121CM may be provided alongone side of the outer periphery of the display portion or two or moresides of the outer periphery of the display portion. That is, the topsurface shape of the conductor 121CM can be, for example, a band shape,an L shape, a square bracket shape, or a quadrangle in the case wherethe top surface shape of the display portion is a rectangle.

FIG. 35B is a schematic plan view illustrating a structure example ofthe display apparatus 1000, which is a modification example of thedisplay apparatus 1000 illustrated in FIG. 35A. The display apparatus1000 illustrated in FIG. 35B is different from the display apparatus1000 in FIG. 35A in that light-emitting devices 150IR that emit infraredlight are included. The light-emitting devices 150IR can emitnear-infrared light (light with a wavelength greater than or equal to750 nm to less than or equal to 1300 nm), for example.

In the example illustrated in FIG. 35B, the light-emitting devices 150IRas well as the light-emitting devices 150R, 150G, and 150B are arrangedin the X direction, and the light-receiving devices 160 are arrangedthereunder. The light-receiving devices 160 each have a function ofdetecting infrared light.

FIG. 36A is a cross-sectional view taken along dashed-dotted line A1-A2in FIG. 35A, and FIG. 36B is a cross-sectional view taken alongdashed-dotted line B1-B2 in FIG. 35A. FIG. 36C is a cross-sectional viewtaken along dashed-dotted line C1-C2 in FIG. 35A, and FIG. 36D is across-sectional view taken along dashed-dotted line D1-D2 in FIG. 35A.The light-emitting devices 150R, the light-emitting devices 150G, thelight-emitting devices 150B, and the light-receiving devices 160 areprovided over the insulator 111. In the case where the display apparatus1000 includes the light-emitting devices 150IR, the light-emittingdevices 150IR are provided over the insulator 111.

In the case where the expression “B over A” or “B under A” is used inthis specification and the like, for example, A and B do not always needto include a region where they are in contact with each other.

FIG. 36A illustrates a cross-sectional structure example of thelight-emitting devices 150R, 150G, and 150B shown in FIG. 35A. FIG. 36Billustrates a cross-sectional structure example of the light-receivingdevice 160 shown in FIG. 35A.

The light-emitting device 150R includes a conductor 121R functioning asa pixel electrode, a hole-injection layer 85R, a hole-transport layer86R, a light-emitting layer 87R, an electron-transport layer 88R, acommon layer 89, and the conductor 123. The light-emitting device 150Gincludes a conductor 121G functioning as a pixel electrode, ahole-injection layer 85G, a hole-transport layer 86G, a light-emittinglayer 87G, an electron-transport layer 88G, the common layer 89, and theconductor 123. The light-emitting device 150B includes a conductor 121Bfunctioning as a pixel electrode, a hole-injection layer 85B, ahole-transport layer 86B, a light-emitting layer 87B, anelectron-transport layer 88B, the common layer 89, and the conductor123. The light-receiving device 160 includes a conductor 121PDfunctioning as a pixel electrode, a hole-transport layer 86PD, alight-receiving layer 90, an electron-transport layer 88PD, the commonlayer 89, and the conductor 123.

As the conductor 121R, the conductor 121G, and the conductor 121B, forexample, the conductor 121 a, the conductor 121 b, and the conductor 121c shown in FIGS. 29A to 30B can be used.

The common layer 89 has a function of an electron-injection layer in thelight-emitting device 150. Meanwhile, the common layer 89 has a functionof an electron-transport layer in the light-receiving device 160.Therefore, the light-receiving device 160 does not necessarily have toinclude the electron-transport layer 88PD.

The hole-injection layer 85, the hole-transport layer 86, theelectron-transport layer 88, and the common layer 89 can also bereferred to as functional layers.

The conductor 121, the hole-injection layer 85, the hole-transport layer86, the light-emitting layer 87, and the electron-transport layer 88 caneach be separately provided for each device. The light-emitting devices150R, 150G, and 150B and the light-receiving devices 160 include thecommon layer 89 and the conductor 123 in common.

The light-emitting devices 150 and the light-receiving devices 160 mayeach include a hole-blocking layer and an electron-blocking layer otherthan the layers illustrated in FIG. 36A. The light-emitting devices 150and the light-receiving devices 160 may each include a layer containinga bipolar substance (a substance with a high electron-transport propertyand a high hole-transport property).

An insulating layer 92 is provided to cover an end portion of theconductor 121R, an end portion of the conductor 121G, an end portion ofthe conductor 121B, and an end portion of the conductor 121PD. Endportions of the insulating layer 92 are preferably tapered. Note thatthe insulating layer 92 is not necessarily provided.

The insulating layer 92 may be provided to prevent adjacent pixels(e.g., the light-emitting devices 150R and 150G or the light-emittingdevices 150G and 150B) from being electrically short-circuited andemitting light unintentionally, for example. In the case where thelight-emitting device is formed using a metal mask, the insulating layer92 may be provided to cover end portions of the conductors 121R, 121G,121B, and 121PD so as to prevent the metal mask from being in contactwith the conductors 121R, 121G, 121B, and 121PD. With this structure,the top surface of the insulating layer 92 is higher than the topsurfaces of the conductors 121R, 121G, 121B, and 121PD, and thus themetal mask is not in contact with the conductors 121R, 121G, 121B, and121PD, whereby damage on the surfaces of the conductors 121R, 121G,121B, and 121PD can be prevented.

The hole-injection layer 85R, the hole-injection layer 85G, thehole-injection layer 85B, and the hole-transport layer 86PD each have,for example, a region in contact with a top surface of the conductor 121and a region in contact with a surface of the insulating layer 92.Furthermore, an end portion of the hole-injection layer 85R, an endportion of the hole-injection layer 85G, an end portion of thehole-injection layer 85B, and an end portion of the hole-transport layer86PD are positioned over the insulating layer 92.

A gap is provided between the common layer 89 and the insulating layer92. This can inhibit contact between the common layer 89 and each of aside surface of the light-emitting layer 87, a side surface of thelight-receiving layer 90, a side surface of the hole-transport layer 86,and a side surface of the hole-injection layer 85. Thus, a short circuitin the light-emitting devices 150 and a short circuit in thelight-receiving devices 160 can be inhibited.

The shorter the distance between the light-emitting layers 87 is, themore easily the gap is formed, for example. For example, when thedistance is less than or equal to 1 μm, preferably less than or equal to500 nm, further preferably less than or equal to 200 nm, less than orequal to 100 nm, less than or equal to 90 nm, less than or equal to 70nm, less than or equal to 50 nm, less than or equal to 30 nm, less thanor equal to 20 nm, less than or equal to 15 nm, or less than or equal to10 nm, the gap can be favorably formed.

A protective layer 91 is provided over the conductor 123. The protectivelayer 91 has a function of preventing diffusion of impurities such aswater into each light-emitting device from the above.

The protective layer 91 can have, for example, a single-layer structureor a stacked-layer structure at least including an inorganic insulatingfilm. Examples of the inorganic insulating film include an oxide film ora nitride film such as a silicon oxide film, a silicon oxynitride film,a silicon nitride oxide film, a silicon nitride film, an aluminum oxidefilm, an aluminum oxynitride film, or a hafnium oxide film.Alternatively, a semiconductor material such as indium gallium oxide orindium gallium zinc oxide may be used for the protective layer 91.

A stack of an inorganic insulating film and an organic insulating filmcan be used as the protective layer 91. For example, a structure wherean organic insulating film is provided between a pair of inorganicinsulating films is preferably employed. Furthermore, an organicinsulating film preferably functions as a planarization film. In thatcase, a top surface of the organic insulating film can be flat,resulting in improved coverage with an inorganic insulating filmthereover and an enhanced barrier property. A top surface of theprotective layer 91 is flat; thus, in the case where a structure (e.g.,a color filter, an electrode of a touch sensor, or a lens array) isprovided above the protective layer 91, the influence of an uneven shapedue to a structure below the protective layer 91 can be reduced.

FIG. 36A shows the light-emitting device 150 in which the conductor 121,the hole-injection layer 85, the hole-transport layer 86, thelight-emitting layer 87, the electron-transport layer 88, the commonlayer (electron-injection layer) 89, and the conductor 123 are providedin this order from the bottom, and the light-receiving device 160 inwhich the conductor 121PD, the hole-transport layer 86PD, thelight-receiving layer 90, the electron-transport layer 88PD, the commonlayer 89, and the conductor 123 are provided in this order from thebottom; however, one embodiment of the present invention is not limitedto this example. For example, in the light-emitting device 150, aconductor functioning as a pixel electrode, an electron-injection layer,an electron-transport layer, a light-emitting layer, a hole-transportlayer, a hole-injection layer, and a conductor functioning as a commonelectrode may be provided in this order from the bottom; in thelight-receiving device 160, a conductor functioning as a pixelelectrode, an electron-transport layer, a light-receiving layer, ahole-transport layer, and the conductor functioning as the commonelectrode may be provided in this order from the bottom. In this case,the hole-injection layer of the light-emitting device 150 can be acommon layer, which can be provided between the hole-transport layer andthe common electrode of the light-receiving device 160. Theelectron-injection layer can be provided separately for eachlight-emitting device 150.

<Pixel Layout>

Here, a pixel layout which is different from that in FIGS. 35A and 35Bis described. There is no particular limitation on the arrangement ofsubpixels, and a variety of methods can be employed. Examples of thearrangement of subpixels include stripe arrangement, S-stripearrangement, matrix arrangement, delta arrangement, Bayer arrangement,and PenTile arrangement.

Examples of a top surface shape of the subpixel include polygons such asa triangle, a tetragon (including a rectangle and a square), and apentagon; polygons with rounded corners; an ellipse; and a circle. Here,a top surface shape of the subpixel corresponds to a top surface shapeof a light-emitting region of the light-emitting device.

The pixel 80 in FIG. 37A employs stripe arrangement. The pixel 80 inFIG. 37A includes three subpixels: a subpixel 80 a, a subpixel 80 b, anda subpixel 80 c. For example, the subpixel 80 a may be a red subpixel R,the subpixel 80 b may be a green subpixel G, and the subpixel 80 c maybe a blue subpixel B, as illustrated in FIG. 38A.

The pixel 80 in FIG. 37B employs S-stripe arrangement. The pixel 80 inFIG. 37B includes three subpixels: the subpixel 80 a, the subpixel 80 b,and the subpixel 80 c. For example, the subpixel 80 a may be the bluesubpixel B, the subpixel 80 b may be the red subpixel R, and thesubpixel 80 c may be the green subpixel G, as illustrated in FIG. 38B.

FIG. 37C illustrates an example where subpixels of different colors arearranged in a zigzag manner. Specifically, the positions of the topsides of two subpixels arranged in the column direction (e.g., thesubpixel 80 a and the subpixel 80 b or the subpixel 80 b and thesubpixel 80 c) are not aligned in the top view. For example, thesubpixel 80 a may be a red subpixel R, the subpixel 80 b may be a greensubpixel G, and the subpixel 80 c may be a blue subpixel B, asillustrated in FIG. 38C.

The pixel 80 illustrated in FIG. 37D includes the subpixel 80 a whosetop surface has a rough trapezoidal shape with rounded corners, thesubpixel 80 b whose top surface has a rough triangle shape with roundedcorners, and the subpixel 80 c whose top surface has a rough tetragonalor rough hexagonal shape with rounded corners. The subpixel 80 a has alarger light-emitting area than the subpixel 80 b. In this manner, theshapes and sizes of the subpixels can be determined independently. Forexample, the size of a subpixel including a light-emitting device withhigher reliability can be smaller. For example, the subpixel 80 a may bethe green subpixel G, the subpixel 80 b may be the red subpixel R, andthe subpixel 80 c may be the blue subpixel B, as illustrated in FIG.38D.

A pixel 70A and a pixel 70B in FIG. 37E employs PenTile arrangement.FIG. 37E illustrates an example in which the pixels 70A each includingthe subpixel 80 a and the subpixel 80 b and the pixels 70B eachincluding the subpixel 80 b and the subpixel 80 c are alternatelyarranged. For example, the subpixel 80 a may be the red subpixel R, thesubpixel 80 b may be the green subpixel G, and the subpixel 80 c may bethe blue subpixel B, as illustrated in FIG. 38E.

The pixel 70A and the pixel 70B in FIGS. 37F and 37G employ deltaarrangement. The pixel 70A includes two subpixels (the subpixels 80 aand 80 b) in the upper row (first row) and one subpixel (the subpixel 80c) in the lower row (second row). The pixel 70B includes one subpixel(the subpixel 80 c) in the upper row (first row) and two subpixels (thesubpixels 80 a and 80 b) in the lower row (second row). For example, thesubpixel 80 a may be the red subpixel R, the subpixel 80 b may be thegreen subpixel G, and the subpixel 80 c may be the blue subpixel B, asillustrated in FIG. 38F.

FIG. 37F shows an example where the top surface of each subpixel has arough tetragonal shape with rounded corners, and FIG. 37G shows anexample where the top surface of each subpixel is circular.

In a photolithography method, as a pattern to be processed becomesfiner, the influence of light diffraction becomes more difficult toignore; therefore, the fidelity in transferring a photomask pattern bylight exposure is degraded, and it becomes difficult to process a resistmask into a desired shape. Thus, a pattern with rounded corners islikely to be formed even with a rectangular photomask pattern.Consequently, the top surface of a subpixel can have a polygonal shapewith rounded corners, an elliptical shape, or a circular shape.

Furthermore, in the method for manufacturing the display apparatus ofone embodiment of the present invention, the EL layer is processed intoan island shape with the use of a resist mask. A resist film formed overthe EL layer needs to be cured at a temperature lower than the uppertemperature limit of the EL layer. Therefore, the resist film isinsufficiently cured in some cases depending on the upper temperaturelimit of the material of the EL layer and the curing temperature of theresist material. An insufficiently cured resist film may have a shapedifferent from a desired shape by processing. As a result, the topsurface of the EL layer may have a polygonal shape with rounded corners,an elliptical shape, or a circular shape. For example, when a resistmask with a square top surface is intended to be formed, a resist maskwith a circular top surface may be formed, and the top surface of the ELlayer may be circular.

To obtain a desired top surface shape of the EL layer, a technique ofcorrecting a mask pattern in advance so that a transferred patternagrees with a design pattern (an optical proximity correction (OPC)technique) may be used. Specifically, with the OPC technique, a patternfor correction is added to a corner portion or the like of a figure on amask pattern.

Each of the pixels 80 in FIGS. 39A to 39C employs stripe arrangement.

FIG. 39A illustrates an example in which each subpixel has a rectangulartop surface shape, FIG. 39B illustrates an example in which eachsubpixel has a top surface shape formed by combining two half circlesand a rectangle, and FIG. 39C illustrates an example in which eachsubpixel has an elliptical top surface shape.

Each of the pixels 80 in FIGS. 39D to 39F employs matrix arrangement.

FIG. 39D illustrates an example in which each subpixel has a square topsurface shape, FIG. 39E illustrates an example in which each subpixelhas a substantially square top surface shape with rounded corners, andFIG. 39F illustrates an example in which each subpixel has a circulartop surface shape.

Each of the pixels 80 in FIGS. 39A to 39F includes four subpixels: thesubpixel 80 a, the subpixel 80 b, the subpixel 80 c, and a subpixel 80d. The subpixels 80 a, 80 b, 80 c, and 80 d emit light of differentcolors. For example, the subpixels 80 a, 80 b, 80 c, and 80 d can besubpixels for red, green, blue, and white, respectively, as illustratedin FIGS. 40A and 40B. Alternatively, the subpixels 80 a, 80 b, 80 c, and80 d can be subpixels for red, green, blue, and infrared light,respectively.

The subpixel 80 d includes a light-emitting device. The light-emittingdevice includes, for example, a pixel electrode, an EL layer, and aconductor 121CM functioning as a common electrode. For the pixelelectrode, a material similar to that of the conductors 121 a, 121 b,121 c, 122 a, 122 b, and 122 c may be used. For the EL layer, a materialsimilar to that of the EL layers 141 a, 141 b, and 141 c may be used,for example.

FIG. 39G illustrates an example in which one pixel 80 consists of tworows and three columns. The pixel 80 includes three subpixels (thesubpixels 80 a, 80 b, and 80 c) in the upper row (first row) and threesubpixels 80 d in the lower row (second row). In other words, the pixel80 includes the subpixel 80 a and the subpixel 80 d in the left column(first column), the subpixel 80 b and another subpixel 80 d in thecenter column (second column), and the subpixel 80 c and anothersubpixel 80 d in the right column (third column). Matching the positionsof the subpixels in the upper row and the lower row as illustrated inFIG. 39G enables dust and the like that would be produced in themanufacturing process to be removed efficiently. Thus, a displayapparatus having high display quality can be provided.

FIG. 39H illustrates an example in which one pixel 80 consists of tworows and three columns. The pixel 80 includes three subpixels (thesubpixels 80 a, 80 b, and 80 c) in the upper row (first row) and onesubpixel (the subpixel 80 d) in the lower row (second row). In otherwords, the pixel 80 includes the subpixel 80 a in the left column (thefirst column), the subpixel 80 b in the center column (the secondcolunm), the subpixel 80 c in the right column (the third colunm), andthe subpixel 80 d across these three columns.

In the pixel 80 in each of FIGS. 39G and 39H, for example, the subpixel80 a can be the red subpixel R, the subpixel 80 b can be the greensubpixel G, the subpixel 80 c can be the blue subpixel B, and thesubpixel 80 d can be a white subpixel W, as illustrated in FIGS. 40C and40D.

The display apparatus of one embodiment of the present invention mayinclude a light-receiving device in the pixel.

Three of the four subpixels included in the pixel 80 in FIG. 39G mayinclude a light-emitting device and the other one may include alight-receiving device.

As the light-receiving device, a PN photodiode or a PIN photodiode canbe used, for example. The light-receiving device functions as aphotoelectric conversion device (also referred to as a photoelectricconversion element) that senses light entering the light-receivingdevice and generates electric charge. The amount of electric chargegenerated from the light-receiving device depends on the amount of lightincident on the light-receiving device.

It is particularly preferable to use an organic photodiode including alayer containing an organic compound as the light-receiving device. Anorganic photodiode, which is easily made thin, lightweight, and large inarea, for example, and has a high degree of freedom for shape anddesign, can be used in a variety of display apparatuses.

In one embodiment of the present invention, organic EL devices are usedas the light-emitting devices, and organic photodiodes are used as thelight-receiving devices. The organic EL device and the organicphotodiode can be formed over one substrate. Thus, the organicphotodiode can be incorporated into the display apparatus including theorganic EL device.

The light-receiving device includes an active layer functioning as aphotoelectric conversion layer between a pair of electrodes. In thisspecification and the like, one of the pair of electrodes is referred toas a pixel electrode and the other is referred to as a common electrodein some cases.

For example, the subpixels 80 a, 80 b, and 80 c may be subpixels forthree colors of R, G, and B, and the subpixel 80 d may include alight-receiving device. In that case, the subpixel 80 d includes atleast an active layer.

One of the pair of electrodes of the light-receiving device functions asan anode, and the other electrode functions as a cathode. The case wherethe pixel electrode functions as an anode and the common electrodefunctions as a cathode is described below as an example. Thelight-receiving device is driven by application of reverse bias betweenthe pixel electrode and the common electrode, whereby light incident onthe light-receiving device can be sensed and electric charge can begenerated and extracted as current. Alternatively, the pixel electrodemay function as a cathode and the common electrode may function as ananode.

To the light-receiving device, a manufacturing method similar to that ofthe light-emitting device can be applied. An island-shaped active layer(also referred to as a photoelectric conversion layer) included in thelight-receiving device is formed not by patterning with use of a metalmask but by depositing a film to be an active layer over an entiresurface and processing it, whereby the island-shaped active layer canhave a uniform thickness. Moreover, providing the sacrificial layer overthe active layer can reduce damage to the active layer in themanufacturing process of the display apparatus, resulting in animprovement in reliability of the light-receiving device.

Here, a layer shared by the light-receiving device and thelight-emitting device may have a different function. In thisspecification, the name of a component is sometimes based on itsfunction in the light-emitting device. For example, a hole-injectionlayer functions as a hole-injection layer in the light-emitting deviceand functions as a hole-transport layer in the light-receiving device.Similarly, an electron-injection layer functions as anelectron-injection layer in the light-emitting device and functions asan electron-transport layer in the light-receiving device. A layershared by the light-receiving device and the light-emitting device mayhave the same function in both the light-receiving device and thelight-emitting device. The hole-transport layer functions as ahole-transport layer in both of the light-emitting device and thelight-receiving device, and the electron-transport layer functions as anelectron-transport layer in both of the light-emitting device and thelight-receiving device.

The active layer included in the light-receiving device includes asemiconductor. Examples of the semiconductor include an inorganicsemiconductor such as silicon and an organic semiconductor including anorganic compound. This embodiment shows an example in which an organicsemiconductor is used as the semiconductor contained in the activelayer. The use of an organic semiconductor is preferable because thelight-emitting layer and the active layer can be formed by the samemethod (e.g., a vacuum evaporation method) and thus the samemanufacturing apparatus can be used.

Examples of an n-type semiconductor material included in the activelayer are electron-accepting organic semiconductor materials such asfullerene (e.g., C₆₀ and C₇₀) and fullerene derivatives. Fullerene has asoccer ball-like shape, which is energetically stable. Both the HOMOlevel and the LUMO level of fullerene are deep (low). Having a deep LUMOlevel, fullerene has an extremely high electron-accepting property(acceptor property). When n-electron conjugation (resonance) spreads ina plane as in benzene, the electron-donating property (donor property)usually increases. Although n-electron conjugation widely spreads infullerene having a spherical shape, its electron-accepting property ishigh. The high electron-accepting property efficiently causes rapidcharge separation and is useful for the light-receiving device. Both C₆₀and C₇₀ have a wide absorption band in the visible light region, and C₇₀is especially preferable because of having a larger π-electronconjugation system and a wider absorption band in the long wavelengthregion than C₆₀. Other examples of fullerene derivatives include[6,6]-phenyl-C₇₁-butyric acid methyl ester (abbreviation: PC₇₀BM),[6,6]-phenyl-C₆₁-butyric acid methyl ester (abbreviation: PC₆₀BM), and1′,1″,4′,4″-tetrahydro-di[1,4]methanonaphthaleno[1,2:2′,3′,56,60:2″,3″][5,6]fullerene-C₆₀(abbreviation: ICBA).

Other examples of an n-type semiconductor material include a metalcomplex having a quinoline skeleton, a metal complex having abenzoquinoline skeleton, a metal complex having an oxazole skeleton, ametal complex having a thiazole skeleton, an oxadiazole derivative, atriazole derivative, an imidazole derivative, an oxazole derivative, athiazole derivative, a phenanthroline derivative, a quinolinederivative, a benzoquinoline derivative, a quinoxaline derivative, adibenzoquinoxaline derivative, a pyridine derivative, a bipyridinederivative, a pyrimidine derivative, a naphthalene derivative, ananthracene derivative, a coumarin derivative, a rhodamine derivative, atriazine derivative, and a quinone derivative.

Examples of a p-type semiconductor material contained in the activelayer include electron-donating organic semiconductor materials such ascopper(II) phthalocyanine (CuPc), tetraphenyldibenzoperiflanthene (DBP),zinc phthalocyanine (ZnPc), tin phthalocyanine (SnPc), and quinacridone.

Examples of a p-type semiconductor material include a carbazolederivative, a thiophene derivative, a furan derivative, and a compoundhaving an aromatic amine skeleton. Other examples of the p-typesemiconductor material include a naphthalene derivative, an anthracenederivative, a pyrene derivative, a triphenylene derivative, a fluorenederivative, a pyrrole derivative, a benzofuran derivative, abenzothiophene derivative, an indole derivative, a dibenzofuranderivative, a dibenzothiophene derivative, an indolocarbazolederivative, a porphyrin derivative, a phthalocyanine derivative, anaphthalocyanine derivative, a quinacridone derivative, a polyphenylenevinylene derivative, a polyparaphenylene derivative, a polyfluorenederivative, a polyvinylcarbazole derivative, and a polythiophenederivative.

The HOMO level of the electron-donating organic semiconductor materialis preferably shallower (higher) than the HOMO level of theelectron-accepting organic semiconductor material. The LUMO level of theelectron-donating organic semiconductor material is preferably shallower(higher) than the LUMO level of the electron-accepting organicsemiconductor material.

Fullerene having a spherical shape is preferably used as theelectron-accepting organic semiconductor material, and an organicsemiconductor material having a substantially planar shape is preferablyused as the electron-donating organic semiconductor material. Moleculesof similar shapes tend to aggregate, and aggregated molecules of similarkinds, which have molecular orbital energy levels close to each other,can increase the carrier-transport property.

For example, the active layer is preferably formed by co-evaporation ofan n-type semiconductor and a p-type semiconductor. Alternatively, theactive layer may be formed by stacking an n-type semiconductor and ap-type semiconductor.

In addition to the active layer, the light-receiving device may furtherinclude a layer containing a substance with a high hole-transportproperty, a substance with a high electron-transport property, or asubstance with a bipolar property (a substance with a high electron- andhole-transport property). The layer included in the light-receivingdevice is not limited to the above, and a layer containing a substancewith a high hole-injection property, a hole-blocking material, amaterial with a high electron-injection property, or anelectron-blocking material may be further included.

Either a low molecular compound or a high molecular compound can be usedin the light-receiving device, and an inorganic compound may also beincluded. Each layer included in the light-receiving device can beformed by any of the following methods: an evaporation method (includinga vacuum evaporation method), a transfer method, a printing method, aninkjet method, and a coating method.

As the hole-transport material, a high molecular compound such aspoly(3,4-ethylenedioxythiophene)/poly(styrenesulfonic acid) (PEDOT/PSS),or an inorganic compound such as a molybdenum oxide or copper iodide(CuI) can be used, for example. As the electron-transport material, aninorganic compound such as zinc oxide (ZnO) can be used.

For the active layer, a high molecular compound such aspoly[[4,8-bis[5-(2-ethylhexyl)-2-thienyl]benzo[1,2-b:4,5-b′]dithiophene-2,6-diyl]-2,5-thiophenediyl[5,7-bis(2-ethylhexyl)-4,8-dioxo-4H,8H-benzo[1,2-c:4,5-c]dithiophene-1,3-diyl]]polymer(abbreviation: PBDB-T) or a PBDB-T derivative, which functions as adonor, can be used. For example, a method in which an acceptor materialis dispersed to PBDB-T or a PBDB-T derivative can be used.

The active layer may contain a mixture of three or more kinds ofmaterials. For example, a third material may be mixed with an n-typesemiconductor material and a p-type semiconductor material in order toextend the wavelength range. The third material may be a low molecularcompound or a high molecular compound.

The display apparatus can detect the touch or approach of an objectwhile displaying an image because the pixel included in the displayapparatus includes the light-emitting device and the light-receivingdevice and thus has a light-receiving function. For example, not only astructure in which all the subpixels included in the display apparatusdisplay an image, but also a structure in which some subpixels emitlight as a light source and the other subpixels display an image can beemployed.

In the display apparatus of one embodiment of the present invention, thelight-emitting devices are arranged in a matrix in a display portion,and an image can be displayed on the display portion. Furthermore, thelight-receiving devices are arranged in a matrix in the display portion,and the display portion has one or both of an image capturing functionand a sensing function in addition to an image displaying function. Thedisplay portion can be used as an image sensor or a touch sensor. Thatis, by sensing light with the display portion, an image can be capturedor the approach or contact of an object (e.g., a finger, a hand, or apen) can be sensed. Furthermore, in the display apparatus of oneembodiment of the present invention, the light-emitting devices can beused as a light source of the sensor. Accordingly, a light-receivingportion and a light source do not need to be provided separately fromthe display apparatus; hence, the number of components of an electronicdevice can be reduced.

In the display apparatus of one embodiment of the present invention,when an object reflects (or scatters) light emitted from thelight-emitting device included in the display portion, thelight-receiving device can sense the reflected light (or the scatteredlight); thus, image capturing or touch sensing is possible even in adark place.

When the light-receiving device is used as an image sensor, the displayapparatus can capture an image with use of the light-receiving device.For example, the display apparatus of this embodiment can be used as ascanner.

For example, data on biological information, such as a fingerprint or apalm print, can be acquired with the image sensor. That is, a biologicalauthentication sensor can be incorporated in the display apparatus. Whenthe display apparatus incorporates a biological authentication sensor,the number of components of an electronic device can be reduced ascompared to the case where a biological authentication sensor isprovided separately from the display apparatus; thus, the size andweight of the electronic device can be reduced.

When the light-receiving device is used as the touch sensor, the displayapparatus can sense the approach or contact of an object with use of thelight-receiving device.

Each of the pixels in FIGS. 41A to 41D includes the subpixel G, thesubpixel B, the subpixel R, and the subpixel PS.

The pixel illustrated in FIG. 41A employs stripe arrangement. The pixelillustrated in FIG. 41B employs matrix arrangement.

FIGS. 41C and 41D illustrate examples in which one pixel is provided intwo rows and three columns. Three subpixels (the subpixel G, thesubpixel B, and the subpixel R) are provided in the upper row (firstrow). In FIG. 41C, three subpixels PS are provided in the lower row(second row). In FIG. 41D, two subpixels PS are provided in the lowerrow (second row). Matching the positions of the subpixels in the upperrow and the lower row as illustrated in FIG. 41C enables dust and thelike that would be produced in the manufacturing process to be removedefficiently. Thus, a display apparatus having high display quality canbe provided. Note that the layout of the subpixels is not limited to thelayouts illustrated in FIGS. 41A to 41D.

Each of the subpixels R, G, and B includes a light-emitting device thatemits white light. In each of the subpixels R, G, and B, thecorresponding coloring layer is provided to overlap with thelight-emitting device.

The subpixel PS includes a light-receiving device. The wavelength oflight detected by the subpixel PS is not particularly limited.

The light-receiving device included in the subpixel PS preferablydetects visible light, and preferably detects at least one of blue,violet, bluish violet, green, greenish yellow, yellow, orange, and red.The light-receiving device included in the subpixel PS may detectinfrared light.

The display apparatus 1000 illustrated in FIG. 41E includes, between asubstrate 351 and a substrate 359, a layer 353 including alight-receiving device, a functional layer 355, and a layer 357including a light-emitting device.

The functional layer 355 includes a circuit for driving alight-receiving device and a circuit for driving a light-emittingdevice. One or more selected from a switch, a transistor, a capacitor, aresistor, a wiring, and a terminal can be provided in the functionallayer 355. Note that in the case where the light-emitting device and thelight-receiving device are driven by a passive-matrix method, astructure not provided with a switch and a transistor may be employed.

For example, as illustrated in FIG. 41E, when light emitted by thelight-emitting device included in the layer 357 is reflected by a humaneye and its surroundings, the light-receiving device included in thelayer 353 detects the reflected light. Accordingly, information of thesurroundings, surface, or inside of the human eye (e.g., the number ofblinks, the movement of an eyeball, and the movement of an eyelid) canbe detected.

Note that the insulators, the conductors, and the semiconductorsdisclosed in this specification and the like can be formed by a physicalvapor deposition (PVD) method or a CVD method. Examples of a PVD methodinclude a sputtering method, a resistance heating evaporation method, anelectron beam evaporation method, and a PLD method. Examples of a CVDmethod include a plasma CVD method and a thermal CVD method. Examples ofa thermal CVD method include a metal organic chemical vapor deposition(MOCVD) method and an ALD method.

A thermal CVD method has an advantage that no defect due to plasmadamage is generated since it does not utilize plasma for forming a film.

Deposition by a thermal CVD method may be performed in such a mannerthat a source gas and an oxidizer are supplied to a chamber at a time,the pressure in the chamber is set to an atmospheric pressure or areduced pressure, and the source gas and the oxidizer react with eachother in the vicinity of a substrate or over the substrate.

Deposition by an ALD method may be performed in such a manner that thepressure in a chamber is set to an atmospheric pressure or a reducedpressure, source gases for reaction are sequentially introduced into thechamber, and then the sequence of the gas introduction is repeated. Forexample, two or more kinds of source gases are sequentially supplied tothe chamber by switching of corresponding switching valves (alsoreferred to as high-speed valves) such that the source gases are notmixed. For example, a first source gas is introduced, an inert gas(e.g., argon or nitrogen) or the like is introduced at the same time asor after the introduction of the first source gas, and then a secondsource gas is introduced. Note that in the case where the first sourcegas and the inert gas are introduced at a time, the inert gas serves asa carrier gas, and the inert gas may also be introduced at the same timeas the introduction of the second source gas. Alternatively, the secondsource gas may be introduced after the first source gas is exhausted byvacuum evacuation instead of the introduction of the inert gas. Thefirst source gas is adsorbed on a surface of a substrate to form a firstthin layer, and then the second source gas is introduced to react withthe first thin layer; thus, a second thin layer is stacked over thefirst thin layer, and a thin film is formed as a result. The sequence ofthe gas introduction is controlled and repeated a plurality of timesuntil a desired thickness is obtained, whereby a thin film withexcellent step coverage can be formed. The thickness of the thin filmcan be adjusted by the number of repetition times of the sequence of thegas introduction; therefore, an ALD method makes it possible to adjust athickness accurately and thus is suitable for manufacturing a minuteFET.

A variety of films such as the metal film, the semiconductor film, andthe inorganic insulating film described in this embodiment and theforegoing embodiments can be formed by a thermal CVD method such as anMOCVD method or an ALD method. For example, to form an In—Ga—Zn—O film,trimethylindium (In(CH₃)₃), trimethylgallium (Ga(CH₃)₃), anddimethylzinc (Zn(CH₃)₂) are used. Without limitation to the abovecombination, triethylgallium (Ga(C₂H₅)₃) can be used instead oftrimethylgallium, and diethylzinc (Zn(C₂H₅)₂) can be used instead ofdimethylzinc.

For example, when a hafnium oxide film is formed by a depositionapparatus using an ALD method, two kinds of gases, i.e., ozone (O₃) asan oxidizer and a source gas obtained by vaporization of a liquidcontaining a solvent and a hafnium precursor compound (hafnium alkoxideor hafnium amide such as tetrakis(dimethylamide)hafnium (TDMAH,Hf[N(CH₃)₂]₄)) are used. Alternatively,tetrakis(ethylmethylamide)hafnium may be used, for instance.

For example, when an aluminum oxide film is formed by a depositionapparatus using ALD, two kinds of gases, i.e., H₂O as an oxidizer and asource gas obtained by vaporization of a liquid containing a solvent andan aluminum precursor compound (e.g., trimethylaluminum (e.g., TMA orAl(CH₃)₃)) are used. Alternatively, tris(dimethylamide)aluminum,triisobutylaluminum, aluminumtris(2,2,6,6-tetramethyl-3,5-heptanedionate), or the like may be used.

For example, when a silicon oxide film is formed by a depositionapparatus using an ALD method, hexachlorodisilane is adsorbed on asurface where the film is to be formed, and radicals of an oxidizing gas(e.g., O₂ or dinitrogen monoxide) are supplied to react with theadsorbate.

For example, when a tungsten film is formed by a deposition apparatususing an ALD method, a WF₆ gas and a B₂H₆ gas are sequentiallyintroduced to form an initial tungsten film, and then a WF₆ gas and anH₂ gas are sequentially introduced to form a tungsten film. Note that aSiH₄ gas may be used instead of a B₂H₆ gas.

In the case where an In—Ga—Zn—O film is formed as an oxide semiconductorfilm with a deposition apparatus using an ALD method, a precursor(sometimes called a metal precursor) and an oxidizer (sometimes called areactant or a non-metal precursor) are sequentially and repetitivelyintroduced. Specifically, for example, an In(CH₃)₃ gas as a precursorand as an O₃ gas) as an oxidizer are introduced to form an In—O layer; aGa(CH₃)₃ gas as a precursor and an O₃ gas) as an oxidizer are introducedto form a GaO layer; and then, a Zn(CH₃)₂ gas as a precursor and an O₃gas) as an oxidizer are introduced to form a ZnO layer. Note that theorder of these layers is not limited to this example. A mixed oxidelayer such as an In—Ga—O layer, an In—Zn—O layer, or a Ga—Zn—O layer maybe formed with the use of these gases. Note that although an H₂O gasthat is obtained by bubbling water with an inert gas (e.g., Ar) may beused instead of an O₃ gas), it is preferable to use an O₃ gas), whichdoes not contain H. An In(C₂H₅)₃ gas may be used instead of an In(CH₃)₃gas. A Ga(C₂H₅)₃ gas may be used instead of a Ga(CH₃)₃ gas. Moreover, aZn(CH₃)₂ gas may be used.

The display portion of the display apparatus of one embodiment of thepresent invention can have a freely selected screen ratio (aspectratio). For example, the display portion is compliant with any ofvarious screen ratios such as 1:1 (square), 4:3, 16:9, and 16:10.

The shape of the display portion of the display apparatus of oneembodiment of the present invention is not particularly limited. Thedisplay portion can have any of various shapes such as a rectangularshape, a polygonal shape (e.g., octagon), a circular shape, and anelliptical shape.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 5

This embodiment will describe a display module that can be used in theelectronic device of one embodiment of the present invention.

<Structure Example of Display Module>

First, a display module including the display apparatus that can be usedin an electronic device of one embodiment of the present invention isdescribed.

FIG. 42A is a perspective view of a display module 1280. The displaymodule 1280 includes the display apparatus 1000 and an FPC 1290.

The display module 1280 includes a substrate 1291 and a substrate 1292.The display module 1280 includes a display portion 1281. The displayportion 1281 is a region of the display module 1280 where an image isdisplayed and is a region where light emitted from pixels provided in apixel portion 1284 described later can be seen.

FIG. 42B is a perspective view schematically illustrating a structure onthe substrate 1291 side. Over the substrate 1291, a circuit portion1282, a pixel circuit portion 1283 over the circuit portion 1282, andthe pixel portion 1284 over the pixel circuit portion 1283 are stacked.In addition, a terminal portion 1285 for connection to the FPC 1290 isincluded in a portion not overlapping with the pixel portion 1284 overthe substrate 1291. The terminal portion 1285 and the circuit portion1282 are electrically connected to each other through a wiring portion1286 formed of a plurality of wirings.

Note that the pixel portion 1284 and the pixel circuit portion 1283correspond to the pixel layer PXAL described above, for example. Thecircuit portion 1282 corresponds to the circuit layer SICL describedabove, for example.

The pixel portion 1284 includes a plurality of pixels 1284 a arrangedperiodically. An enlarged view of one pixel 1284 a is shown on the rightside in FIG. 42B. The pixel 1284 a includes a light-emitting device 1430a, a light-emitting device 1430 b, and a light-emitting device 1430 cwhich are different in the emission color. Note that the light-emittingdevices 1430 a, 1430 b, and 1430 c correspond to the above-describedlight-emitting devices 150 a, 150 b, and 150 c. The above-describedlight emitting devices may be arranged in a stripe pattern as shown inFIG. 42B. Alternatively, a variety of kinds of patterns such as a deltapattern or a PenTile pattern can be employed.

The pixel circuit portion 1283 includes a plurality of pixel circuits1283 a arranged periodically.

One pixel circuit 1283 a is a circuit that controls light emission fromthree light-emitting devices included in one pixel 1284 a. One pixelcircuit 1283 a may be provided with three circuits each of whichcontrols light emission of one light-emitting device. For example, thepixel circuit 1283 a can include at least one selection transistor, onecurrent control transistor (driving transistor), and a capacitor for onelight-emitting device. A gate signal is input to a gate of the selectiontransistor, and a source signal is input to one of a source and a drainof the selection transistor. With such a structure, an active-matrixdisplay apparatus is achieved.

The circuit portion 1282 includes a circuit for driving the pixelcircuits 1283 a in the pixel circuit portion 1283. For example, one orboth of a gate line driver circuit and a source line driver circuit arepreferably included. In addition, at least one of an arithmetic circuit,a memory circuit, a power supply circuit, and the like may be included.

The FPC 1290 serves as a wiring for supplying an image signal, a powersupply potential, or the like to the circuit portion 1282 from theoutside. An IC may be mounted on the FPC 1290.

The display module 1280 can have a structure in which one or both of thepixel circuit portion 1283 and the circuit portion 1282 are stackedbelow the pixel portion 1284; thus, the aperture ratio (the effectivedisplay area ratio) of the display portion 1281 can be significantlyhigh. For example, the aperture ratio of the display portion 1281 can behigher than or equal to 40% and lower than 100%, preferably higher thanor equal to 50% and lower than or equal to 95%, and further preferablyhigher than or equal to 60% and lower than or equal to 95%. Furthermore,the pixels 1284 a can be arranged extremely densely and thus the displayportion 1281 can have greatly high resolution. For example, the pixels1284 a are preferably arranged in the display portion 1281 with aresolution higher than or equal to 2000 ppi, preferably higher than orequal to 3000 ppi, further preferably higher than or equal to 5000 ppi,still further preferably higher than or equal to 6000 ppi, and lowerthan or equal to 20000 ppi or lower than or equal to 30000 ppi.

Such a display module 1280 has extremely high resolution, and thus canbe suitably used for a device for VR such as a head-mounted display or aglasses-type device for AR. For example, even in the case of a structurein which the display portion of the display module 1280 is seen througha lens, pixels of the extremely-high-resolution display portion 1281included in the display module 1280 are prevented from being seen whenthe display portion is enlarged by the lens, so that display providing ahigh sense of immersion can be performed. Without being limited thereto,the display module 1280 can be suitably used for electronic devicesincluding a relatively small display portion. For example, the displaymodule 1280 can be favorably used in a display portion of an electronicdevice to be worn on a human body, such as a wrist-watch type electronicdevice.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 6

In this embodiment, an example of a head-mounted display including adisplay apparatus will be described as an example of an electronicdevice of one embodiment of the present invention.

FIGS. 43A and 43B are external views of an electronic device 8300, whichis a head-mounted display.

The electronic device 8300 includes a housing 8301, a display portion8302, an operation button 8303, and a band-like fixing member 8304.

The operation button 8303 functions as a power button or the like. Theelectronic device 8300 may include another button in addition to theoperation button 8303.

As shown in FIG. 43C, lenses 8305 may be provided between the displayportions 8302 and the user's eyes. The user can see magnified images onthe display portions 8302 through the lenses 8305, thereby having a morerealistic sensation. In this case, as shown in FIG. 43C, a dial 8306 forchanging the position of the lenses and adjusting visibility may beprovided.

As the display portion 8302, a display apparatus with extremely highresolution is preferably used, for example. With use of a displayapparatus with extremely high resolution for the display portion 8302,even when the display portion 8302 is enlarged by the lens 8305 asillustrated in FIG. 43C, a more realistic image can be displayed withoutuser's visual recognition of pixels.

FIGS. 43A to 43C show examples in which the head-mounted displayincludes one display portion 8302. Such a structure can reduce thenumber of components.

The display portion 8302 can display an image for the right eye and animage for the left eye side by side on a right region and a left region,respectively. Thus, a three-dimensional image using binocular disparitycan be displayed.

One image which can be seen with both eyes may be displayed on theentire display portion 8302. Thus, a panorama image can be displayedfrom end to end of the field of view, which can provide a higher senseof reality.

Here, the electronic device 8300 preferably has a mechanism foroptimizing the curvature of the display portion 8302 in accordance withthe size of the user's head, the position of the user's eyes, or thelike. For example, the user himself/herself may adjust the curvature ofthe display portion 8302 by operating a dial 8307 for adjusting thecurvature of the display portion 8302. Alternatively, the electronicdevice 8300 may include a sensor for detecting the size of the user'shead, the position of the user's eyes, or the like (e.g., a camera, acontact sensor, and a noncontact sensor) on the housing 8301 and have amechanism for adjusting the curvature of the display portion 8302 on thebasis of data detected by the sensor.

In the case where the lenses 8305 are used, the electronic device 8300preferably has a mechanism for adjusting the position and angle of thelenses 8305 in synchronization with the curvature of the display portion8302. Alternatively, the dial 8306 may have a function of adjusting theangle of the lenses.

FIGS. 43E and 43F show an example of including a driver portion 8308that controls the curvature of the display portion 8302. The driverportion 8308 is fixed to at least a part of the display portion 8302.The driver portion 8308 has a function of changing the shape of thedisplay portion 8302 when the part of the driver portion 8308 that isfixed to the display portion 8302 changes in shape or moves.

FIG. 43E is a schematic view showing the case where a user 8310 having arelatively large head wears the housing 8301. In that case, the driverportion 8308 adjusts the shape of the display portion 8302 so that thecurvature is relatively small (the radius of curvature is large).

By contrast, FIG. 43F shows the case where a user 8311 having a smallerhead than the user 8310 wears the housing 8301. The user 8311 has ashorter distance between the eyes than the user 8310. In that case, thedriver portion 8308 adjusts the shape of the display portion 8302 sothat the curvature is large (the radius of curvature is small). In FIG.43F, the position and shape of the display portion 8302 in FIG. 43E aredenoted by a dashed line.

When the electronic device 8300 has such a mechanism for adjusting thecurvature of the display portion 8302, optimal display can be offered toa variety of users of all ages and genders.

When the curvature of the display portion 8302 is changed in accordancewith contents displayed on the display portion 8302, the user can feelhigh realistic sensation. For example, shaking can be expressed byvibrating the curvature of the display portion 8302. In this way, it ispossible to produce various effects according to the scene in contents,and provide the user with new experiences. Further realistic display canbe provided in conjunction with a vibration module provided in thehousing 8301.

Note that the electronic device 8300 may include two display portions8302 as shown in FIG. 43D.

When the two display portions 8302 are provided, the user's eyes can seethe respective display portions. This allows a high-resolution image tobe displayed even when three-dimensional display using parallax isperformed. In addition, the display portion 8302 is curved around an arcwith an approximate center at the user's eye. This keeps a certaindistance between the user's eye and the display surface of the displayportion, enabling the user to see a more natural image. Furthermore, theuser's eye is positioned in the normal direction of the display surfaceof the display portion; therefore, even when the luminance orchromaticity of light from the display portion is changed with theviewing angle, the influence of the change can be substantiallyignorable and thus a more realistic image can be displayed.

FIGS. 44A to 44C are external views of another electronic device 8300,which is different from the electronic devices 8300 in FIGS. 43A to 43D.Specifically, the electronic device 8300 in FIGS. 44A to 44C isdifferent from those in FIGS. 43A to 43D in including a fixture means8304 a worn on a head and a pair of lenses 8305, for example.

A user can see display on the display portion 8302 through the lenses8305. The display portion 8302 is preferably curved because the user canfeel high realistic sensation. Another image displayed in another regionof the display portion 8302 is viewed through the lenses 8305, so thatthree-dimensional display using parallax can be performed. Note that thenumber of the display portions 8302 is not limited to one; two displayportions 8302 may be provided for user's respective eyes.

As the display portion 8302, a display apparatus with extremely highresolution is preferably used, for example. With use of a displayapparatus with extremely high resolution for the display portion 8302,even when the display portion 8302 is enlarged by the lens 8305 asillustrated in FIG. 44C, a more realistic image can be displayed withoutuser's visual recognition of pixels.

The head-mounted display, which is an electronic device of oneembodiment of the present invention, may be an electronic device 8200 inFIG. 44D, which is a glasses-type head-mounted display.

The electronic device 8200 includes a mounting portion 8201, a lens8202, a main body 8203, a display portion 8204, and a cable 8205. Themounting portion 8201 includes a battery 8206.

Power is supplied from the battery 8206 to the main body 8203 throughthe cable 8205. The main body 8203 includes a wireless receiver toreceive image data and display it on the display portion 8204. The mainbody 8203 includes a camera, and data on the movement of the eyeballs orthe eyelids of the user can be used as an input means.

The mounting portion 8201 may include a plurality of electrodes capableof sensing the current flowing accompanying with the movement of theuser's eyeball at a position in contact with the user to recognize theuser's sight line. The mounting portion 8201 may also have a function ofmonitoring the user's pulse with use of the current flowing in theelectrodes. The mounting portion 8201 may include a sensor, such as atemperature sensor, a pressure sensor, or an acceleration sensor; thus,the electronic device 8200 may have a function of displaying the user'sbiological information on the display portion 8204. For example, theelectronic device 8200 may have a function of changing images displayedon the display portion 8204 in accordance with the movement of theuser's head.

FIGS. 45A to 45C each illustrate an external view of an electronicdevice 8750, which is different from the electronic devices 8300illustrated in FIGS. 43A to 43D and FIGS. 44A to 44C and the electronicdevice 8200 illustrated in FIG. 44D.

FIG. 45A is a perspective view illustrating the front surface, the topsurface, and the left side surface of the electronic device 8750, andFIGS. 45B and 45C are perspective views each illustrating the backsurface, the bottom surface, and the right side surface of theelectronic device 8750.

The electronic device 8750 includes a pair of display apparatuses 8751,a housing 8752, a pair of temples 8754, a cushion 8755, a pair of lenses8756, and the like. The pair of display apparatuses 8751 is positionedto be seen through the lenses 8756 inside the housing 8752.

Here, one of the pair of display apparatuses 8751 corresponds to thedisplay apparatus DSP in FIG. 19 and the like. Although not illustrated,the electronic device 8750 in FIGS. 45A to 45C includes an electroniccomponent (e.g., a circuit included in the functional circuit regionMFNC or the driver circuit region DRV in FIG. 19).

Although not illustrated, the electronic device 8750 in FIGS. 45A to 45Cincludes a camera (e.g., the sensor PDA in FIG. 19). The camera can takean image of the user's eye and its vicinity. Although not illustrated,in the housing 8752 of the electronic device 8750 in FIGS. 45A to 45C, amotion detection portion, an audio, a control portion, a communicationportion, and a battery are provided.

The electronic device 8750 is an electronic device for VR. A userwearing the electronic device 8750 can see an image displayed on thedisplay apparatus 8751 through the lens 8756. Furthermore, when the pairof display apparatuses 8751 displays different images, three-dimensionaldisplay using parallax can be performed.

An input terminal 8757 and an output terminal 8758 are provided on theback surface side of the housing 8752. A cable for supplying an imagesignal from a video output device or power for charging a batteryprovided in the housing 8752 can be connected to the input terminal8757. The output terminal 8758 can function as, for example, an audiooutput terminal to which earphones or headphones can be connected.

The housing 8752 preferably includes a mechanism by which the left andright positions of the lens 8756 and the display apparatus 8751 can beadjusted to the optimal positions in accordance with the position of theuser's eye. In addition, the housing 8752 preferably includes amechanism for adjusting focus by changing the distance between the lens8756 and the display apparatus 8751.

With use of the camera, the display apparatus 8751, and the aboveelectronic component, the electronic device 8750 can estimate the stateof a user of the electronic device 8750 and can display information onthe estimated user's state on the display apparatus 8751. Alternatively,information on a user of an electronic device connected to theelectronic device 8750 through a network can be displayed on the displayapparatus 8751.

The cushion 8755 is a portion in contact with the user's face(specifically, forehead, cheek, or the like). The cushion 8755 is inclose contact with the user's face, so that light leakage can beprevented, which increases the sense of immersion. A soft material ispreferably used for the cushion 8755 so that the cushion 8755 is inclose contact with the face of the user wearing the electronic device8750. For example, a material such as rubber, silicone rubber, urethane,or sponge can be used. Furthermore, when a material whose surface iscovered with cloth, leather (e.g., natural leather or syntheticleather), or the like is used, a gap is unlikely to be generated betweenthe user's face and the cushion 8755, whereby light leakage can besuitably prevented. Furthermore, using such a material is preferablebecause it has a soft texture and the user does not feel cold whenwearing the device in a cold season. The member in contact with user'sskin, such as the cushion 8755 or the temple 8754, is preferablydetachable because cleaning or replacement can be easily performed.

The electronic device in this embodiment may further include earphones8754A. The earphones 8754A include a communication portion (notillustrated) and has a wireless communication function. The earphones8754A can output audio data with the wireless communication function.Note that the earphones 8754A may include a vibration mechanism tofunction as bone-conduction earphones.

Like earphones 8754B illustrated in FIG. 45C, the earphones 8754A can beconnected to the temple 8754 directly or by wiring. The earphones 8754Band the temple 8754 may each have a magnet. This is preferred becausethe earphones 8754B can be fixed to the temple 8754 with magnetic forceand thus can be easily housed.

The earphones 8754A may include a sensor portion. With use of the sensorportion, the state of the user of the electronic device can beestimated.

The electronic device of one embodiment of the present invention mayinclude one or more of an antenna, a battery, a camera, a speaker, amicrophone, a touch sensor, and an operation button, in addition to anyone of the above components.

The electronic device of one embodiment of the present invention mayinclude a secondary battery. It is preferable that the secondary batterybe capable of being charged by non-contact power transmission.

Examples of the secondary battery include a lithium ion secondarybattery (such as a lithium polymer battery using a gel electrolyte(lithium ion polymer battery)), a nickel-hydride battery, anickel-cadmium battery, an organic radical battery, a lead-acid battery,an air secondary battery, a nickel-zinc battery, and a silver-zincbattery.

The electronic device of one embodiment of the present invention mayinclude an antenna. With the antenna receiving a signal, the electronicdevice can display an image, information, or the like on a displayportion. When the electronic device includes an antenna and a secondarybattery, the antenna may be used for contactless power transmission.

The display portion of the electronic device of one embodiment of thepresent invention can display, for example, an image with full highdefinition, 4K2K, 8K4K, 16K8K, or higher resolution.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

Embodiment 7

In this embodiment, electronic devices each including a displayapparatus fabricated using one embodiment of the present invention willbe described.

Electronic devices described below as examples are each provided with adisplay apparatus of one embodiment of the present invention in adisplay portion. Thus, the electronic devices achieve high resolution.In addition, the electronic devices can achieve both high resolution anda large screen.

One embodiment of the present invention includes the display apparatusand one or more selected from an antenna, a battery, a housing, acamera, a speaker, a microphone, a touch sensor, and an operationbutton.

The electronic device of one embodiment of the present invention mayinclude a secondary battery. It is preferable that the secondary batterybe capable of being charged by non-contact power transmission.

Examples of the secondary battery include a lithium ion secondarybattery (such as a lithium polymer battery using a gel electrolyte(lithium ion polymer battery)), a nickel-hydride battery, anickel-cadmium battery, an organic radical battery, a lead-acid battery,an air secondary battery, a nickel-zinc battery, and a silver-zincbattery.

The electronic device of one embodiment of the present invention mayinclude an antenna. With the antenna receiving a signal, the electronicdevice can display an image, information, or the like on a displayportion. When the electronic device includes an antenna and a secondarybattery, the antenna may be used for contactless power transmission.

The display portion of the electronic device of one embodiment of thepresent invention can display, for example, an image with full highdefinition, 4K2K, 8K4K, 16K8K, or higher resolution.

Examples of electronic devices include electronic devices havingrelatively large screens, such as a television device, a laptop personalcomputer, a monitor, digital signage, a pachinko machine, and a gamemachine; a digital camera; a digital video camera; a digital photoframe; a mobile phone; a portable game machine; a portable informationterminal; and an audio reproducing device.

The electronic device using one embodiment of the present invention canbe incorporated along a flat surface or a curved surface of an inside oroutside wall surface of a house or a building, an interior or exteriorsurface of a car, or the like.

[Mobile Phone]

An information terminal 5500 illustrated in FIG. 46A is a mobile phone(a smartphone), which is a type of information terminal. The informationterminal 5500 includes a housing 5510 and a display portion 5511. Asinput interfaces, a touch panel and a button are provided in the displayportion 5511 and the housing 5510, respectively.

The information terminal 5500 can display an image with high displayquality on the display portion 5511 by including the display apparatusdescribed in the above embodiment.

[Wearable Terminal]

FIG. 46B is an external view of an information terminal 5900 as anexample of a wearable terminal. The information terminal 5900 includes ahousing 5901, a display portion 5902, an operation button 5903, a crown5904, a band 5905, and the like.

The wearable terminal can display an image with high display quality onthe display portion 5902 by including the display apparatus described inthe above embodiment.

[Information Terminal]

FIG. 46C illustrates a notebook information terminal 5300. The notebookinformation terminal 5300 in FIG. 46C includes, for example, a displayportion 5331 in a housing 5330 a and a keyboard portion 5350 in ahousing 5330 b.

Like the information terminal 5500 described above, the notebookinformation terminal 5300 can display an image with high display qualityon the display portion 5331 by including the display apparatus describedin the above embodiment.

Note that although FIGS. 46A to 46C illustrate a smartphone, a wearableterminal, and a notebook information terminal as examples of electronicdevice, one embodiment of the present invention can also be applied toan information terminal other than a smartphone, a wearable terminal,and a notebook information terminal. Examples of the informationterminals other than a smartphone, a wearable terminal, and a notebookinformation terminal include a personal digital assistant (PDA), adesktop information terminal, and a workstation.

[Camera]

FIG. 46D is an external view of a camera 8000 to which a finder 8100 isattached.

The camera 8000 includes a housing 8001, a display portion 8002,operation buttons 8003, and a shutter button 8004. Furthermore, adetachable lens 8006 is attached to the camera 8000.

Note that the lens 8006 may be included in the housing of the camera8000.

Images can be taken with the camera 8000 at the press of the shutterbutton 8004 or the touch of the display portion 8002 serving as a touchpanel.

The housing 8001 includes a mount including an electrode, so that thefinder 8100, a stroboscope, or the like can be connected to the housing.

The finder 8100 includes a housing 8101, a display portion 8102, and abutton 8103.

The housing 8101 is attached to the camera 8000 by a mount forengagement with the mount of the camera 8000. The finder 8100 candisplay an image or the like received from the camera 8000 on thedisplay portion 8102.

The button 8103 functions as a power supply button or the like.

A display apparatus of one embodiment of the present invention can beused in the display portion 8002 of the camera 8000 and the displayportion 8102 of the finder 8100. Note that a finder may be incorporatedin the camera 8000.

[Game Machine]

FIG. 46E is an external view of a portable game machine 5200 as anexample of a game machine. The portable game machine 5200 includes ahousing 5201, a display portion 5202, a button 5203, and the like.

An image displayed on the portable game machine 5200 can be output witha display apparatus such as a television device, a personal computerdisplay, a game display, or a head-mounted display.

The portable game machine 5200 can display an image with high displayquality on the display portion 5202 by including the display apparatusdescribed in the above embodiment. In addition, the portable gamemachine 5200 with low power consumption can be provided. Furthermore,heat generation from a circuit can be reduced owing to low powerconsumption; thus, the influence of heat generation on the circuit, theperipheral circuit, and the module can be reduced.

Although FIG. 46E illustrates the portable game machine as an example ofa game machine, the electronic device of one embodiment of the presentinvention is not limited thereto. Examples of the electronic device ofone embodiment of the present invention include a stationary gamemachine, an arcade game machine installed in an entertainment facility(a game center, an amusement park, or the like), and a throwing machinefor batting practice installed in sports facilities.

[Television Device]

FIG. 46F is a perspective view illustrating a television device. Thetelevision device 9000 includes a housing 9002, a display portion 9001,a speaker 9003, an operation key 9005 (including a power switch or anoperation switch), a connection terminal 9006, a sensor 9007 (a sensorhaving a function of measuring force, displacement, position, speed,acceleration, angular velocity, rotational frequency, distance, light,liquid, magnetism, temperature, chemical substance, sound, time,hardness, electric field, current, voltage, power, radiation, flow rate,humidity, gradient, oscillation, odor, or infrared rays), and the like.The semiconductor device of one embodiment of the present invention canbe provided in the television device. The television device can includethe display portion 9001 having a screen size of, for example, 50 inchesor more, or 100 inches or more.

The television device 9000 can display an image with high displayquality on the display portion 9001 by including the display apparatusdescribed in the above embodiment. In addition, the television device9000 with low power consumption can be provided. Furthermore, heatgeneration from a circuit can be reduced owing to low power consumption;thus, the influence of heat generation on the circuit, the peripheralcircuit, and the module can be reduced.

[Moving Vehicle]

The display apparatus of one embodiment of the present invention can beused around a driver's seat in a car, which is a moving vehicle.

FIG. 46G illustrates a windshield and its vicinity inside a car. FIG.46G shows a display panel 5701, a display panel 5702, and a displaypanel 5703 which are attached to a dashboard, and a display panel 5704attached to a pillar.

The display panels 5701 to 5703 can provide various kinds of informationby displaying navigation data, a speedometer, a tachometer, a mileage, afuel meter, a gearshift state, air-conditioning settings, and the like.Items displayed on the display panel and their layout can be changed asappropriate to suit the user's preferences, resulting in moresophisticated design. The display panels 5701 to 5703 can also be usedas lighting devices.

The display panel 5704 can compensate for the view obstructed by thepillar (blind areas) by showing an image taken by an imaging unitprovided for the car body. That is, displaying an image taken by theimaging unit provided on the outside of the car body leads toelimination of blind areas and enhancement of safety. Displaying animage to compensate for the area which a driver cannot see, makes itpossible for the driver to confirm safety easily and comfortably. Thedisplay panel 5704 can also be used as a lighting device.

The display apparatus of one embodiment of the present invention can beused for the display panels 5701 to 5704, for example.

Although a car is described above as an example of a moving vehicle,moving vehicles are not limited to a car. Examples of the movingvehicles include a train, a monorail train, a ship, and a flying object(a helicopter, an unmanned aircraft (a drone), an airplane, and arocket), and these moving vehicles can use the display apparatus of oneembodiment of the present invention.

[Digital Signage]

FIG. 46H illustrates an example of a digital signage that can beattached to a wall. FIG. 46H illustrates a state where a digital signage6200 is attached to a wall 6201. The display apparatus of one embodimentof the present invention can be used in a display portion in the digitalsignage 6200, for example. An interface such as a touch panel may beprovided in the digital signage 6200.

Note that an electronic device attachable to a wall is described aboveas an example of a digital signage, the kind of the digital signage isnot limited thereto. Examples of the digital signage include a digitalsignage mounted on a pillar, a freestanding digital signage placed onthe ground, and a digital signage mounted on a rooftop or a side wall ofa building.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

This application is based on Japanese Patent Application Serial No.2021-081532 filed with Japan Patent Office on May 13, 2021, the entirecontents of which are hereby incorporated by reference.

What is claimed is:
 1. A semiconductor device comprising: a firsttransistor; a second transistor; a third transistor; a fourthtransistor; a fifth transistor; a sixth transistor; a seventhtransistor; an eighth transistor; a ninth transistor; a tenthtransistor; a first capacitor; a second capacitor; a third capacitor;and a fourth capacitor, wherein a first gate of the first transistor iselectrically connected to a first gate of the fourth transistor, whereinone of a source and a drain of the first transistor is electricallyconnected to one of a source and a drain of the second transistor, oneof a source and a drain of the fifth transistor, one of a source and adrain of the eighth transistor, and a first terminal of the fourthcapacitor, wherein the other of the source and the drain of the fifthtransistor is electrically connected to a first gate of the sixthtransistor and a first terminal of the second capacitor, wherein theother of the source and the drain of the eighth transistor iselectrically connected to a first gate of the ninth transistor and afirst terminal of the third capacitor, wherein a first gate of thesecond transistor is electrically connected to a first terminal of thefirst capacitor, one of a source and a drain of the third transistor,one of a source and a drain of the fourth transistor, a first gate ofthe seventh transistor, and a first gate of the tenth transistor,wherein one of a source and a drain of the seventh transistor iselectrically connected to one of a source and a drain of the sixthtransistor and a second terminal of the second capacitor, and whereinone of a source and a drain of the tenth transistor is electricallyconnected to one of a source and a drain of the ninth transistor and asecond terminal of the third capacitor.
 2. A semiconductor devicecomprising: a first transistor; a second transistor; a third transistor;a fourth transistor; a fifth transistor; a sixth transistor; a seventhtransistor; an eighth transistor; a ninth transistor; a tenthtransistor; an eleventh transistor; a first capacitor; a secondcapacitor; and a third capacitor; wherein a first gate of the firsttransistor is electrically connected to one of a source and a drain ofthe eleventh transistor, wherein the other of the source and the drainof the eleventh transistor is electrically connected to a first gate ofthe fourth transistor, wherein one of a source and a drain of the firsttransistor is electrically connected to one of a source and a drain ofthe second transistor, one of a source and a drain of the fifthtransistor, and one of a source and a drain of the eighth transistor,wherein the other of the source and the drain of the fifth transistor iselectrically connected to a first gate of the sixth transistor and afirst terminal of the second capacitor, wherein the other of the sourceand the drain of the eighth transistor is electrically connected to afirst gate of the ninth transistor and a first terminal of the thirdcapacitor, wherein a first gate of the second transistor is electricallyconnected to a first terminal of the first capacitor, one of a sourceand a drain of the third transistor, one of a source and a drain of thefourth transistor, a first gate of the seventh transistor, and a firstgate of the tenth transistor, wherein one of a source and a drain of theseventh transistor is electrically connected to one of a source and adrain of the sixth transistor and a second terminal of the secondcapacitor, and wherein one of a source and a drain of the tenthtransistor is electrically connected to one of a source and a drain ofthe ninth transistor and a second terminal of the third capacitor. 3.The semiconductor device according to claim 2, wherein a first gate ofthe eleventh transistor is electrically connected to a second gate ofthe eleventh transistor.
 4. The semiconductor device according to claim2, further comprising: a twelfth transistor, wherein the first gate ofthe first transistor is electrically connected to one of a source and adrain of the twelfth transistor, wherein the other of the source and thedrain of the eleventh transistor is electrically connected to a firstgate of the eleventh transistor and the other of the source and thedrain of the twelfth transistor, and wherein the other of the source andthe drain of the sixth transistor is electrically connected to a firstgate of the twelfth transistor.
 5. The semiconductor device according toclaim 1, wherein a first gate of the fifth transistor is electricallyconnected to a second gate of the fifth transistor, and wherein a firstgate of the eighth transistor is electrically connected to a second gateof the eighth transistor.
 6. A semiconductor device comprising: a firsttransistor; a second transistor; a third transistor; a fourthtransistor; a sixth transistor; a seventh transistor; a ninthtransistor; a tenth transistor; a first capacitor; a second capacitor;and a third capacitor, wherein a first gate of the first transistor iselectrically connected to a first gate of the fourth transistor, whereinone of a source and a drain of the first transistor is electricallyconnected to one of a source and a drain of the second transistor, afirst gate of the sixth transistor, a first terminal of the secondcapacitor, a first gate of the ninth transistor, and a first terminal ofthe third capacitor, wherein a first gate of the second transistor iselectrically connected to a first terminal of the first capacitor, oneof a source and a drain of the third transistor, one of a source and adrain of the fourth transistor, a first gate of the seventh transistor,and a first gate of the tenth transistor, wherein one of a source and adrain of the seventh transistor is electrically connected to one of asource and a drain of the sixth transistor and a second terminal of thesecond capacitor, and wherein one of a source and a drain of the tenthtransistor is electrically connected to one of a source and a drain ofthe ninth transistor and a second terminal of the third capacitor. 7.The semiconductor device according to claim 6, further comprising: afifth transistor; and an eighth transistor, wherein the one of thesource and the drain of the first transistor is electrically connectedto one of a source and a drain of the fifth transistor, and one of asource and a drain of the eighth transistor, wherein the other of thesource and the drain of the fifth transistor is electrically connectedto the first gate of the sixth transistor and the first terminal of thesecond capacitor, wherein the other of the source and the drain of theeighth transistor is electrically connected to the first gate of theninth transistor and the first terminal of the third capacitor, andwherein the first gate of the second transistor is electricallyconnected to a second gate of the eighth transistor.
 8. Thesemiconductor device according to claim 1, wherein the first gate of thefirst transistor is electrically connected to a second gate of the firsttransistor, wherein a first gate of the third transistor is electricallyconnected to a second gate of the third transistor, wherein the firstgate of the sixth transistor is electrically connected to a second gateof the sixth transistor, and wherein the first gate of the ninthtransistor is electrically connected to a second gate of the ninthtransistor.
 9. The semiconductor device according to claim 1, wherein asecond gate of the seventh transistor is electrically connected to theother of the source and the drain of the seventh transistor, and whereina second gate of the tenth transistor is electrically connected to theother of the source and the drain of the tenth transistor.
 10. Thesemiconductor device according to claim 1, wherein each of the secondtransistor and the fourth transistor has a multi-gate structure.
 11. Adisplay apparatus comprising: a gate driver circuit comprising a shiftregister comprising the semiconductor device according to claim 1; asource driver circuit; and a pixel array.
 12. An electronic devicecomprising: the display apparatus according to claim 11; and a housing.